Influence of argon plasma on the deposition of Al2O3 film onto the PET surfaces by atomic layer deposition
Keyword(s):
2005 ◽
Vol 483-485
◽
pp. 701-704
◽
Keyword(s):
Keyword(s):
2016 ◽
Vol 45
(9)
◽
pp. 4716-4720
◽
Keyword(s):
2015 ◽
Vol 147
◽
pp. 277-280
◽