Nano-scale Observation of Si Trench Sidewall Surface Morphology by AFM Technology

2007 ◽  
Vol 1025 ◽  
Author(s):  
Reiko Hiruta ◽  
Hitoshi Kuribayashi ◽  
Ryosuke Shimizu

AbstractWe have developed an atomic force microscopy (AFM) observation technique with which Si trench sidewall surface can be scanned with the tip of cantilever to investigate its nano-scale morphologies. By developing a new technique of cleaving the substrate at the center of a micron-sized trench along its longitudinal direction [011], the sidewall nano-scale morphology of the trench could be observed with the AFM technique. By comparing of cross sections of the images, we also investigated the difference between Si and carbon nanotube (CNT) tips for the AFM observations. According to the results, the CNT tip proved to show a superior signal-to-noise (S/N) ratio compared with the Si tip. The CNT tip enables us to observe the step patterns of the sidewalls of micron-sized trench structures in the various phases of hydrogen annealing.

2015 ◽  
Vol 10 (1) ◽  
pp. 155892501501000
Author(s):  
Serpil Koral Koc

Potential applications of atomic force microscopy (AFM) in textiles are explained. For this purpose samples were carefully selected from both natural and synthetic fibers. Cotton, wool, conventional polyethylene terepthalate (PET), antibacterial PET, and antistatic PET were investigated by means of 3D topography imaging, phase imaging, and calculation of their Rq values. The distribution of the additives in the cross sections of antibacterial PET and antistatic PET were analyzed. Moreover, differences between inner and outer cross section of trilobal PET was observed by force spectroscopy. The results are discussed considering the fiber properties. It is concluded that AFM is a powerful tool to investigate different properties of textile fibers, and it gives valuable information.


2003 ◽  
Vol 97 (1-4) ◽  
pp. 81-87 ◽  
Author(s):  
Tomoyuki Yoshino ◽  
Shigeru Sugiyama ◽  
Shoji Hagiwara ◽  
Daisuke Fukushi ◽  
Motoharu Shichiri ◽  
...  

1993 ◽  
Vol 57 (1) ◽  
pp. 3795-3800 ◽  
Author(s):  
J. Garnaes ◽  
D.K. Schwartz ◽  
R. Viswanathan ◽  
J.A.N. Zasadzinski

2001 ◽  
Vol 693 ◽  
Author(s):  
Amy M. Roskowski ◽  
Peter Q. Miraglia ◽  
Edward A. Preble ◽  
Sven Einfeldt ◽  
Robert F. Davis

AbstractA growth process route that results in thin film GaN templates with a smooth surface morphology at the optimum temperature of 1020°C has been developed. Atomic force microscopy (AFM) reveals hillocks on films grown above 1020°C. Hillocks resulted from the rotation of heterogeneous steps formed at pure screw or mixed dislocations which terminated on the (0001) surface. Growth of the latter feature was controlled kinetically by temperature through adatom diffusion. The 106 cm-2 density of the hillocks was reduced through growth on thick GaN templates and regions of pendeo-epitaxy (PE) overgrowth with lower pure screw or mixed dislocations. Smooth PE surfaces were obtained at temperatures that reduced the lateral to vertical growth rate but also retarded hillock growth that originated in the stripe regions. The (1120 ) PE sidewall surface was atomically smooth, with a root mean square roughness value of 0.17 nm which was the noise limited resolution of the AFM measurements.


2006 ◽  
Vol 59 (6) ◽  
pp. 381 ◽  
Author(s):  
Annabelle Blom ◽  
Gregory G. Warr ◽  
Erica J. Wanless

The evolution of adsorbed dialkyl chained quaternary ammonium surfactant films with different alkyl chain lengths has been observed in situ using atomic force microscopy (AFM). Both di-C12DAB and di-C14DAB form a cohesive bilayer immediately, which is observed to strengthen with equilibration time. The slow equilibrium of di-C16DAB allows examination of the film at less than saturated coverage and reveals growth of the bilayer through the nucleation and coalescence of patches. The difference in height between higher and lower regions is insufficient for bilayer and monolayer regions and the postulated structure is that of regions of bilayer with different packing densities. The effect of temperature on film morphologies near the gel transition is also examined.


Materials ◽  
2018 ◽  
Vol 11 (10) ◽  
pp. 1794 ◽  
Author(s):  
Thomas Weatherley ◽  
Fabien Massabuau ◽  
Menno Kappers ◽  
Rachel Oliver

Nanoscale structure has a large effect on the optoelectronic properties of InGaN, a material vital for energy saving technologies such as light emitting diodes. Photoconductive atomic force microscopy (PC-AFM) provides a new way to investigate this effect. In this study, PC-AFM was used to characterise four thick (∼130 nm) In x Ga 1 − x N films with x = 5%, 9%, 12%, and 15%. Lower photocurrent was observed on elevated ridges around defects (such as V-pits) in the films with x ≤ 12 %. Current-voltage curve analysis using the PC-AFM setup showed that this was due to a higher turn-on voltage on these ridges compared to surrounding material. To further understand this phenomenon, V-pit cross sections from the 9% and 15% films were characterised using transmission electron microscopy in combination with energy dispersive X-ray spectroscopy. This identified a subsurface indium-deficient region surrounding the V-pit in the lower indium content film, which was not present in the 15% sample. Although this cannot directly explain the impact of ridges on turn-on voltage, it is likely to be related. Overall, the data presented here demonstrate the potential of PC-AFM in the field of III-nitride semiconductors.


2015 ◽  
Vol 1087 ◽  
pp. 6-10
Author(s):  
Mohd Azham Azmi ◽  
Sufiah Mohamad Yahya ◽  
Sufizar Ahmad ◽  
Hariati Taib

The focus of this study is to investigate the mechanical properties and fracture behaviour of polydimethylsiloxane filled crystalline silica composites (PDMS/CS) upon tensile loading. The PDMS/CS composites were fabricated by using casting method and cured at room temperature for 24 hours. Crystalline silica (CS) were added to PDMS at compositions of 2, 6, 10 wt%. The tensile properties of PDMS/2wt%CS showed that the tensile stress were improved by 4.3%. Fracture behaviour as determined by the characteristic of fracture surface of pure PDMS and PDMS/CS composites were analysed using Field Emission Scanning Electron Microscopy (FESEM) and Atomic Force Microscopy (AFM). Observation via FESEM and AFM indicated different fracture characteristic of filled PDMS and unfilled PDMS. The addition of CS as fillers were indeed proven to improve the strength of the composites.


2016 ◽  
Vol 7 ◽  
pp. 220-227 ◽  
Author(s):  
Maryse D Nkoua Ngavouka ◽  
Pietro Capaldo ◽  
Elena Ambrosetti ◽  
Giacinto Scoles ◽  
Loredana Casalis ◽  
...  

Background: DNA hybridization is at the basis of most current technologies for genotyping and sequencing, due to the unique properties of DNA base-pairing that guarantee a high grade of selectivity. Nonetheless the presence of single base mismatches or not perfectly matched sequences can affect the response of the devices and the major challenge is, nowadays, to distinguish a mismatch of a single base and, at the same time, unequivocally differentiate devices read-out of fully and partially matching sequences. Results: We present here two platforms based on different sensing strategies, to detect mismatched and/or perfectly matched complementary DNA strands hybridization into ssDNA oligonucleotide monolayers. The first platform exploits atomic force microscopy-based nanolithography to create ssDNA nano-arrays on gold surfaces. AFM topography measurements then monitor the variation of height of the nanostructures upon biorecognition and then follow annealing at different temperatures. This strategy allowed us to clearly detect the presence of mismatches. The second strategy exploits the change in capacitance at the interface between an ssDNA-functionalized gold electrode and the solution due to the hybridization process in a miniaturized electrochemical cell. Through electrochemical impedance spectroscopy measurements on extended ssDNA self-assembled monolayers we followed in real-time the variation of capacitance, being able to distinguish, through the difference in hybridization kinetics, not only the presence of single, double or triple mismatches in the complementary sequence, but also the position of the mismatched base pair with respect to the electrode surface. Conclusion: We demonstrate here two platforms based on different sensing strategies as sensitive and selective tools to discriminate mismatches. Our assays are ready for parallelization and can be used in the detection and quantification of single nucleotide mismatches in microRNAs or in genomic DNA.


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