Delineation of p-n Junctions on Cross Sectional TEM Device Samples

1990 ◽  
Vol 199 ◽  
Author(s):  
Dirk Knoesen ◽  
Fang Zhang ◽  
George A. Rozgonyi

ABSTRACTThe delineation of n-p junctions is one of the techniques routinely required in the analysis of electronic devices. The delineation of the junction profile is typically done either in a scanning electron microscope (SEM) or by angle lapping / staining/ optical microscopy. Recently TEM foils have been selectively etched to simultaneously provide an interface demarcation and an image of processed induced dislocations. A case study is presented in this report on concentration dependent delineation techniques with emphasis on the special problems associated with cross sectional transmission electron microscopy (XTEM) samples. The etchants used in delineating junctions for the SEM or with angle lapping / optical microscopy of transistors are too aggressive for the extremely thin TEM foils. This paper discusses etchants which deliver reproducible, high contrast delineations in XTEM samples with known concentration profiles.

Author(s):  
John F. Mansfield

The current imaging trend in optical microscopy, scanning electron microscopy (SEM) or transmission electron microscopy (TEM) is to record all data digitally. Most manufacturers currently market digital acquisition systems with their microscope packages. The advantages of digital acquisition include: almost instant viewing of the data as a high-quaity positive image (a major benefit when compared to TEM images recorded onto film, where one must wait until after the microscope session to develop the images); the ability to readily quantify features in the images and measure intensities; and extremely compact storage (removable 5.25” storage devices which now can hold up to several gigabytes of data).The problem for many researchers, however, is that they have perfectly serviceable microscopes that they routinely use that have no digital imaging capabilities with little hope of purchasing a new instrument.


1997 ◽  
Vol 5 (4) ◽  
pp. 14-15
Author(s):  
John F. Mansfield

The current imaging trend in optical microscopy, scanning electron microscopy (SEM) or transmission electron microscopy (TEM) is to record all data digitally. Most manufacturers currently market digital acquisition systems with their microscope packages. The advantages of digital acquisition include: almost instant viewing of the data as a high-quality positive image (a major benefit when compared to TEM images recorded onto film, where one must wait until after the microscope session to develop the images); the ability to readily quantify features in the images and measure intensities; and extremely compact storage (removable 5.25” storage devices which now can hold up to several gigabytes of data).


2006 ◽  
Vol 911 ◽  
Author(s):  
Hui Chen ◽  
Guan Wang ◽  
Yi Chen ◽  
Xiaoting Jia ◽  
Jie Bai ◽  
...  

AbstractCarrot-like defects in a 7&#61616; off-cut (from [0001] toward <1-210> direction) 4H-SiC wafer with a 36μm thick 4H-SiC epilayer have been investigated using Nomarski optical microscopy, synchrotron white beam x-ray topography (SWBXT), scanning electron microscopy (SEM) and transmission electron microscopy (TEM). X-ray topographs confirm that threading screw dislocations are often associated with the carrots. Cross-sectional TEM observation confirms that a prismatic stacking fault exists below the carrot. This fault was found to show contrast in all observed diffraction geometries except for g=0004. A model for the mechanism of formation of this type of defect during epitaxial growth is proposed.


2012 ◽  
Vol 182-183 ◽  
pp. 167-173
Author(s):  
Ming Li ◽  
Zhi Ming Shi ◽  
Dong Fang

This paper studies iron-rich phase transformation law and mechanism of Al-20Si-10Fe alloy under the effect of plate magnetic field. with optical microscopy(OM),scanning electron microscopy(SEM),energy dispersive spectrum(EDS)and transmission electron microscopy(TEM). The results show that plate magnetic field is directly involved in the phase transformation of iron-rich phase, making iron-rich phase change from lath-shaped β-Al5FeSi to herringbone-shapedα-Al8SiFe2. The enforcement of plate magnetic field during the phase-transforming process of β-Al5FeSi→α-Al8Si Fe2makes block α-Al1.3Si7.8Fe2.1phase yield out. And precipitation of α-Al1.3Si7.8Fe2.1phase is affected by the transforming process ofβ-Al5SiFe phase→α-Al8Si Fe2phase.


Author(s):  
Mengli Li ◽  
Weiqiang Wang ◽  
Aiju Li

20 steel thick-wall high-pressure pipes are widely used in chemical industry in China, but brittle fracture accidents of them happen frequently in recent years. The strain aging steel pipes in this research were artificially made in the laboratory and naturally occurred in fabrication or service. The microstructure of strain aging in samples taken from the unused pipes and the accident pipes caused directly or mainly by strain aging were observed with optical microscopy, scanning electron microscopy, and transmission electron microscopy. The results show that: (1)uniform ferrite and pearlite with uniform lamellar structure can be achieved with normalizing; lamellar pearlite fractures and distorts while a large number of dislocation cells, micro-holes or cracks appear in material after strain aging; and broken distorted pearlite changes to uniform spherical structure after stress relieving; (2) both the samples taken from unused and accident pipes which strain aging artificially in the laboratory and naturally in fabrication or service have the same characteristics as following: the basic changes of microstructure after strain aging cannot be observed with optical microscopy, but can be observed with scanning electron microscopy and transmission electron microscopy.


2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Kun Yang ◽  
Jialu Xu ◽  
Ming Zhang ◽  
Daohui Lin

AbstractBiochar supported nanoscale zero-valent iron (NZVI/BC), prepared commonly by liquid reduction using sodium borohydride (NaBH4), exhibits better reduction performance for contaminants than bare NZVI. The better reducing ability was attributed to attachment of nanoscale zero-valent iron (NZVI) on biochar (BC) surface or into the interior pores of BC particles due to observations by scanning electron microscopy (SEM) and plan transmission electron microscopy (P-TEM) techniques in previous studies. In this study, cross-sectional TEM (C-TEM) technique was employed firstly to explore location of NZVI in NZVI/BC. It was observed that NZVI is isolated from BC particles, but not located on the surface or in the interior pores of BC particles. This observation was also supported by negligible adsorption and precipitation of Fe2+/Fe3+ and iron hydroxides on BC surface or into interior pores of BC particles respectively. Precipitation of Fe2+ and Fe3+, rather than adsorption, is responsible for the removal of Fe2+ and Fe3+ by BC. Moreover, precipitates of iron hydroxides cannot be reduced to NZVI by NaBH4. In addition to SEM or P-TEM, therefore, C-TEM is a potential technique to characterize the interior morphology of NZVI/BC for better understanding the improved reduction performance of contaminants by NZVI/BC than bare NZVI.


2007 ◽  
Vol 539-543 ◽  
pp. 3763-3768 ◽  
Author(s):  
Hyun J. Jun ◽  
Raghavan Ayer ◽  
Thirumalai Neeraj ◽  
Russell Steel

Commercial Waspaloy plates with two different initial microstructures (annealed and aged) were joined by Friction Stir Welding (FSW). This study presents the evolution of the grain structure, and precipitation, dissolution and reprecipitation of the γ' phase during FSW using Optical Microscopy, Scanning Electron Microscopy and Transmission Electron Microscopy. The relationship between microstructure and microhardness is also discussed.


2006 ◽  
Vol 911 ◽  
Author(s):  
Masahide Gotoh ◽  
Takeshi Tawara ◽  
Shun-ichi Nakamura ◽  
Tae Tamori ◽  
Yoshiyuki Kuboki ◽  
...  

AbstractIn this study, we investigated surface features formed by molten KOH etching of (000-1) substrates and epilayers, using scanning electron microscopy (SEM) and cross-sectional transmission electron microscopy (TEM). We found the surface features formed on (000-1) are protrusions, in contrast to well-known dimples on (0001).


Author(s):  
Nakazo Watari ◽  
Yasuaki Hotta ◽  
Yoshio Mabuchi

It is very useful if we can observe the identical cell elements within the same sections by light microscopy (LM), transmission electron microscopy (TEM) and/or scanning electron microscopy (SEM) sequentially, because, the cell fine structure can not be indicated by LM, while the color is; on the other hand, the cell fine structure can be very easily observed by EM, although its color properties may not. However, there is one problem in that LM requires thick sections of over 1 μm, while EM needs very thin sections of under 100 nm. Recently, we have developed a new method to observe the same cell elements within the same plastic sections using both light and transmission (conventional or high-voltage) electron microscopes.In this paper, we have developed two new observation methods for the identical cell elements within the same sections, both plastic-embedded and paraffin-embedded, using light microscopy, transmission electron microscopy and/or scanning electron microscopy (Fig. 1).


Author(s):  
A.J. Tousimis ◽  
T.R. Padden

The size, shape and surface morphology of human erythrocytes (RBC) were examined by scanning electron microscopy (SEM), of the fixed material directly and by transmission electron microscopy (TEM) of surface replicas to compare the relative merits of these two observational procedures for this type specimen.A sample of human blood was fixed in glutaraldehyde and washed in distilled water by centrifugation. The washed RBC's were spread on freshly cleaved mica and on aluminum coated microscope slides and then air dried at room temperature. The SEM specimens were rotary coated with 150Å of 60:40- gold:palladium alloy in a vacuum evaporator using a new combination spinning and tilting device. The TEM specimens were preshadowed with platinum and then rotary coated with carbon in the same device. After stripping the RBC-Pt-C composite film, the RBC's were dissolved in 2.5N HNO3 followed by 0.2N NaOH leaving the preshadowed surface replicas showing positive topography.


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