New Tool for Scalable Thin Film Organic Polymer Deposition on Flexible Substrates using a Solvent-Free, Gas Phase, Spatial Molecular Layer Deposition Approach

2016 ◽  
Keyword(s):  
Thin Film ◽  
Gas Phase ◽  
Molecular Layer ◽  
Solvent Free ◽  
Organic Polymer ◽  
Flexible Substrates ◽  
Molecular Layer Deposition ◽  
Free Gas ◽  
Layer Deposition ◽  
Polymer Deposition

scholarly journals Atomic/molecular layer deposition of Cu–organic thin films

2018 ◽  
Vol 47 (44) ◽  
pp. 15791-15800 ◽  
Author(s):  
D. J. Hagen ◽  
L. Mai ◽  
A. Devi ◽  
J. Sainio ◽  
M. Karppinen
Keyword(s):  
Thin Film ◽  
Gas Phase ◽  
Molecular Layer ◽  
Organic Thin Films ◽  
Molecular Layer Deposition ◽  
Hybrid Thin Film ◽  
Organic Hybrid ◽  
Layer Deposition ◽  
Organic Precursors ◽  
Viable Approach

The gas-phase atomic/molecular layer deposition (ALD/MLD) technique is strongly emerging as a viable approach for fabricating new exciting inorganic–organic hybrid thin-film materials. Here we report new ALD/MLD processes for copper-based hybrid materials based on five different organic precursors.

Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

2021 ◽  
Author(s):  
Kristina Ashurbekova ◽  
Karina Ashurbekova ◽  
Iva Saric ◽  
Evgeny Modin ◽  
Mladen Petravic ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Molecular Layer ◽  
Thin Film Growth ◽  
Cross Linking ◽  
Layer By Layer ◽  
Molecular Layer Deposition ◽  
Layer Deposition ◽  
Hybrid Thin Films ◽  
Enhanced Stability

We developed a thin film growth with a radical-initiated cross-linking of vinyl groups in a layer-by-layer manner via molecular layer deposition (MLD). The cross-linked film exhibited improved properties like 12% higher density and enhanced stability compared to the non-cross-linked film.

An organic-inorganic hybrid semiconductor for flexible thin film transistor using molecular layer deposition

2021 ◽  
Author(s):  
Seung-Hwan Lee ◽  
Hyun-Jun Jeong ◽  
Ki-Lim Han ◽  
GeonHo Beak ◽  
Jin-Seong Park
Keyword(s):  
Thin Film ◽  
Indium Oxide ◽  
Molecular Layer ◽  
Thin Film Transistor ◽  
Hybrid Films ◽  
Molecular Layer Deposition ◽  
Inorganic Hybrid ◽  
Layer Deposition

Indium oxide and indicone hybrid films consisting of indium oxide and organic aromatic linker are grown by molecular layer deposition (MLD) using bis(trimethylsilyl)amido-diethyl Indium (INCA-1) as the indium precursor, hydrogen...

scholarly journals Atomic/molecular layer deposition and electrochemical performance of dilithium 2-aminoterephthalate

2020 ◽  
Vol 49 (5) ◽  
pp. 1591-1599 ◽  
Author(s):  
Juho Heiska ◽  
Mikko Nisula ◽  
Eeva-Leena Rautama ◽  
Antti J. Karttunen ◽  
Maarit Karppinen
Keyword(s):  
Thin Film ◽  
Electrochemical Performance ◽  
Redox Potential ◽  
Molecular Layer ◽  
Amino Group ◽  
Molecular Layer Deposition ◽  
Layer Deposition ◽  
Thin Film Electrodes

Crystalline Li-terephthalate and amino-functionalized Li-terephthalate thin film electrodes are fabricated from gaseous precursors with ALD/MLD to show that the electron-donating amino group lowers the redox potential.

Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane (V3D3) and azasilane

2020 ◽  
Vol 56 (62) ◽  
pp. 8778-8781
Author(s):  
Kristina Ashurbekova ◽  
Karina Ashurbekova ◽  
Iva Saric ◽  
Evgenii Modin ◽  
Mladen Petravić ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Ring Opening ◽  
Molecular Layer ◽  
Molecular Layer Deposition ◽  
Layer Deposition ◽  
Ring Opening Reactions

Two consecutive vapor-to-solid ring opening reactions were applied for thin film siloxane polymerization by molecular layer deposition (MLD).

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