Crystal Defects in Epitaxial Layer on Nitrogen-doped Czochralski-grown Silicon Substrate (II) –Suppression of the Crystal Defects in Epitaxial Layer by the Control of Crystal Growth Condition and Carbon Co-doping–
2004 ◽
Vol 43
(4A)
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pp. 1247-1253
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2004 ◽
Vol 43
(4A)
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pp. 1241-1246
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1988 ◽
Vol 91
(4)
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pp. 617-622
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2008 ◽
Vol 64
(a1)
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pp. C593-C593
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1992 ◽
Vol 50
(2)
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pp. 1544-1545
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