X-Ray Photoelectron Spectroscopic Observation on the Formation of Carbon Nitride Thin Films Produced by Low-Energy Nitrogen Ion Implantation

2000 ◽  
Vol 39 (Part 1, No. 7B) ◽  
pp. 4540-4544 ◽  
Author(s):  
Iwao Shimoyama ◽  
Tetsuhiro Sekiguchi ◽  
Yuji Baba
Keyword(s):  
Thin Films ◽  
Ion Implantation ◽  
Carbon Nitride ◽  
Spectroscopic Observation ◽  
Low Energy ◽  
Nitrogen Ion Implantation ◽  
X Ray ◽  
Nitrogen Ion

Investigations on nitrogen ion implantation effects in vacuum evaporated CdS thin films using Raman scattering and X-ray diffraction studies

2001 ◽  
Vol 304 (1-4) ◽  
pp. 175-180 ◽  
Author(s):  
K. Senthil ◽  
D. Mangalaraj ◽  
Sa.K. Narayandass ◽  
R. Kesavamoorthy ◽  
G.L.N. Reddy ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Implantation ◽  
Raman Scattering ◽  
X Ray Diffraction ◽  
Nitrogen Ion Implantation ◽  
X Ray ◽  
Cds Thin Films ◽  
Nitrogen Ion

Effects of nitrogen ion implantation on the thermal stability of tungsten thin films

1998 ◽  
Vol 16 (2) ◽  
pp. 477-481 ◽  
Author(s):  
Yong Tae Kim ◽  
Chul Soon Kwon ◽  
Dong Joon Kim ◽  
Jong-Wan Park ◽  
Chang Woo Lee
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Ion Implantation ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion ◽  
Thermal Stability Of

Effects of Irradiation by Low Energy Nitrogen Ions on Carbon Nitride Thin Films

2002 ◽  
Vol 750 ◽  
Author(s):  
Yuka Nasu ◽  
Masami Aono ◽  
Shinichiro Aizawa ◽  
Nobuaki Kitazawa ◽  
Yoshihisa Watanabe
Keyword(s):  
Thin Films ◽  
Nitrogen Content ◽  
Vapor Deposition ◽  
Photoelectron Spectroscopy ◽  
Carbon Nitride ◽  
Chemical Vapor ◽  
Low Energy ◽  
Carbon Filament ◽  
X Ray ◽  
Nitrogen Ions

ABSTRACTCarbon nitride (CNx) thin films have been prepared by hot carbon filament chemical vapor deposition, and the nitrogen content in the films is approximately 0.05. The CNx films have been irradiated by 0.1 keV nitrogen ions to increase the nitrogen content after deposition. The nitrogen content in the CNx films was obtained with X-ray photoelectron spectroscopy. Scanning electron microscopy was employed to study microstructures of the films. The experimental results show that nitrogen ions are chemically combined with the CNx films and as a result the nitrogen content increases up to approximately 0.30. Furthermore, it is found that nitrogen ions change the film microstructures and sputter the surfaces of CNx films.

Friction-induced microstructural variations in steels subjected to low-energy elevated-temperature nitrogen ion implantation

Wear ◽  
1999 ◽  
Vol 225-229 ◽  
pp. 1148-1158 ◽  
Author(s):  
A.V Byeli ◽  
V.A Kukareko ◽  
I.V Boyarenko ◽  
A.A Kolesnikova
Keyword(s):  
Elevated Temperature ◽  
Ion Implantation ◽  
Low Energy ◽  
Nitrogen Ion Implantation ◽  
Nitrogen Ion
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