Silicon Oxide Film Formation by Focused Ion Beam (FIB)-Assisted Deposition

1990 ◽  
Vol 29 (Part 1, No. 1) ◽  
pp. 219C-219C
Author(s):  
Haruki Komano ◽  
Youji Ogawa ◽  
Tadahiro Takigawa
1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2372-2375 ◽  
Author(s):  
Haruki Komano ◽  
Youji Ogawa ◽  
Tadahiro Takigawa

1989 ◽  
Vol 157 ◽  
Author(s):  
Gikan H. Takaoka ◽  
Hiroshi Tsuji ◽  
Junzo Ishikawa

ABSTRACTSiO2 films were prepared at a substrate temperature of 100°C by the simultaneous use of a microwave ion source and an ICB system. Transparent and good insulating SiO2 films could be obtained by using 02 gas ions, and they were thermally and chemically stable. Furthermore, both the ionization energy and the incident energy of the 02 gas ions were found to enhance the chemical reaction between SiO and 02 molecules, resulting in the Si02 film formation at a low substrate temperature.


1988 ◽  
Author(s):  
Takuya Fukuda ◽  
Kazuo Suzuki ◽  
Yasuhiro Mochizuki ◽  
Michio Ohue ◽  
Naohiro Momma ◽  
...  

1996 ◽  
Vol 68 (6) ◽  
pp. 732-734 ◽  
Author(s):  
M. Ogasawara ◽  
M. Kariya ◽  
H. Nakamura ◽  
H. Komano ◽  
S. Inoue ◽  
...  

2008 ◽  
Vol 47 (11) ◽  
pp. 8476-8478 ◽  
Author(s):  
Phil Kook Son ◽  
Bong Kyun Jo ◽  
Jae Chang Kim ◽  
Tae-Hoon Yoon ◽  
Soon Joon Rho ◽  
...  

Author(s):  
Qi Chen ◽  
W. D. Griffiths

AbstractIn this work, Mo was added into Al melt to reduce the detrimental effect of double-oxide film defect. An air bubble was trapped in a liquid metal (2L99), served as an analogy for double-oxide film defect in aluminum alloy castings. It was found that the addition of Mo significantly accelerated the consumption of the entrapped bubble by 60 pct after holding for 1 hour. 2 sets of testbar molds were then cast, with 2L99 and 2L99+Mo alloy, with a badly designed running system, intended to deliberately introduce double oxide film defects into the liquid metal. Tensile testing showed that, with the addition of Mo, the Weibull modulus of the Ultimate Tensile Strength and pct Elongation was increased by a factor of 2.5 (from 9 to 23) and 2 (from 2.5 to 4.5), respectively. The fracture surface of 2L99+Mo alloy testbars revealed areas of nitrides contained within bi-film defects. Cross-sections through those defects by Focused Ion Beam milling suggested that the surface layer were permeable, which could be as thick as 30 μm, compared to around 500 nm for the typical oxide film thickness. Transmission Electron Microscopy analysis suggested that the nitride-containing layer consisted of nitride particles as well as spinel phase of various form. The hypothesis was raised that the permeability of the nitride layers promote the reaction between the entrapped atmosphere in the defect and the surrounding liquid metal, reducing the defect size and decreasing their impact on mechanical properties.


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