scholarly journals Determination of Temperature-Dependent Stress State in Thin AlGaN Layer of AlGaN/GaN HEMT Heterostructures by Near-Resonant Raman Scattering

2015 ◽  
Vol 2015 ◽  
pp. 1-6
Author(s):  
Yanli Liu ◽  
Xifeng Yang ◽  
Dunjun Chen ◽  
Hai Lu ◽  
Rong Zhang ◽  
...  

The temperature-dependent stress state in the AlGaN barrier layer of AlGaN/GaN heterostructure grown on sapphire substrate was investigated by ultraviolet (UV) near-resonant Raman scattering. Strong scattering peak resulting from the A1(LO) phonon mode of AlGaN is observed under near-resonance condition, which allows for the accurate measurement of Raman shifts with temperature. The temperature-dependent stress in the AlGaN layer determined by the resonance Raman spectra is consistent with the theoretical calculation result, taking lattice mismatch and thermal mismatch into account together. This good agreement indicates that the UV near-resonant Raman scattering can be a direct and effective method to characterize the stress state in thin AlGaN barrier layer of AlGaN/GaN HEMT heterostructures.

2006 ◽  
Vol 49 (4) ◽  
pp. 393-399 ◽  
Author(s):  
Yan Yang ◽  
Yue Hao ◽  
Jincheng Zhang ◽  
Chong Wang ◽  
Qian Feng

2007 ◽  
Vol 24 (6) ◽  
pp. 1705-1708 ◽  
Author(s):  
Ma Zhi-Yong ◽  
Wang Xiao-Liang ◽  
Hu Guo-Xin ◽  
Ran Jun-Xue ◽  
Xiao Hong-Ling ◽  
...  

2017 ◽  
Vol 46 (10) ◽  
pp. 6104-6110 ◽  
Author(s):  
Franky J. Lumbantoruan ◽  
Yuen-Yee Wong ◽  
Wei-Ching Huang ◽  
Hung-Wei Yu ◽  
Edward-Yi Chang

2007 ◽  
Vol 92 ◽  
pp. 012045 ◽  
Author(s):  
V M Dzhagan ◽  
M Ya Valakh ◽  
A E Raevskaya ◽  
A L Stroyuk ◽  
S Ya Kuchmiy ◽  
...  

2001 ◽  
Vol 693 ◽  
Author(s):  
Narihiko Maeda ◽  
Kotaro Tsubaki ◽  
Tadashi Saitoh ◽  
Naoki Kobayashi

AbstractA novel doping design has been proposed that yields high two-dimensional electron gas (2DEG) densities in the AlGaN/GaN heterostructure field-effect transistors (HFETs) even when the AlGaN barrier layers are designed to be very thin. In the novel doping design, an asymmetric double-heterostructure is employed, and donor atoms are doped not only in the surface-side AlGaN layer but also in the underlying AlGaN layer. In this structure, electrons are efficiently supplied also from the back-doped AlGaN barrier layer to the GaN channel, with the help of the negative polarization charges at the heterointerface between the GaN channel and the underlying AlGaN barrier layer. High 2DEG densities can thus be obtained. Moreover, relatively high 2DEG mobilities can be obtained for high 2DEG densities, because back-doped donor atoms are sufficiently remote from the position of the 2DEG so that the 2DEG is less subjected to the ionized impurity scattering due to the relevant donor atoms. By using this back-doping design, a very high 2DEG density of 2.8x1013 cm-2 (2DEG mobility is 850 cm2/Vs) has been obtained at 300 K in the Al0.3Ga0.7N/GaN HFET whose barrier layer (Al0.3Ga0.7N) is as thin as 120 Å. Thus, the back-doping design is effective to obtain high 2DEG densities in the HFETs with thin barrier layers, and promising for high-power applications.


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