Cross-Sectional Analysis on Hardness and Sp3Bond Fraction of Diamond-Like Carbon Film Prepared by Mass-Separated Ion Beam Deposition

2004 ◽  
Vol 43 (No. 7B) ◽  
pp. L978-L980
Author(s):  
Kazuhiro Yamamoto
Keyword(s):  
Ion Beam ◽  
Carbon Film ◽  
Diamond Like Carbon ◽  
Cross Sectional ◽  
Ion Beam Deposition ◽  
Cross Sectional Analysis ◽  
Diamond Like Carbon Film ◽  
Sectional Analysis ◽  
Beam Deposition

Electron energy loss spectroscopy of diamond-like carbon thin films

1992 ◽  
Vol 50 (2) ◽  
pp. 1272-1273
Author(s):  
J. Kulik ◽  
Y. Lifshitz ◽  
G.D. Lempert ◽  
S. Rotter ◽  
J.W. Rabalais ◽  
...  
Keyword(s):  
Thin Films ◽  
Energy Loss ◽  
Electron Energy ◽  
Ion Beam ◽  
Diamond Like Carbon ◽  
Ion Beam Deposition ◽  
Chemistry Research ◽  
Carbon Thin Films ◽  
Electron Energy Loss ◽  
Beam Deposition

Carbon thin films with diamond-like properties have generated significant interest in condensed matter science in recent years. Their extreme hardness combined with insulating electronic characteristics and high thermal conductivity make them attractive for a variety of uses including abrasion resistant coatings and applications in electronic devices. Understanding the growth and structure of such films is therefore of technological interest as well as a goal of basic physics and chemistry research. Recent investigations have demonstrated the usefulness of energetic ion beam deposition in the preparation of such films. We have begun an electron microscopy investigation into the microstructure and electron energy loss spectra of diamond like carbon thin films prepared by energetic ion beam deposition.The carbon films were deposited using the MEIRA ion beam facility at the Soreq Nuclear Research Center in Yavne, Israel. Mass selected C+ beams in the range 50 to 300 eV were directed onto Si {100} which had been etched with HF prior to deposition.

Quantitative Electrical Analysis of FIB Prepared Vias on BiCMOS and CMOS090 Designs

2006 ◽  
Author(s):  
B. Domengès ◽  
P. Poirier
Keyword(s):  
Ion Beam ◽  
Beam Current ◽  
Kelvin Probe ◽  
Metal Line ◽  
Cross Sectional ◽  
Probe Technique ◽  
Cross Sectional Analysis ◽  
Controlling Parameter ◽  
Electrical Analysis ◽  
Sectional Analysis

Abstract In this study, the resistance of FIB prepared vias was characterized by the Kelvin probe technique and their physical characteristics studied using cross-sectional analysis. Two domains of resistivity were isolated in relation to the ion beam current used for the deposition of the via metal (Pt). Also submicrometer vias were investigated on 4.2 µm deep metal lines of a BiCMOS aluminum based design and a CMOS 090 copper based one. It is shown that the controlling parameter is the shape and volume of the contact, and that the contact formation is favored by the amount of over-mill of the via into the metal line it will contact.

Field emission properties of nitrogen-doped diamond-like carbon films deposited by direct metal ion beam deposition

2001 ◽  
Vol 697 ◽  
Author(s):  
Kie Moon Song ◽  
Namwoong Paik ◽  
Steven Kim ◽  
Daeil Kim ◽  
Seongjin Kim ◽  
...  
Keyword(s):  
Field Emission ◽  
Photoelectron Spectroscopy ◽  
Metal Ion ◽  
Nitrogen Doping ◽  
Ion Beam ◽  
Diamond Like Carbon ◽  
Emission Data ◽  
Nitrogen Doped ◽  
Ion Beam Deposition ◽  
Beam Deposition

AbstractNitrogen-doped diamond-like carbon (DLC) films were deposited on a silicon substrate by direct metal ion beam deposition (DMIBD). Partial pressures of nitrogen gas were changed to get different compositions of nitrogen in the DLC films. The composition and surface morphology of the films were examined using X-ray photoelectron spectroscopy (XPS) and atomic force microscope (AFM). Effect of nitrogen doping on field emission property was studied. The field emission data indicated that the nitrogen doping lowered the turn-on field and increase the current density. It was believed that doping of nitrogen into the DLC film plays an important role in enhancement of the field emission. This enhancement of field emission could be explained by the improvement of electron transport through nitrogen-dope DLC layer.

Investigations of Low-Temperature Epitaxy, Ion Damage, and Reactive-Ion Cleaning Utilizing Ion Beam Deposition

1986 ◽  
Vol 74 ◽  
Author(s):  
B. R. Appleton ◽  
R. A. Zuhr ◽  
T. S. Noggle ◽  
N. Herbots ◽  
S. J. Pennycook
Keyword(s):  
Low Temperature ◽  
Ion Beam ◽  
Low Energy ◽  
Ion Scattering ◽  
Cross Sectional ◽  
Ion Beam Deposition ◽  
Epitaxial Deposition ◽  
Ion Damage ◽  
Low Temperature Epitaxy ◽  
Beam Deposition

AbstractThe technique of ion beam deposition (IBD) is utilized to investigate low-energy, ion-induced damage on Si and Ge; to study reactive ion cleaning of Si and Ge; to fabricate amorphous isotopic heterostructures; and to fabricate and study the low-temperature epitaxial deposition of 74Ge on Ge(100), 30Si on Si(100), and 74Ge on Si(100). The techniques of ion scattering/channeling and cross-sectional TEM are combined to characterize the deposits.

Synthesis of cobalt/diamond-like carbon thin films by biased target ion beam deposition

2011 ◽  
Vol 20 (4) ◽  
pp. 538-541 ◽  
Author(s):  
Y. Tang ◽  
Y.S. Li ◽  
C.Z. Zhang ◽  
J. Wang ◽  
Q. Yang ◽  
...  
Keyword(s):  
Thin Films ◽  
Ion Beam ◽  
Diamond Like Carbon ◽  
Ion Beam Deposition ◽  
Carbon Thin Films ◽  
Beam Deposition

Tribological properties of diamond-like carbon films prepared by mass-separated ion beam deposition

2002 ◽  
Vol 11 (3-6) ◽  
pp. 1130-1134 ◽  
Author(s):  
Kazuhiro Yamamoto ◽  
Koichiro Wazumi ◽  
Toshiya Watanabe ◽  
Yoshinori Koga ◽  
Sumio Iijima
Keyword(s):  
Tribological Properties ◽  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Ion Beam Deposition ◽  
Beam Deposition

Ion beam deposition of diamond-like carbon films

1991 ◽  
Vol 47 (1-3) ◽  
pp. 445-454 ◽  
Author(s):  
V.M. Puzikov ◽  
A.V. Semenov
Keyword(s):  
Ion Beam ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Ion Beam Deposition ◽  
Beam Deposition

W Gradedly-Doped Diamond-Like Carbon Thin Films

2010 ◽  
Vol 434-435 ◽  
pp. 739-742 ◽  
Author(s):  
Cheng Biao Wang ◽  
Zhi Jian Peng ◽  
Su Dong Wu ◽  
Zhi Qiang Fu ◽  
Xin Chun Chen
Keyword(s):  
Mechanical Performance ◽  
Ion Beam ◽  
Carbon Films ◽  
Wear Loss ◽  
Diamond Like Carbon ◽  
Hybrid Technique ◽  
Metal Carbides ◽  
Ion Beam Deposition ◽  
W Doping ◽  
Beam Deposition

W gradedly-doped diamond-like carbon films were deposited on silicon and stainless steel by a hybrid technique combining ion beam deposition with magnetron sputtering. The structure, mechanical performance, friction coefficient, and wear loss were investigated. With increasing W target current applied, the structure of the as-prepared films changed from amorphous DLC to a composite of metal-containing DLC and metal carbides; the content of sp3 structure decreased from 31.26% to 22.3%; the nanohardness increased from 12 GPa to 28 GPa; the elastic modulus increased from 170 GPa to 310 GPa; and the critical loads were in the range of 80~100 N. The comprehensive tribological property of the as-prepared samples was improved after W doping.

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