scholarly journals Thermal Decomposition In Situ Monitoring System of the Gas Phase Cyclopentadienyl Tris(dimethylamino) Zirconium (CpZr(NMe2)3) Based on FT-IR and QMS for Atomic Layer Deposition

2020 ◽  
Vol 15 (1) ◽  
Author(s):  
Jong-Ki An ◽  
Eunmi Choi ◽  
Seob Shim ◽  
Hayeong Kim ◽  
Goru Kang ◽  
...  
Keyword(s):  
Thermal Decomposition ◽  
Atomic Layer Deposition ◽  
Gas Phase ◽  
Monitoring System ◽  
Atomic Layer ◽  
In Situ Monitoring ◽  
Layer Deposition ◽  
Ft Ir

Optical in situ monitoring of plasma-enhanced atomic layer deposition process

2018 ◽  
Vol 57 (6S2) ◽  
pp. 06JF05 ◽  
Author(s):  
Muhammad Zeeshan Arshad ◽  
Kyung Jae Jo ◽  
Hyun Gi Kim ◽  
Sang Jeen Hong
Keyword(s):  
Atomic Layer Deposition ◽  
Atomic Layer ◽  
Deposition Process ◽  
In Situ Monitoring ◽  
Atomic Layer Deposition Process ◽  
Layer Deposition

In-situ Monitoring System Equipped with FT-IR and QMS and Thermal Decomposition of Zr(NCH3C2H5)4 Precursor

2016 ◽  
Vol 75 (6) ◽  
pp. 123-128 ◽  
Author(s):  
I.-S. Park ◽  
S. Seong ◽  
Y. Jung ◽  
T. Lee ◽  
J.-H. Ahn ◽  
...  
Keyword(s):  
Thermal Decomposition ◽  
Monitoring System ◽  
In Situ Monitoring ◽  
Ft Ir

In Situ Gas-Phase Diagnostics for Titanium Nitride Atomic Layer Deposition

2019 ◽  
Vol 41 (2) ◽  
pp. 157-167 ◽  
Author(s):  
James E. Maslar ◽  
William Kimes ◽  
Brent Sperling
Keyword(s):  
Atomic Layer Deposition ◽  
Titanium Nitride ◽  
Gas Phase ◽  
Atomic Layer ◽  
Layer Deposition

scholarly journals Understanding KOtBu in atomic layer deposition – in situ mechanistic studies of the KNbO3 growth process

2020 ◽  
Vol 49 (38) ◽  
pp. 13233-13242 ◽  
Author(s):  
Henrik H. Sønsteby ◽  
Veronica A.-L. K. Killi ◽  
Thomas A. Storaas ◽  
Devika Choudhury ◽  
Jeffrey W. Elam ◽  
...  
Keyword(s):  
Atomic Layer Deposition ◽  
Alkali Metal ◽  
Growth Process ◽  
Atomic Layer ◽  
Mechanistic Studies ◽  
Layer Deposition ◽  
Ft Ir

Providing a deeper understanding of alkali metal-containing ternary processes in ALD by in situ FT-IR and QCM mechanistic studies.

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