scholarly journals Embedded Micro-detectors for EUV Exposure Control in FinFET CMOS Technology

2022 ◽  
Vol 17 (1) ◽  
Author(s):  
Chien-Ping Wang ◽  
Burn Jeng Lin ◽  
Pin-Jiun Wu ◽  
Jiaw-Ren Shih ◽  
Yue-Der Chih ◽  
...  
Keyword(s):  
Light Intensity ◽  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Cmos Technology ◽  
Exposure Control ◽  
Storage Node ◽  
Cmos Compatibility ◽  
Time And Energy ◽  
Non Destructive

AbstractAn on-wafer micro-detector for in situ EUV (wavelength of 13.5 nm) detection featuring FinFET CMOS compatibility, 1 T pixel and battery-less sensing is demonstrated. Moreover, the detection results can be written in the in-pixel storage node for days, enabling off-line and non-destructive reading. The high spatial resolution micro-detectors can be used to extract the actual parameters of the incident EUV on wafers, including light intensity, exposure time and energy, key to optimization of lithographic processes in 5 nm FinFET technology and beyond.

scholarly journals High spatial resolution photo mosaicking for the monitoring of coralligenous reefs

Coral Reefs ◽  
2021 ◽  
Author(s):  
E. Casoli ◽  
D. Ventura ◽  
G. Mancini ◽  
D. S. Pace ◽  
A. Belluscio ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Low Cost ◽  
Pixel Resolution ◽  
Recording Apparatus ◽  
Assemblage Composition ◽  
Very High Spatial Resolution ◽  
Vertical Walls ◽  
Non Destructive ◽  
Very High

AbstractCoralligenous reefs are characterized by large bathymetric and spatial distribution, as well as heterogeneity; in shallow environments, they develop mainly on vertical and sub-vertical rocky walls. Mainly diver-based techniques are carried out to gain detailed information on such habitats. Here, we propose a non-destructive and multi-purpose photo mosaicking method to study and monitor coralligenous reefs developing on vertical walls. High-pixel resolution images using three different commercial cameras were acquired on a 10 m2 reef, to compare the effectiveness of photomosaic method to the traditional photoquadrats technique in quantifying the coralligenous assemblage. Results showed very high spatial resolution and accuracy among the photomosaic acquired with different cameras and no significant differences with photoquadrats in assessing the assemblage composition. Despite the large difference in costs of each recording apparatus, little differences emerged from the assemblage characterization: through the analysis of the three photomosaics twelve taxa/morphological categories covered 97–99% of the sampled surface. Photo mosaicking represents a low-cost method that minimizes the time spent underwater by divers and capable of providing new opportunities for further studies on shallow coralligenous reefs.

Characterization and Control of Copper CMP with Optoacoustic Metrology

2001 ◽  
Vol 671 ◽  
Author(s):  
Michael Gostein ◽  
Paul Lefevre ◽  
Alex A. Maznev ◽  
Michael Joffe
Keyword(s):  
Film Thickness ◽  
Spatial Resolution ◽  
Chemical Mechanical Polishing ◽  
High Spatial Resolution ◽  
Mechanical Polishing ◽  
Length Measurement ◽  
And Control ◽  
Non Destructive

ABSTRACTWe discuss applications of optoacoustic film thickness metrology for characterization of copper chemical-mechanical polishing (CMP). We highlight areas where the use of optoacoustics for CMP characterization provides data complementary to that obtained by other techniques because of its ability to directly measure film thickness with high spatial resolution in a rapid, non-destructive manner. Examples considered include determination of planarization length, measurement of film thickness at intermediate stages of polish, and measurement of arrays of metal lines.

High spatial resolution and non-destructive evaluation of wood density and microfibril angle by NIR hyperspectral imaging

NIR news ◽  
2017 ◽  
Vol 28 (5) ◽  
pp. 7-12 ◽  
Author(s):  
Te Ma ◽  
Tetsuya Inagaki ◽  
Satoru Tsuchikawa
Keyword(s):  
Hyperspectral Imaging ◽  
Wood Density ◽  
Spatial Resolution ◽  
Cross Validation ◽  
High Spatial Resolution ◽  
Microfibril Angle ◽  
Coefficient Of Determination ◽  
X Ray ◽  
Effective Manner ◽  
Non Destructive

Wood density and microfibril angle are strongly correlated with wood stiffness, shrinkage, and anisotropy. Understanding the spatial distribution of these values is critical for solid timber applications. In this study, near infrared (NIR) hyperspectral imaging was used to evaluate wood density and microfibril angle in a non-destructive, yet effective manner. Briefly, five wood samples collected from both normal and compression parts of two different Cryptomeria japonica trees were analyzed. Partial least squares regression analysis was performed to determine the relationship between X-ray reference data and NIR spectra, and cross-validation (leave-one-out) was used for checking prediction performances. The validation coefficient of determination (r2) between predicted densities by the NIR technique and measured values by SilviScan (X-ray data) was 0.83 with a root mean squared error of cross-validation (RMSECV) of 105.18 kg/m3. Regarding microfibril angle, r2 and RMSECV were 0.77 and 5.36°, respectively. Finally, wood density and microfibril angle were successfully mapped at a high spatial resolution (156 µm) to facilitate the detection of annual growth ring features and evaluation of aspects of heterogeneous wood quality.

In situ measurement of redox sensitive solutes at high spatial resolution in a riverbed using Diffusive Equilibrium in Thin Films (DET)

2012 ◽  
Vol 49 ◽  
pp. 18-26 ◽  
Author(s):  
Sami Ullah ◽  
Hao Zhang ◽  
A. Louise Heathwaite ◽  
Andrew Binley ◽  
Katrina Lansdown ◽  
...  
Keyword(s):  
Thin Films ◽  
Spatial Resolution ◽  
High Spatial Resolution ◽  
In Situ Measurement

High spatial resolution in situ U–Pb dating using laser ablation multiple ion counting inductively coupled plasma mass spectrometry (LA-MIC-ICP-MS)

2017 ◽  
Vol 32 (5) ◽  
pp. 975-986 ◽  
Author(s):  
Lie-Wen Xie ◽  
Jin-Hui Yang ◽  
Qing-Zhu Yin ◽  
Yue-Heng Yang ◽  
Jing-Bo Liu ◽  
...  
Keyword(s):  
Spatial Resolution ◽  
Inductively Coupled Plasma ◽  
High Spatial Resolution ◽  
Zircon Age ◽  
Analytical Technique ◽  
Inductively Coupled ◽  
Rapid Measurement ◽  
Icp Ms ◽  
Plasma Mass Spectrometry

A new LA-MIC-ICP-MS analytical technique has been developed for the rapid measurement of 206Pb/238U zircon age (<1%, 2s) at a high spatial resolution. We show that this technique can be routinely employed to date U–Pb in small and/or complex zircons, providing a powerful tool for geochronology.

scholarly journals HOLIMO II: a digital holographic instrument for ground-based in-situ observations of microphysical properties of mixed-phase clouds

2013 ◽  
Vol 6 (3) ◽  
pp. 4183-4221 ◽  
Author(s):  
J. Henneberger ◽  
J. P. Fugal ◽  
O. Stetzer ◽  
U. Lohmann
Keyword(s):  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Mixed Phase ◽  
Size Spectrum ◽  
Research Station ◽  
Resolution Limit ◽  
Microphysical Properties ◽  
Cloud Particles ◽  
Mixed Phase Clouds

Abstract. Measurements of the microphysical properties of mixed-phase clouds with high spatial resolution are important to understand the processes inside these clouds. This work describes the design and characterization of the newly developed ground-based field instrument HOLIMO II (HOLographic Imager for Microscopic Objects II). HOLIMO II uses digital in-line holography to in-situ image cloud particles in a well defined sample volume. By an automated algorithm, two-dimensional images of single cloud particles between 6 and 250 μm in diameter are obtained and the size spectrum, the concentration and water content of clouds are calculated. By testing the sizing algorithm with monosized beads a systematic overestimation near the resolution limit was found, which has been used to correct the measurements. Field measurements from the high altitude research station Jungfraujoch, Switzerland, are presented. The measured number size distributions are in good agreement with parallel measurements by a fog monitor (FM-100, DMT, Boulder USA). The field data shows that HOLIMO II is capable of measuring the number size distribution with a high spatial resolution and determines ice crystal shape, thus providing a method of quantifying variations in microphysical properties. A case study over a period of 8 h has been analyzed, exploring the transition from a liquid to a mixed-phase cloud, which is the longest observation of a cloud with a holographic device. During the measurement period, the cloud does not completely glaciate, contradicting earlier assumptions of the dominance of the Wegener–Bergeron–Findeisen (WBF) process.

scholarly journals NanoSIMS and EPMA dating of lunar zirconolite

2021 ◽  
Vol 8 (1) ◽  
Author(s):  
Nian Wang ◽  
Qian Mao ◽  
Ting Zhang ◽  
Jialong Hao ◽  
Yangting Lin
Keyword(s):  
Spatial Resolution ◽  
High Spatial Resolution ◽  
Lunar Meteorite ◽  
Geochemical Study ◽  
Lunar Rocks ◽  
Crater Counting ◽  
Resolution Analysis ◽  
Lunar Mare ◽  
Mare Basalts ◽  
Non Destructive

Abstract Zirconolite is a common Zr-rich accessary mineral in mafic rocks. It is also an ideal U–Pb/Pb–Pb chronometer because it commonly contains high U content (mostly 0.1–10 wt%) and negligible initial Pb. However, zirconolite is usually very small (e.g., ~ 1 μm in width) in lunar rocks, requiring a high spatial resolution analysis. We analyzed a single, large (25 μm × 20 μm) grain of zirconolite in lunar meteorite NWA 4485 using Pb–Pb dating by NanoSIMS and U–Th–Pb dating by EPMA. The resultant U–Th–Pb age is 4540 ± 340 Ma (2σ) with a spatial resolution of 1.3 μm. The Pb–Pb age by NanoSIMS is 4348.5 ± 4.8 Ma (2σ) with a spatial resolution of ~ 2 μm, consistent with the age of 4352 ± 10 Ma and 4344 ± 14 Ma reported in the same meteorite and its paired meteorite NWA 4472. Although U–Th–Pb age is somewhat older, it still includes the NanoSIMS results within the analytical uncertainty. This work demonstrates the potential application of the combined EPMA dating and REE analysis of lunar zirconolite, with the benefits of high spatial resolution, non-destructive, and readily accessibility of the instrument. The precision of the EPMA dating (7.6%, 2σ) can be improved by increasing the counting time for Pb, U and Th. We expect to apply this EPMA technique for a quick and non-destructive age survey and geochemical study of zirconolite grains from the lunar mare basalts newly returned by Chang’E-5 mission which landed on a very young (1.2–2.0 Ga by crater-counting chronology) basalt unit in Procellarum KREEP Terrain.

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