Computational Studies on the Shape and Control of Plasmas in Magnetron Sputtering Systems
1993 ◽
Vol 32
(Part 1, No. 12A)
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pp. 5698-5702
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1999 ◽
Vol 38
(Part 1, No. 7B)
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pp. 4450-4454
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Keyword(s):
Keyword(s):
1998 ◽
Vol 37
(Part 1, No. 3A)
◽
pp. 965-969
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2021 ◽
1996 ◽
Vol 35
(Part 1, No. 4A)
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pp. 2302-2305
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2018 ◽
pp. A5.1:1-A5.1:12
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Keyword(s):
1973 ◽
Vol 31
◽
pp. 164-165
Keyword(s):