1853 A New Technique for the Adhesive Strength Evaluation of Copper Thin Film Wirings on Polyimide Films

2005 ◽  
Vol 2005.6 (0) ◽  
pp. 283-284
Author(s):  
Shoji KAMIYA ◽  
Harunori FURUTA ◽  
Shingo AMAKI
Keyword(s):  
Thin Film ◽  
Adhesive Strength ◽  
New Technique ◽  
Polyimide Films ◽  
Copper Thin Film ◽  
Strength Evaluation ◽  
A New Technique

Mechanical deflection of cantilever microbeams: A new technique for testing the mechanical properties of thin films

1988 ◽  
Vol 3 (5) ◽  
pp. 931-942 ◽  
Author(s):  
T. P. Weihs ◽  
S. Hong ◽  
J. C. Bravman ◽  
W. D. Nix
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Mechanical Properties ◽  
Single Layer ◽  
Beam Theory ◽  
New Technique ◽  
Young’S Moduli ◽  
Silicon Micromachining ◽  
A New Technique

The mechanical deflection of cantilever microbeams is presented as a new technique for testing the mechanical properties of thin films. Single-layer microbeams of Au and SiO2 have been fabricated using conventional silicon micromachining techniques. Typical thickness, width, and length dimensions of the beams are 1.0,20, and 30 μm, respectively. The beams are mechanically deflected by a Nanoindenter, a submicron indentation instrument that continuously monitors load and deflection. Using simple beam theory and the load-deflection data, the Young's moduli and the yield strengths of thin-film materials that comprise the beams are determined. The measured mechanical properties are compared to those obtained by indenting similar thin films supported by their substrate.

scholarly journals Electro-precipitation via oxygen reduction: a new technique for thin film manganese oxide deposition

2016 ◽  
Vol 4 (35) ◽  
pp. 13555-13562
Author(s):  
Gijs Vanhoutte ◽  
Minxian Wu ◽  
Stijn Schaltin ◽  
Felix Mattelaer ◽  
Christophe Detavernier ◽  
...  
Keyword(s):  
Thin Film ◽  
Aqueous Solution ◽  
Dissolved Oxygen ◽  
Manganese Oxide ◽  
Dimethyl Sulfoxide ◽  
Oxygen Reduction ◽  
New Technique ◽  
Oxide Deposition ◽  
A New Technique

Manganese oxide was electrodeposited from a non-aqueous solution, dimethyl sulfoxide (DMSO), via the reduction of dissolved oxygen.

scholarly journals Beam Profile Reflectometry: A New Technique for Thin Film Measurements

1993 ◽  
pp. 387-394
Author(s):  
J. T. Fanton ◽  
Jon Opsal ◽  
D. L. Willenborg ◽  
S. M. Kelso ◽  
Allan Rosencwaig
Keyword(s):  
Thin Film ◽  
Beam Profile ◽  
New Technique ◽  
A New Technique
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