Evaluation of Hydrogenation on Semiconductor Surfaces Treated with Hydrogen-Plasma Beam Excited by Electron Cyclotron Resonance

Hydrogen Plasma ◽

Electron Cyclotron ◽

Semiconductor Surfaces ◽

Plasma Beam

Dependence of GaAs etch rate on the angle of incidence of a hydrogen plasma beam excited by electron cyclotron resonance

10.1063/1.102926 ◽

1990 ◽

Vol 56 (24) ◽

pp. 2393-2395 ◽

Cited By ~ 6

Author(s):

I. Suemune ◽

A. Kishimoto ◽

K. Hamaoka ◽

Y. Honda ◽

Y. Kan ◽

...

Keyword(s):

Cyclotron Resonance ◽

Etch Rate ◽

Hydrogen Plasma ◽

Electron Cyclotron ◽

Angle Of Incidence ◽

Plasma Beam

2021 IEEE 22nd International Conference of Young Professionals in Electron Devices and Materials (EDM) ◽

Resistive Switching Effect in Thermal SiO2 Films Treated in Electron-Cyclotron Resonance Hydrogen Plasma

10.1109/edm52169.2021.9507691 ◽

2021 ◽

Author(s):

Ramin Iskhakzay ◽

Vitalii Voronkovskii ◽

Vladimir Aliev ◽

Vladimir Gritsenko

Keyword(s):

Resistive Switching ◽

Cyclotron Resonance ◽

Hydrogen Plasma ◽

Electron Cyclotron ◽

Switching Effect ◽

Sio2 Films ◽

Resistive Switching Effect

Experimental study of the hot and warm electron populations in an electron cyclotron resonance argon–oxygen–hydrogen plasma

Physics of Plasmas ◽

10.1063/1.871300 ◽

1995 ◽

Vol 2 (6) ◽

pp. 2138-2140 ◽

Cited By ~ 11

Author(s):

R. Friedlein ◽

S. Herpich ◽

H. Hiller ◽

H. Wirth ◽

G. Zschornack ◽

...

Keyword(s):

Experimental Study ◽

Cyclotron Resonance ◽

Hydrogen Plasma ◽

Electron Cyclotron

Temperature peaking at beginning of breakdown in 2.45 GHz pulsed off-resonance electron cyclotron resonance ion source hydrogen plasma

Review of Scientific Instruments ◽

10.1063/1.4757113 ◽

2012 ◽

Vol 83 (10) ◽

pp. 103302 ◽

Cited By ~ 12

Author(s):

O. D. Cortázar ◽

A. Megía-Macías ◽

A. Vizcaíno-de-Julián

Keyword(s):

Cyclotron Resonance ◽

Hydrogen Plasma ◽

Ion Source ◽

Electron Cyclotron ◽

Resonance Electron

Coupling effect of electron cyclotron resonance hydrogen plasma and dc biasing in fabricating diamond nanotips

Physics of Plasmas ◽

10.1063/1.2815796 ◽

2007 ◽

Vol 14 (12) ◽

pp. 123501 ◽

Cited By ~ 3

Author(s):

L. Wang ◽

L. Cui ◽

X. D. Zhu ◽

X. H. Wen

Keyword(s):

Cyclotron Resonance ◽

Coupling Effect ◽

Hydrogen Plasma ◽

Electron Cyclotron ◽

Dc Biasing

GaAs‐oxide removal using an electron cyclotron resonance hydrogen plasma

10.1063/1.104397 ◽

1991 ◽

Vol 58 (11) ◽

pp. 1143-1145 ◽

Cited By ~ 42

Author(s):

Z. Lu ◽

M. T. Schmidt ◽

D. Chen ◽

R. M. Osgood ◽

W. M. Holber ◽

...

Keyword(s):

Cyclotron Resonance ◽

Hydrogen Plasma ◽

Electron Cyclotron ◽

Oxide Removal

Direct Growth of AlGaAs/GaAs Single Quantum Wells on GaAs Substrates Cleaned by Electron Cyclotron Resonance (ECR) Hydrogen Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.l91 ◽

1994 ◽

Vol 33 (Part 2, No. 1B) ◽

pp. L91-L93 ◽

Cited By ~ 14

Author(s):

Naoto Kondo ◽

Yasushi Nanishi ◽

Masatomo Fujimoto

Keyword(s):

Quantum Wells ◽

Cyclotron Resonance ◽

Hydrogen Plasma ◽

Electron Cyclotron ◽

Single Quantum ◽

Gaas Substrates ◽

Direct Growth

Electrical Properties of AlGaAs/GaAs Two-Dimensional Electron Gases (2DEGs) Grown on GaAs Substrates Cleaned by an Electron Cyclotron Resonance (ECR) Hydrogen Plasma

Japanese Journal of Applied Physics ◽

10.1143/jjap.35.l1494 ◽

1996 ◽

Vol 35 (Part 2, No. 11B) ◽

pp. L1494-L1497 ◽

Cited By ~ 4

Author(s):

Naoto Kondo

Keyword(s):

Electrical Properties ◽

Cyclotron Resonance ◽

Hydrogen Plasma ◽

Electron Cyclotron ◽

Two Dimensional ◽

Dimensional Electron ◽

Electron Gases ◽

Gaas Substrates

Surface roughness and defect morphology in electron cyclotron resonance hydrogen plasma cleaned (100) silicon at low temperatures

10.1063/1.115327 ◽

1995 ◽

Vol 67 (24) ◽

pp. 3590-3592 ◽

Cited By ~ 34

Author(s):

Ki‐Hyun Hwang ◽

Euijoon Yoon ◽

Ki‐Woong Whang ◽

Jeong Yong Lee

Keyword(s):

Surface Roughness ◽

Low Temperatures ◽

Cyclotron Resonance ◽

Hydrogen Plasma ◽

Electron Cyclotron ◽

Defect Morphology

ZnSe nitrogen doping using an ion-free electron-cyclotron-resonance plasma beam

10.1063/1.118644 ◽

1997 ◽

Vol 70 (11) ◽

pp. 1453-1455 ◽

Cited By ~ 3

Author(s):

Hironori Tsukamoto ◽

Masaharu Nagai ◽

Eisaku Katoh ◽

Kohshi Tamamura ◽

Akira Ishibashi ◽

...

Keyword(s):

Free Electron ◽

Cyclotron Resonance ◽

Nitrogen Doping ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Beam ◽

Resonance Plasma