Molecular Layer Deposition of a Highly Stable Silicon Oxycarbide Thin Film Using an Organic Chlorosilane and Water

2018 ◽  
Vol 10 (28) ◽  
pp. 24266-24274 ◽  
Author(s):  
Richard G. Closser ◽  
David S. Bergsman ◽  
Stacey F. Bent
Keyword(s):  
Thin Film ◽  
Molecular Layer ◽  
Silicon Oxycarbide ◽  
Molecular Layer Deposition ◽  
Layer Deposition

Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

2021 ◽  
Author(s):  
Kristina Ashurbekova ◽  
Karina Ashurbekova ◽  
Iva Saric ◽  
Evgeny Modin ◽  
Mladen Petravic ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Molecular Layer ◽  
Thin Film Growth ◽  
Cross Linking ◽  
Layer By Layer ◽  
Molecular Layer Deposition ◽  
Layer Deposition ◽  
Hybrid Thin Films ◽  
Enhanced Stability

We developed a thin film growth with a radical-initiated cross-linking of vinyl groups in a layer-by-layer manner via molecular layer deposition (MLD). The cross-linked film exhibited improved properties like 12% higher density and enhanced stability compared to the non-cross-linked film.

An organic-inorganic hybrid semiconductor for flexible thin film transistor using molecular layer deposition

2021 ◽  
Author(s):  
Seung-Hwan Lee ◽  
Hyun-Jun Jeong ◽  
Ki-Lim Han ◽  
GeonHo Beak ◽  
Jin-Seong Park
Keyword(s):  
Thin Film ◽  
Indium Oxide ◽  
Molecular Layer ◽  
Thin Film Transistor ◽  
Hybrid Films ◽  
Molecular Layer Deposition ◽  
Inorganic Hybrid ◽  
Layer Deposition

Indium oxide and indicone hybrid films consisting of indium oxide and organic aromatic linker are grown by molecular layer deposition (MLD) using bis(trimethylsilyl)amido-diethyl Indium (INCA-1) as the indium precursor, hydrogen...

scholarly journals Atomic/molecular layer deposition and electrochemical performance of dilithium 2-aminoterephthalate

2020 ◽  
Vol 49 (5) ◽  
pp. 1591-1599 ◽  
Author(s):  
Juho Heiska ◽  
Mikko Nisula ◽  
Eeva-Leena Rautama ◽  
Antti J. Karttunen ◽  
Maarit Karppinen
Keyword(s):  
Thin Film ◽  
Electrochemical Performance ◽  
Redox Potential ◽  
Molecular Layer ◽  
Amino Group ◽  
Molecular Layer Deposition ◽  
Layer Deposition ◽  
Thin Film Electrodes

Crystalline Li-terephthalate and amino-functionalized Li-terephthalate thin film electrodes are fabricated from gaseous precursors with ALD/MLD to show that the electron-donating amino group lowers the redox potential.

Molecular layer deposition of hybrid siloxane thin films by ring opening of cyclic trisiloxane (V3D3) and azasilane

2020 ◽  
Vol 56 (62) ◽  
pp. 8778-8781
Author(s):  
Kristina Ashurbekova ◽  
Karina Ashurbekova ◽  
Iva Saric ◽  
Evgenii Modin ◽  
Mladen Petravić ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Ring Opening ◽  
Molecular Layer ◽  
Molecular Layer Deposition ◽  
Layer Deposition ◽  
Ring Opening Reactions

Two consecutive vapor-to-solid ring opening reactions were applied for thin film siloxane polymerization by molecular layer deposition (MLD).

scholarly journals Photoactive Thin-Film Structures of Curcumin, TiO2 and ZnO

Molecules ◽  
2021 ◽  
Vol 26 (11) ◽  
pp. 3214
Author(s):  
Anish Philip ◽  
Ramin Ghiyasi ◽  
Maarit Karppinen
Keyword(s):  
Thin Film ◽  
Molecular Layer ◽  
Wavelength Region ◽  
Atomic Layer ◽  
Biologically Active ◽  
Molecular Layer Deposition ◽  
New Horizons ◽  
Layer Deposition ◽  
Layer Structures ◽  
Novel Applications

Curcumin is known as a biologically active compound and a possible antimicrobial agent. Here, we combine it with TiO2 and ZnO semiconductors, known for their photocatalytic properties, with an eye towards synergistic photo-harvesting and/or antimicrobial effects. We deposit different nanoscale multi-layer structures of curcumin, TiO2 and ZnO, by combining the solution-based spin-coating (S-C) technique and the gas-phase atomic layer deposition (ALD) and molecular layer deposition (MLD) thin-film techniques. As one of the highlights, we demonstrate for these multi-layer structures a red-shift in the absorbance maximum and an expansion of the absorbance edge as far as the longest visible wavelength region, which activates them for the visible light harvesting. The novel fabrication approaches introduced here should be compatible with, e.g., textile substrates, opening up new horizons for novel applications such as new types of protective masks with thin conformal antimicrobial coatings.

Molecular layer deposition of ZrO2-based organic–inorganic nanohybrid thin films for organic thin film transistors

2009 ◽  
Vol 517 (14) ◽  
pp. 4056-4060 ◽  
Author(s):  
Byoung H. Lee ◽  
Kyo K. Im ◽  
Kwang H. Lee ◽  
Seongil Im ◽  
Myung M. Sung
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Thin Film Transistors ◽  
Molecular Layer ◽  
Organic Thin Film Transistors ◽  
Organic Thin Film ◽  
Molecular Layer Deposition ◽  
Layer Deposition
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