A Three-Dimensional Micro-Electro-Mechanical System (MEMS) Optical Switch Module Using Low-Cost Highly Accurate Polymer Components

2004 ◽  
Vol 43 (8B) ◽  
pp. 5824-5827 ◽  
Author(s):  
Tsuyoshi Yamamoto ◽  
Johji Yamaguchi ◽  
Nobuyuki Takeuchi ◽  
Akira Shimizu ◽  
Renshi Sawada ◽  
...  
Keyword(s):  
Mechanical System ◽  
Optical Switch ◽  
Low Cost ◽  
Three Dimensional ◽  
Micro Electro Mechanical System ◽  
Switch Module

Calibration of a micro-electro mechanical system-based accelerometer for vehicle navigation

2018 ◽  
Vol 233 (2) ◽  
pp. 554-560 ◽  
Author(s):  
A Ghaffari ◽  
A Khodayari ◽  
S Nosoudi ◽  
S Arefnezhad
Keyword(s):  
Mechanical System ◽  
Clustering Algorithm ◽  
Moving Objects ◽  
Inertial Sensors ◽  
Low Cost ◽  
Micro Electro Mechanical System ◽  
Subtractive Clustering ◽  
Measured Velocity ◽  
Preliminary Model ◽  
Dynamic Errors

Micro-electro mechanical system-based inertial sensors have broad applications in moving objects including in vehicles for navigation purposes. The low-cost micro-electro mechanical system sensors are normally subject to high dynamic errors such as linear or nonlinear bias, misalignment errors and random noises. In the class of low cost sensors, keeping the accuracy at a reasonable range has always been challenging for engineers. In this paper, a novel method for calibrating low-cost micro-electro mechanical system accelerometers is presented based on soft computing approaches. The method consists of two steps. In the first step, a preliminary model for error sources is presented based on fuzzy subtractive clustering algorithm. This model is then improved using adaptive neuro-fuzzy systems. A Kalman filter is also used to calculate the vehicle velocity and its position based on calibrated measured acceleration. The performance of the presented approach has been validated in the simulated and real experimental driving scenarios. The results show that this method can improve the accuracy of the accelerometer output, measured velocity and position of the vehicle by 79.11%, 97.63% and 99.28%, in the experimental test, respectively. The presented procedure can be used in collision avoidance and emergency brake assist systems.

A rapid seismic data calibration technique using integrated micro-electro-mechanical system inertial sensor groups for a 3C vertical seismic profile

Geophysics ◽  
2017 ◽  
Vol 82 (6) ◽  
pp. P109-P118
Author(s):  
Huailiang Li ◽  
Xianguo Tuo ◽  
Tong Shen ◽  
Mark Julian Henderson ◽  
Jérémie Courtois
Keyword(s):  
Mechanical System ◽  
Seismic Data ◽  
Inertial Sensors ◽  
Inertial Sensor ◽  
Low Cost ◽  
Measuring Method ◽  
Seismic Profile ◽  
Micro Electro Mechanical System ◽  
Vertical Seismic Profile ◽  
Sensor Package

Calibration of 3C vertical seismic profile (VSP) data is an exciting challenge because the orientation of the tool is random when only seismic data are considered. We have augmented the sensor package on the VSP tool with micro-electro-mechanical system (MEMS) inertial sensors and applied a gesture measuring method to determine the tool orientation and calibration. This technique can quickly produce high precision, orientation, and angle information when integrated with the seismometer. The augmented sensor package consists of a low-cost triaxial MEMS gyroscope, an electronic compass, and an accelerometer. The technique to process the gesture information is based on the OpenGL software for 3D modeling. We have tested this approach on a large number of field data sets and it appeared to be faster and more reliable than other approaches.

MEMS gyroscope/TAM-integrated attitude estimation based on moving horizon estimation

2016 ◽  
Vol 231 (8) ◽  
pp. 1451-1459 ◽  
Author(s):  
Jingli Huang ◽  
Guorong Zhao ◽  
Xiangyu Zhang
Keyword(s):  
Mechanical System ◽  
Low Cost ◽  
Estimation Algorithm ◽  
Micro Electro Mechanical System ◽  
Attitude Estimation ◽  
Moving Horizon Estimation ◽  
Estimation Model ◽  
External Interference ◽  
Estimation System ◽  
The Military

To improve the accuracy of the attitude sensor micro electro mechanical system gyroscope in low cost satellite, a nonlinear moving horizon estimation algorithm based on micro-electro mechanical system gyroscope/three-axis magnetometer is proposed in this paper. First, a quaternion micro-electro mechanical system gyroscope/three-axis magnetometer-integrated attitude estimation model is established so as to improve the accuracy of micro-electro mechanical system gyroscope. Thanks to the concealment and autonomy, these two low cost sensors have great potential in the military area. Second, taking advantage of optimal problem in coping with constraints, a real time moving horizon estimation algorithm with equality constraint is designed to deal with the disability of solving quaternion normalization analytically in the frame work of Kalman. In this algorithm, Gauss–Newton iterative method is used to obtain the optimal state estimation in the “window”. Meanwhile, strong tracking filter of arrival cost is designed outside of the “window” to enhance system robustness for that three-axis magnetometer is vulnerable to external interference. Third, the proposed MHE is applied in the micro-electro mechanical system gyroscope/three-axis magnetometer attitude estimation system. The simulation results show that the method has higher accuracy and robustness.

scholarly journals A cross product calibration method for micro-electro mechanical system gyroscope in unmanned aerial vehicle attitude determination system

2020 ◽  
pp. 002029402094494
Author(s):  
Yongjun Wang ◽  
Zhi Li ◽  
Xiang Li
Keyword(s):  
Mechanical System ◽  
Unmanned Aerial Vehicle ◽  
Attitude Determination ◽  
Low Cost ◽  
Integral Form ◽  
Calibration Method ◽  
Micro Electro Mechanical System ◽  
Cross Product ◽  
Integrated Navigation ◽  
Aerial Vehicle

This paper presents a novel calibration method for micro-electro mechanical system gyroscope in attitude measurement system of small rotor unmanned aerial vehicles. This method is based on an observation vector and its cross product, which is especially valuable for the in-field calibration without the aid of external equipment. By analysing the error model of the tri-axial gyroscope, the principle of calibration is proposed. Compared with other algorithms, numerical simulations are performed to evaluate the effectiveness of integral form of the cross product calibration method. Experiment on the hex-rotor unmanned aerial vehicle platform shows that the proposed method has great advantages in low-cost integrated navigation system.

Trapping and Manipulation of Bioparticles by a 3-D Optimal Multiple-Designed Offset Carbon-Microelectrode Array in C-MEMS Fabrication

2011 ◽  
Vol 10 ◽  
pp. 25-42
Author(s):  
M. Rizwan Malik ◽  
Tie Lin Shi ◽  
Zi Rong Tang
Keyword(s):  
Electric Field ◽  
Field Intensity ◽  
Electric Field Intensity ◽  
Microelectrode Array ◽  
Numerical Solutions ◽  
Low Cost ◽  
Three Dimensional ◽  
Micro Electro Mechanical System ◽  
Large Gradient ◽  
Geometric Size

A dielectrophoretic approach with latest developed three-dimensional (3-D) carbon micro-electro-mechanical system (C-MEMS) has been extended as a potential route with idyllic solution to recommend a low-cost, biocompatible and high throughput manipulation and positioning for bio-particles as compared to 2D-planar microelectrodes. Presented in this paper is a novel platform for modelling and simulation of C-MEMS microfabrication process for dielectrophoresis (DEP) force based on various 3-D offset-microelectrode configurations. Numerical solutions are employed to investigate the upshots of multi-designed microelectrodes, applied voltage, electrode edge-to-edge gap and geometric size of microelectrodes on the electric field intensity gradient, induced by an AC voltage for the deployment of broad categories of bioparticles creation, utilization and their manipulation (separation, concentration, transportation and focusing). Sharp edge electrodes are the principle focus of this paper for DEP manipulation that is more convenient to enhance the electric field intensity distribution. The results show that square column electrodes configuration comparatively create large gradient magnitude in electric field intensity as compared to all other configurations. It is also observed that electric field extends drastically with increases in microelectrode height. These findings are consistent with literature experimental reports and will provide vital strategy for optimal design of DEP devices with 3-D C-MEMS.

128×128 three-dimensional MEMS optical switch module with simultaneous optical path connection for optical cross-connect systems

2011 ◽  
Vol 50 (21) ◽  
pp. 4037 ◽  
Author(s):  
Masato Mizukami ◽  
Joji Yamaguchi ◽  
Naru Nemoto ◽  
Yuko Kawajiri ◽  
Hirooki Hirata ◽  
...  
Keyword(s):  
Optical Switch ◽  
Three Dimensional ◽  
Optical Path ◽  
Optical Cross Connect ◽  
Cross Connect ◽  
Switch Module

scholarly journals Fast Synchronization Method of Comb-Actuated MEMS Mirror Pair for LiDAR Application

Micromachines ◽  
2021 ◽  
Vol 12 (11) ◽  
pp. 1292
Author(s):  
Fahu Xu ◽  
Dayong Qiao ◽  
Changfeng Xia ◽  
Xiumin Song ◽  
Yaojun He
Keyword(s):  
Phase Synchronization ◽  
Low Cost ◽  
Three Dimensional ◽  
Micro Electro Mechanical System ◽  
Frame Rate ◽  
Lidar System ◽  
Synchronization Process ◽  
Synchronization Method ◽  
Mirror Pair ◽  
Set Up

MEMS-based LiDAR (micro-electro–mechanical system based light detection and ranging), with a low cost and small volume, becomes a promising solution for the two-dimensional (2D) and three-dimensional (3D) optical imaging. A semi-coaxial MEMS LiDAR design, based on a synchronous MEMS mirror pair, was proposed in our early study. In this paper, we specifically reveal the synchronization method of the comb-actuated MEMS mirror pair, including the frequency, amplitude, and phase synchronization. The frequency sweeping and phase adjustment are simultaneously implemented to accelerate the MEMS mirror synchronization process. The experiment is set up and the entire synchronization process is completed within 5 s. Eventually, a one-beam MEMS LiDAR system with the synchronous MEMS mirror pair is set up and a LiDAR with a field of view (FOV) of 60°, angular resolution of 0.2°, and frame rate of 360 Hz is obtained. The experimental results verify the feasibility of the MEMS mirror synchronization method and show a promising potential application prospect for the MEMS LiDAR system.

Fabrication of 3D Temperature Sensor Using Magnetostrictive Inkjet Printhead

2020 ◽  
Vol 64 (5) ◽  
pp. 50405-1-50405-5
Author(s):  
Young-Woo Park ◽  
Myounggyu Noh
Keyword(s):  
Flexible Electronics ◽  
Inkjet Printing ◽  
Temperature Sensor ◽  
Computer Aided Design ◽  
Low Cost ◽  
Three Dimensional ◽  
Drop On Demand ◽  
Aided Design ◽  
Nanoparticle Ink ◽  
Inkjet Printhead

Abstract Recently, the three-dimensional (3D) printing technique has attracted much attention for creating objects of arbitrary shape and manufacturing. For the first time, in this work, we present the fabrication of an inkjet printed low-cost 3D temperature sensor on a 3D-shaped thermoplastic substrate suitable for packaging, flexible electronics, and other printed applications. The design, fabrication, and testing of a 3D printed temperature sensor are presented. The sensor pattern is designed using a computer-aided design program and fabricated by drop-on-demand inkjet printing using a magnetostrictive inkjet printhead at room temperature. The sensor pattern is printed using commercially available conductive silver nanoparticle ink. A moving speed of 90 mm/min is chosen to print the sensor pattern. The inkjet printed temperature sensor is demonstrated, and it is characterized by good electrical properties, exhibiting good sensitivity and linearity. The results indicate that 3D inkjet printing technology may have great potential for applications in sensor fabrication.

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