Study on Buried Interfaces in Semiconductor Heterostructures by X-ray Reflectivity

Element-specific structural analysis at the buried interface of a low electron density contrast system is important in many applied fields. The analysis of nanoscaled Si/B4C buried interfaces is demonstrated using resonant X-ray reflectivity. This technique combines information about spatial modulations of charges provided by scattering, which is further enhanced near the resonance, with the sensitivity to electronic structure provided by spectroscopy. Si/B4C thin-film structures are studied by varying the position of B4C in Si layers. Measured values of near-edge optical properties are correlated with the resonant reflectivity profile to quantify the element-specific composition. It is observed that, although Si/B4C forms a smooth interface, there are chemical changes in the sputtered B4C layer. Nondestructive quantification of the chemical changes and the spatial distribution of the constituents is reported.

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An access to buried interfaces: the X-ray reflectivity set-up of BL9 at DELTA

Journal of Synchrotron Radiation ◽

10.1107/s0909049508026745 ◽

2008 ◽

Vol 15 (6) ◽

pp. 600-605 ◽

Cited By ~ 24

Author(s):

Michael Paulus ◽

Daniela Lietz ◽

Christian Sternemann ◽

Kaveh Shokuie ◽

Florian Evers ◽

...

Keyword(s):

X Ray ◽

Buried Interfaces ◽

Set Up

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Probing nanoscale behavior of magnetic materials with soft X-ray spectromicroscopy

Nanotechnology Reviews ◽

10.1515/ntrev-2011-0001 ◽

2012 ◽

Vol 1 (1) ◽

pp. 5-15 ◽

Cited By ~ 5

Author(s):

Peter Fischer ◽

Charles S. Fadley

Keyword(s):

Magnetic Properties ◽

Magnetic Materials ◽

Spin Dynamics ◽

Magnetic Nanostructures ◽

Magnetic Behavior ◽

Research Area ◽

X Ray ◽

Spatially Resolved ◽

Buried Interfaces ◽

Analytical Tools

AbstractThe magnetic properties of matter continue to be a vibrant research area driven both by scientific curiosity to unravel the basic physical processes which govern magnetism and the vast and diverse utilization of magnetic materials in current and future devices, e.g., in information and sensor technologies. Relevant length and time scales approach fundamental limits of magnetism and with state-of-the-art synthesis approaches we are able to create and tailor unprecedented properties. Novel analytical tools are required to match these advances and soft X-ray probes are among the most promising ones. Strong and element-specific magnetic X-ray dichroism effects as well as the nanometer wavelength of photons and the availability of fsec short and intense X-ray pulses at upcoming X-ray sources enable unique experimental opportunities for the study of magnetic behavior. This article provides an overview of recent achievements and future perspectives in magnetic soft X-ray spectromicroscopies which permit us to gain spatially resolved insight into the ultrafast spin dynamics and the magnetic properties of buried interfaces of advanced magnetic nanostructures.

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X-ray Investigation Of Multilayered Semiconductor Heterostructures

LEOS '92 Conference Proceedings ◽

10.1109/leos.1992.693877 ◽

2005 ◽

Author(s):

L. Tapfer

Keyword(s):

Semiconductor Heterostructures ◽

X Ray

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X-ray absorption fine structure in the study of semiconductor heterostructures and nanostructures

Characterization of Semiconductor Heterostructures and Nanostructures ◽

10.1016/b978-0-444-53099-8.00009-9 ◽

2008 ◽

pp. 289-330 ◽

Cited By ~ 12

Author(s):

Federico Boscherini

Keyword(s):

Fine Structure ◽

Semiconductor Heterostructures ◽

X Ray ◽

Absorption Fine ◽

X Ray Absorption

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X-RAY DIFFRACTION FOR SURFACES AND BURIED INTERFACES

Surface Review and Letters ◽

10.1142/s0218625x00000452 ◽

2000 ◽

Vol 07 (04) ◽

pp. 437-446 ◽

Cited By ~ 1

Author(s):

G. RENAUD

Keyword(s):

Grazing Incidence ◽

X Rays ◽

X Ray Diffraction ◽

X Ray ◽

Grain Sizes ◽

Buried Interfaces ◽

Surfaces And Interfaces ◽

Coherent Interfaces

The application of X-rays to the structural characterization of surfaces and interfaces, in situ and in UHV, is discussed on selected examples. Grazing incidence X-ray diffraction is not only a very powerful technique for quantitatively investigating the atomic structure of surfaces and interfaces, but is also very useful for providing information on the interfacial registry for coherent interfaces or on the strain deformation, island and grain sizes for incoherent epilayers.

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Investigation of Semiconductor Heterostructures by White Beam Synchrotron X-Ray Topography in Grazing Bragg-Laue and Conventional Bragg Geometries

Advances in X-ray Analysis ◽

10.1154/s0376030800008892 ◽

1991 ◽

Vol 35 (A) ◽

pp. 247-253

Author(s):

G.-D. Yao ◽

J. Wu ◽

T. Fanning ◽

M. Dudley

Keyword(s):

Penetration Depth ◽

Grazing Incidence ◽

Semiconductor Heterostructures ◽

Misfit Dislocations ◽

Strained Layers ◽

X Ray ◽

Main Reflection ◽

White Beam ◽

Topographic Imaging

AbstractWhite beam synchrotron X-ray topography has been applied both to the characterization of two semiconductor heterostructures, GaAs/Si and InxGa1-xAs/GaAs strained layers, and a substrate to be used for growing semiconductor epilayers, Cd1-xZnxTe. In the case of the heterostructures, misfit dislocations were observed using depth sensitive X-ray topographic imaging in grazing incidence Bragg-Laue geometries. The X-ray penetration depth, which can be varied from several hundreds of angstroms to hundreds of micrometers by rotating about the main reflection vector, which in this specific case was (355), is governed by kinernatical theory. This is justified by comparing dislocation contrast and visibility with the extent of the calculated effective misorientalion field in comparison to the effective X-ray penetration depth. For the case of Cd1-xZnxTe, twin configurations are observed, and their analysis is presented.

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Characterization of Single- and Multiple-Layer Films by X-Ray Reflectometry

Advances in X-ray Analysis ◽

10.1154/s0376030800008764 ◽

1991 ◽

Vol 35 (A) ◽

pp. 137-142 ◽

Cited By ~ 9

Author(s):

T. C. Huang ◽

W. Parrish

Keyword(s):

Experimental Data ◽

Thin Films ◽

High Resolution ◽

Single Layer ◽

The Other ◽

X Ray ◽

Buried Interfaces ◽

Multiple Layer ◽

Reflectivity Data

AbstractPrecision X-ray reflectivity data were obtained with a high-resolution reflectometer equipped with a rotating anode X-ray source and Ge 220 channel monochromators (one placed before and the other after the specimen). The surfaces and buried interfaces of thin films were characterized by ieast-squares refinement of experimental data. Values of thickness, density, and/or roughness of Pt “single-layer” and Pt/Co based multiple-layer films were determined.

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