Effect of temperature on metastable phases induced in silicon during nanoindentation
2008 ◽
Vol 23
(1)
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pp. 245-249
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Keyword(s):
Indentations were performed on silicon using a Berkovich indenter at loads up to 12 mN, at temperatures from 20 to 135 °C. Transmission electron microscopy revealed crystalline silicon phases in the residual indentation imprint at and above 35 °C. Also, the first reconfirmation of the occurrence of Si-VIII during unloading was observed at temperatures of 100 and 125 °C. Interestingly, at 125 °C a cavity was also observed, and an unidentifiable phase was observed at 135 °C. The observations show the strong effect of temperature on pressure-induced phase transformation in silicon.
1967 ◽
Vol 25
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pp. 312-313
1993 ◽
Vol 12
(11)
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pp. 819-822
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2018 ◽
Vol 941
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pp. 1613-1617
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2011 ◽
Vol 178-179
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pp. 275-284
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2005 ◽
Vol 20
(7)
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pp. 1808-1813
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