Rapid Thermal Annealing Effects in InxGal−xAs/GaAs Strained-Layer Superlattices

1991 ◽  
Vol 221 ◽  
Author(s):  
J.A. Olsen ◽  
E.L. Hu ◽  
D.R. Myers ◽  
J.F. Klem ◽  
Andrew Skumanich
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Strained Layer ◽  
Annealing Effects ◽  
Strained Layer Superlattices

Defect Reduction in GaAs Epilayers on Si Substrates Using Strained Layer Superlattices

1987 ◽  
Vol 91 ◽  
Author(s):  
N. El-Masry ◽  
N. Hamaguchi ◽  
J.C.L. Tarn ◽  
N. Karam ◽  
T.P. Humphreys ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Buffer Layers ◽  
Threading Dislocations ◽  
Defect Reduction ◽  
Strained Layer ◽  
Si Substrates ◽  
Density Of Dislocations ◽  
Strained Layer Superlattice ◽  
Strained Layer Superlattices

ABSTRACTInxGa11-xAs-GaAsl-yPy strained layer superlattice buffer layers have been used to reduce threading dislocations in GaAs grown on Si substrates. However, for an initially high density of dislocations, the strained layer superlattice is not an effective filtering system. Consequently, the emergence of dislocations from the SLS propagate upwards into the GaAs epilayer. However, by employing thermal annealing or rapid thermal annealing, the number of dislocation impinging on the SLS can be significantly reduced. Indeed, this treatment greatly enhances the efficiency and usefulness of the SLS in reducing the number of threading dislocations.

Rapid Thermal Annealing Effects in CdTe (111) Thin Films Grown on GaAs (100) Substrates

1996 ◽  
Vol 35 (Part 1, No. 8) ◽  
pp. 4220-4224 ◽  
Author(s):  
M. D. Kim ◽  
T. W. Kang ◽  
M. S. Han ◽  
T. W. Kim
Keyword(s):  
Thin Films ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Annealing Effects

Rapid thermal annealing effects on blue luminescence of As-implanted GaN

2002 ◽  
Vol 92 (7) ◽  
pp. 4129-4131 ◽  
Author(s):  
H. Y. Huang ◽  
J. Q. Xiao ◽  
C. S. Ku ◽  
H. M. Chung ◽  
W. K. Chen ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Blue Luminescence ◽  
Annealing Effects

As-deposited properties and rapid thermal annealing effects on Ti/TiN barrier layer for aluminum plug technology

1994 ◽  
Author(s):  
De-Dui Liao ◽  
Yih-Shung Lin ◽  
Hong Yang ◽  
Howard Witham ◽  
Javier Saenz ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Barrier Layer ◽  
Annealing Effects

Annealing effects in short period Si-Ge strained layer superlattices

1988 ◽  
Vol 3 (12) ◽  
pp. 1166-1170 ◽  
Author(s):  
H Brugger ◽  
E Friess ◽  
G Abstreiter ◽  
E Kasper ◽  
H Kibbel
Keyword(s):  
Strained Layer ◽  
Short Period ◽  
Annealing Effects ◽  
Strained Layer Superlattices

Rapid thermal annealing effects on the properties of plasma‐enhanced chemical vapor deposited tungsten films

1991 ◽  
Vol 70 (4) ◽  
pp. 2366-2369 ◽  
Author(s):  
Jong‐Sung Hong ◽  
Yong Tae Kim ◽  
Suk‐Ki Min ◽  
Tae Won Kang ◽  
Chi Yhou Hong
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Chemical Vapor ◽  
Chemical Vapor Deposited ◽  
Annealing Effects

Rapid thermal annealing effects on the electrical, structural and morphological properties of Yb/p-type InP Schottky Structure

2015 ◽  
Vol 11 (1) ◽  
pp. 73-81 ◽  
Author(s):  
V. Rajagopal Reddy ◽  
D. Sri Silpa ◽  
V. Janardhanam ◽  
Hyung-Joong Yun ◽  
Chel-Jong Choi
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Morphological Properties ◽  
Annealing Effects ◽  
P Type ◽  
Schottky Structure

scholarly journals Rapid thermal annealing effects on plasma deposited SiOx:H films

Vacuum ◽  
2002 ◽  
Vol 67 (3-4) ◽  
pp. 531-536 ◽  
Author(s):  
E San Andrés ◽  
A del Prado ◽  
I Mártil ◽  
G González Dı́az ◽  
F.L Martinez ◽  
...  
Keyword(s):  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Annealing Effects
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