Behavior of Local Current Leakage in Stressed Gate SiO2Films Analyzed by Conductive Atomic Force Microscopy
2004 ◽
Vol 43
(7B)
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pp. 4683-4686
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2005 ◽
2006 ◽
Vol 45
(4B)
◽
pp. 2954-2960
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2009 ◽
Vol 48
(6)
◽
pp. 060202
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2016 ◽
Vol 55
(4S)
◽
pp. 04EE05
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2016 ◽
Vol 858
◽
pp. 1137-1140
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