Vibration Characteristics Measurement of Micro Cantilever Using HD-DVD Optical Pickup

2021 ◽  
Vol 2021.27 (0) ◽  
pp. 11B11
Author(s):  
Sumito NAGASAWA ◽  
Jinpei MIYASHITA ◽  
Tomoya HARA
2019 ◽  
Vol 1311 ◽  
pp. 012017
Author(s):  
Lihua Chen ◽  
Jiangtao Xue ◽  
Wei Zhang ◽  
Fenghong Yang

Author(s):  
A. Z. A. Mazlan ◽  
M. H. A. Satar ◽  
M. H. Hamdan ◽  
M. S. Md. Isa ◽  
S. Man ◽  
...  

The automotive heating and ventilating air condition (HVAC) system, when vibrating, can generate various types of noises such as humming, hissing, clicking and air-rushes. These noises can be characterised to determine their root causes. In this study, the humming-type noise is taken into consideration whereby the noise and vibration characteristics are measured from various HVAC components such as power steering pump, compressor and air conditional pipe. Four types of measurement sensors were used in this study - tachometer for rpm tracking; accelerometer for the vibration microphone for the noise; and sound camera for the visualization measurement. Two types of operating conditions were taken into consideration - they were “idle” (850 rpm) and “running” (850-1400 rpm) conditions. A constant blower speed was applied for both conditions. The result shows that the humming noises can be determined at the frequency range of 300-350 Hz and 150-250 Hz for both idle and running conditions, respectively. The vibration of the power steering pump shows the worst acceleration of 1.8 m/s2 at the frequency range of 150-250 Hz, compared to the compressor and air conditional pipe. This result was validated with the 3D colour order and sound camera analyses, in which the humming noise colour mapping shows dominance in this frequency range.  


2018 ◽  
Vol 138 (9) ◽  
pp. 730-738
Author(s):  
Ryoichi Takahata ◽  
Shinichi Wakui ◽  
Kenji Miyata ◽  
Keiji Noma ◽  
Masaharu Senoo

2013 ◽  
Vol 543 ◽  
pp. 176-179 ◽  
Author(s):  
D.Q. Zhao ◽  
Xia Zhang ◽  
P. Liu ◽  
F. Yang ◽  
C. Lin ◽  
...  

In this work we studied the fabrication of a monolithic bimaterial micro-cantilever resonant IR sensor with on-chip drive circuits. The effects of high temperature process and stress induced performance degradation were investigated. The post-CMOS MEMS (micro electro mechanical system) fabrication process of this IR sensor is the focus of this paper, starting from theoretical analysis and simulation, and then moving to experimental verification. The capacitive cantilever structure was fabricated by surface micromachining method, and drive circuits were prepared by standard CMOS process. While the stress introduced by MEMS films, such as the tensile silicon nitride which works as a contact etch stopper layer for MOSFETs and releasing stop layer for the MEMS structure, increases the electron mobility of NMOS, PMOS hole mobility decreases. Moreover, the NMOS threshold voltage (Vth) shifts, and transconductance (Gm) degrades. An additional step of selective removing silicon nitride capping layer and polysilicon layer upon IC area were inserted into the standard CMOS process to lower the stress in MOSFET channel regions. Selective removing silicon nitride and polysilicon before annealing can void 77% Vth shift and 86% Gm loss.


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