Neutral Beam Source Design and Beam Kinetic Energy Activated SiO2 Etching

1992 ◽  
Vol 279 ◽  
Author(s):  
Lee Chen ◽  
Akihisa Sekiguchi ◽  
Dragan Podlesnik
Keyword(s):  
Kinetic Energy ◽  
Chemical Reaction ◽  
Incident Energy ◽  
Beam Energy ◽  
Large Diameter ◽  
Low Energy ◽  
Neutral Beam ◽  
Beam Source ◽  
Neutral Radical ◽  
Unique Method

ABSTRACTAn unique method is used to produce a low energy nonthermalized fast neutral radical beam wliich can activate the SiO2 surface for chemical reaction at the desired incident energy. The fast neutral beam energy is continuously adjustable (2eV<Ek<200eV) and the beam flux is typically 5×1015cm−2 sec−1(∼4L). An uniform large diameter plasma is also made for the production of neutral beam covering 5”wafer and larger. Large diameter neutral beam single wafer reactor is feasible with off-the-shelf pumping technology.

scholarly journals The ELENA facility

2018 ◽  
Vol 376 (2116) ◽  
pp. 20170266 ◽  
Author(s):  
Wolfgang Bartmann ◽  
Pavel Belochitskii ◽  
Horst Breuker ◽  
Francois Butin ◽  
Christian Carli ◽  
...  
Keyword(s):  
Kinetic Energy ◽  
Beam Energy ◽  
Low Energy ◽  
Electron Cooler ◽  
Transfer Lines ◽  
Experimental Area ◽  
Active User ◽  
Lower Beam ◽  
The Status ◽  
The Given

The CERN Antiproton Decelerator (AD) provides antiproton beams with a kinetic energy of 5.3 MeV to an active user community. The experiments would profit from a lower beam energy, but this extraction energy is the lowest one possible under good conditions with the given circumference of the AD. The Extra Low Energy Antiproton ring (ELENA) is a small synchrotron with a circumference a factor of 6 smaller than the AD to further decelerate antiprotons from the AD from 5.3 MeV to 100 keV. Controlled deceleration in a synchrotron equipped with an electron cooler to reduce emittances in all three planes will allow the existing AD experiments to increase substantially their antiproton capture efficiencies and render new experiments possible. ELENA ring commissioning is taking place at present and first beams to a new experiment installed in a new experimental area are foreseen in 2017. The transfer lines from ELENA to existing experiments in the old experimental area will be installed during CERN Long Shutdown 2 (LS2) in 2019 and 2020. The status of the project and ring commissioning will be reported. This article is part of the Theo Murphy meeting issue ‘Antiproton physics in the ELENA era’.

Nitriding of Polymer by Low Energy Nitrogen Neutral Beam Source

2012 ◽  
Vol 5 (3) ◽  
pp. 035801 ◽  
Author(s):  
Yasuhiro Hara ◽  
Keigo Takeda ◽  
Koji Yamakawa ◽  
Shoji Den ◽  
Hirotaka Toyoda ◽  
...  
Keyword(s):  
Low Energy ◽  
Neutral Beam ◽  
Beam Source

The properties of low energy neutral particles in a neutral beam source: A molecular dynamics study

2010 ◽  
Vol 518 (22) ◽  
pp. 6408-6411 ◽  
Author(s):  
Seung-hoon Park ◽  
Suk Jae Yoo ◽  
Choong-Seock Chang
Keyword(s):  
Molecular Dynamics ◽  
Low Energy ◽  
Neutral Beam ◽  
Beam Source ◽  
Neutral Particles

Large Area Electron Beam Enhanced Reactive Etching of SiO2

1987 ◽  
Vol 98 ◽  
Author(s):  
P. Kirk Boyer ◽  
Tim Verhey ◽  
Jorge J. Rocca
Keyword(s):  
Electron Beam ◽  
Beam Energy ◽  
High Pressures ◽  
Beam Current ◽  
Low Energy ◽  
Large Area ◽  
Beam Source ◽  
Energy Beam ◽  
Reactive Gases ◽  
Reactive Gas

ABSTRACTA large area (2.8 cm2) electron beam source has been developed, characterized, and applied to anisotropic etching of SiO2 masked with photoresist. This beam operates at high pressures (up to 100 mTorr), in reactive gases, and at more than 10 mA/cm2. Beam current can be controlled in several ways independently from beam energy. The 100 – 900 eV low energy beam propagates with collimation through several cm of reactive gas, and is believed to minimize space charge defocusing by collisionally ionizing the working gas.

Calibration of a neutral particle beam source with the novel Absolute Beam Monitor

2021 ◽  
Author(s):  
Jonathan Gasser ◽  
André Galli ◽  
Peter Wurz
Keyword(s):  
Energy Range ◽  
Beam Energy ◽  
Neutral Atom ◽  
Neutral Particle ◽  
Ion Beam ◽  
Neutral Beam ◽  
Test Facility ◽  
Beam Source ◽  
Energetic Neutral Atom ◽  
Beam Monitor

&lt;p&gt;The energetic neutral atom detection instrument IMAP-Lo is part of the scientific payload of the upcoming Interstellar Mapping and Acceleration Probe (IMAP) mission by NASA and is designed to analyse interstellar neutral and heliospheric Energetic Neutral Atom fluxes and their composition for energies from 1000 eV down to 10&amp;#160;eV. IMAP is dedicated to extend our knowledge of the local interstellar medium (LISM) and its interaction with the solar magnetic field and the heliosphere. Most importantly, H, He, O and Ne ENAs will be analysed.&lt;/p&gt;&lt;p&gt;Calibration and testing of IMAP-Lo is planned in MEFISTO, a unique laboratory test facility for ion and neutral particle instruments at the University of Bern, which can provide the required neutral atom beams. In MEFISTO we have a microwave-induced plasma ion source for beam energies up to 100&amp;#160;keV/q. The ion beam can be converted to a neutral beam in the energy range 10 eV &amp;#8211; 3 keV with a removable ion beam neutralizer with decelerating the ion beam first and subsequent neutralisation via surface reflection. It comes with an estimated beam energy reduction of 15&amp;#160;% and energy-dependent transmission. The neutral beam flux into the test chamber therefore depends on the ion beam energy, intensity and species. To improve the calibration process for ENA space instruments such as IMAP-Lo, it is important to measure the neutral beam flux and energy in the test facility.&lt;/p&gt;&lt;p&gt;The Absolute Beam Monitor (ABM) is a novel laboratory device developed for absolute neutral particle flux measurements and energy determination of neutral atom beams. The ABM takes advantage of secondary electron emission during surface scattering of incident neutral atoms off a highly polished tungsten plate. The effective rate of neutrals is inferred from detecting secondary electrons and reflected atoms in two electron multipliers as well as its coincidence signal rate. Time difference of the two signals yields the neutrals energy. To date, the ABM is the only device to measure absolute fluxes of neutral atoms in this energy range.&lt;/p&gt;&lt;p&gt;Measurements of the neutral beam source in MEFISTO have been performed for several species using the ABM to determine the relation between the effective neutral atom flux and the primary ion beam current at the charge conversion surface, as well as the neutral beam energy, for ion energies from 1000&amp;#160;eV down to 10&amp;#160;eV.&lt;/p&gt;

Power transmission characteristics of a two‐stage multiaperture neutral beam source

1980 ◽  
Vol 51 (9) ◽  
pp. 1163-1167 ◽  
Author(s):  
M. M. Menon ◽  
C. C. Tsai ◽  
D. E. Schechter ◽  
P. M. Ryan ◽  
G. C. Barber ◽  
...  
Keyword(s):  
Power Transmission ◽  
Neutral Beam ◽  
Transmission Characteristics ◽  
Two Stage ◽  
Beam Source

European contributions to the beam source design and R&D of the ITER neutral beam injectors

2000 ◽  
Vol 40 (3Y) ◽  
pp. 589-597 ◽  
Author(s):  
P Massmann ◽  
P Bayetti ◽  
J Bucalossi ◽  
C Desgranges ◽  
E. Di Pietro ◽  
...  
Keyword(s):  
Neutral Beam ◽  
Beam Source ◽  
Neutral Beam Injectors

scholarly journals Studies of Deuteron–Proton Collisions at 100 MeV

2021 ◽  
Vol 62 (4) ◽  
Author(s):  
I. Skwira-Chalot ◽  
N. Kalantar-Nayestanaki ◽  
St. Kistryn ◽  
A. Kozela ◽  
E. Stephan
Keyword(s):  
Cross Section ◽  
Effective Field Theory ◽  
Beam Energy ◽  
Effective Field ◽  
Breakup Reaction ◽  
Low Energy ◽  
Chiral Effective Field Theory ◽  
Proton Collisions ◽  
Realistic Potentials ◽  
Good Agreement

AbstractDifferential cross section for the $$^1H(d,pp)n$$ 1 H ( d , p p ) n reaction is sensitive to various dynamical ingredients and allows for thorough tests of theoretical potentials describing the interaction in the three nucleon systems. The analysis of the experimental data collected for the breakup reaction at the beam energy of 100 MeV has been performed and the first cross section results for selected configurations are presented in this paper. They are in good agreement with calculations based on the realistic potentials. Studies at this relatively low energy will also be important for examining awaited calculations within the Chiral Effective Field Theory.

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