scholarly journals Effects of Acetylacetone Additions on PZT Thin Film Processing

1994 ◽  
Vol 361 ◽  
Author(s):  
Robert W. Schwartz ◽  
R.A. Assink ◽  
D. Dimos ◽  
M.B. Sinclair ◽  
T.J. Boyle ◽  
...  
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Precursor Solution ◽  
Lead Zirconate ◽  
Pzt Thin Film ◽  
Precursor Structure ◽  
Drying Behavior ◽  
Ceramic Microstructure ◽  
Gel Processing

ABSTRACTSol-gel processing methods are frequently used for the fabrication of lead zirconate titanate (PZT) thin films for many electronic applications. Our standard approach for film fabrication utilizes lead acetate and acetic acid modified metal alkoxides of zirconium and titanium in the preparation of our precursor solutions. This report highlights some of our recent results on the effects of the addition of a second chelating ligand, acetylacetone, to this process. We discuss the changes in film drying behavior, densification and ceramic microstructure which accompany acetylacetone additions to the precursor solution and relate the observed variations in processing behavior to differences in chemical precursor structure induced by the acetylacetone ligand. Improvements in thin film microstructure, ferroelectric and optical properties are observed when acetylacetone is added to the precursor solution.

Correlations Among Degradations in Lead Zirconate Titanate thin Film Capacitors

1993 ◽  
Vol 310 ◽  
Author(s):  
In K. Yoo ◽  
Seshu B. Desu ◽  
Jimmy Xing
Keyword(s):  
Thin Film ◽  
Leakage Current ◽  
Lead Zirconate Titanate ◽  
Oxygen Vacancies ◽  
Lead Zirconate ◽  
Electrical Degradation ◽  
Zirconate Titanate ◽  
Thin Film Capacitors ◽  
Pzt Thin Film ◽  
Degradation Properties

AbstractMany attempts have been made to reduce degradation properties of Lead Zirconate Titanate (PZT) thin film capacitors. Although each degradation property has been studied extensively for the sake of material improvement, it is desired that they be understood in a unified manner in order to reduce degradation properties simultaneously. This can be achieved if a common source(s) of degradations is identified and controlled. In the past it was noticed that oxygen vacancies play a key role in fatigue, leakage current, and electrical degradation/breakdown of PZT films. It is now known that space charges (oxygen vacancies, mainly) affect ageing, too. Therefore, a quantitative ageing mechanism is proposed based on oxygen vacancy migration under internal field generated by either remanent polarization or spontaneous polarization. Fatigue, leakage current, electrical degradation, and polarization reversal mechanisms are correlated with the ageing mechanism in order to establish guidelines for simultaneous degradation control of PZT thin film capacitors. In addition, the current pitfalls in the ferroelectric test circuit is discussed, which may cause false retention, imprint, and ageing.

Fabrication and Characterization of Sol-Gel Derived PZT/WO3 Ceramics

2008 ◽  
Vol 55-57 ◽  
pp. 369-372 ◽  
Author(s):  
T. Sreesattabud ◽  
Anucha Watcharapasorn ◽  
Sukanda Jiansirisomboon
Keyword(s):  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Rhombohedral Phase ◽  
Lead Zirconate ◽  
X Ray Diffraction ◽  
Calcination Process ◽  
Materials Used ◽  
Phase Characterization ◽  
Gel Processing

Lead zirconate titanate/tungsten oxide (PZT/WO3) ceramics were prepared from the powders synthesized by a modified triol sol-gel processing method. In this study, the starting materials used for synthesis of PZT-sol were zirconium (IV) propoxide, titanium (IV) isopropxide, lead (II) acetate trihydrate and 1,1,1,- tris (hydroxymethyl) ethane. To prepare PZT/xWO3 powders (where x = 0, 0.5, 1 and 3 wt%), nano-sized WO3 was ultrasonically dispersed and mixed with the PZT sol, dried and calcined at 600°C for 4 h. X-ray diffraction results indicated that fully crystallized powders were obtained. Phase characterization suggested that at high WO3 concentration, the reaction between PZT and WO3 occurred during the calcination process. To prepare PZT/xWO3 ceramics, the powders were pressed and sintered at 1100°C for 6 h. Phase characterization by XRD indicated that the content of WO3 significantly affected tetragonal-to-rhombohedral phase transition. Microstructure of thermally etched samples showed that increasing the content of WO3 decreased grain size of the ceramics.

scholarly journals Local Fatigue Evaluation in PZT Thin Films with Nanoparticles by Piezoresponse Force Microscopy

2012 ◽  
Vol 2012 ◽  
pp. 1-9
Author(s):  
B. S. Li
Keyword(s):  
Thin Films ◽  
Lead Zirconate Titanate ◽  
Ferroelectric Properties ◽  
Sol Gel ◽  
Precursor Solution ◽  
Grain Morphology ◽  
Piezoresponse Force Microscopy ◽  
Lead Zirconate ◽  
Fatigue Performance ◽  
Pzt Thin Films

Lead zirconate titanate (PZT) thin films with the morphotropic phase boundary composition (Zr/Ti = 52/48) have been prepared using a modified diol-based sol-gel route by introducing 1–5 mol% barium titanate (BT) nanoseeds into the precursor solution on platinized silicon substrates (Pt/Ti/SiO2/Si). Macroscopic electric properties of PZT film with nanoparticle showed a significant improvement of ferroelectric properties. This work aims at the systematic study of the local switching polarization behavior during fatigue in PZT films with and without nanoparticles by using very recent developed scanning piezoelectric microscopy (SPM). We show that the local fatigue performance, which is characterized by variations of local piezoloop with electric cycles, is significantly improved by adding some nanoseeds. It has been verified by scanning electron microscope (SEM) that the film grain morphology changes from columnar to granular structure with the addition of the nanoseeds. On the other hand, the existence of PtxPb transition phase, which existed in interface at early crystallization stage of pure PZT thin film, deteriorates the property of the interface. These microstructures and the interfaces of these films significantly affect the electrons injection occurred on the interfaces. The domain wall pinning induced by injected electrons and the succeeding penetration into the films is discussed to explain the fatigue performance.

Aging Characteristics of a Hybrid Sol-gel Pb(Zr, Ti)O3 Precursor Solution

1997 ◽  
Vol 12 (4) ◽  
pp. 1022-1030 ◽  
Author(s):  
Timothy J. Boyle ◽  
Duane Dimos ◽  
Robert W. Schwartz ◽  
Todd M. Alam ◽  
Michael B. Sinclair ◽  
...  
Keyword(s):  
Lead Zirconate Titanate ◽  
Sol Gel ◽  
Precursor Solution ◽  
Extended Period ◽  
Lead Zirconate ◽  
Film Properties ◽  
Ph Measurements ◽  
Chemical Aging ◽  
H Nmr ◽  
Material Forming

The “aging” characteristics of an acetic acid/methanol solvent-based lead zirconate titanate (PZT) precursor solution, prepared by the Inverted Mixing Order (IMO) process, have been studied for an extended period of time. The changes in film properties were characterized using optical microscopy, optical scattering, and ferroelectric testing. Films generated from the IMO process exhibit an increase in thickness as a function of solution age due to chemical “aging” (esterification) of the precursor solution. This increased thickness results in a decrease in the microstructural uniformity, which affects the electrical and optical properties. In order to understand and eventually control this phenomenon, we have quantified the “aging” of this solution using a variety of analytical methods, including 1H NMR spectroscopy, pH measurements, and Fourier transform infrared (FTIR) spectroscopy. It is of note that we have discovered a method that circumvents this “aging” problem by removal of the volatile material, forming an IMO powder which can be redissolved to produce high quality PZT thin films whenever desired.

Effects of Added Mass on Lead-Zirconate-Titanate (PZT) Thin-Film Microactuators in Aqueous Environments

2013 ◽  
Author(s):  
Chuan Luo ◽  
Chen-Wei Yang ◽  
G. Z. Cao ◽  
I. Y. Shen
Keyword(s):  
Thin Film ◽  
Lead Zirconate Titanate ◽  
Silicon Substrate ◽  
Laser Doppler Vibrometer ◽  
Lead Zirconate ◽  
Added Mass ◽  
Surrounding Water ◽  
Zirconate Titanate ◽  
Pzt Thin Film ◽  
Aqueous Environments

In this paper, we conduct experimental and theoretical studies of a lead-zirconate-titanate (PZT) thin-film microactuator probe submerged in water. The microactuator consists of a base silicon diaphragm, a layer of bottom electrode, a layer of lead-zirconate-titanate (PZT) thin film, and a layer of top electrode. The diaphragm is anchored on a silicon substrate by etching the silicon substrate from the back to form a cavity under the diaphragm. The diaphragm along with part of its anchor is then diced off from the silicon substrate to form a PZT probe and subsequently packaged with parylene. The probe tip has dimensions of 1 mm × 1 mm × 0.4 mm, while the diaphragm has dimensions of 800 μm × 800 μm × 2 μm. In the experimental study, frequency response functions of actuator displacement are measured via a laser Doppler vibrometer and a spectrum analyzer. The measurements show that the first natural frequency of the microactuator reduces from 80 kHz in air to 20 kHz when the microactuator is submerged in water. A literature search indicates that the surrounding water induces significant added mass to the microactuator. Estimation of the added mass based on theories in fluid mechanics successfully reconcile the predicted frequency to the vicinity of 20 kHz confirming the effects of added mass.

scholarly journals Piezoelectric properties of PZT by an ethylene glycol-based chemical solution synthesis

2021 ◽  
Author(s):  
Ewout van der Veer ◽  
Beatriz Noheda ◽  
Mónica Acuautla
Keyword(s):  
Thin Film ◽  
Ethylene Glycol ◽  
Lead Zirconate Titanate ◽  
Piezoelectric Properties ◽  
Sol Gel ◽  
Lead Zirconate ◽  
Grain Structure ◽  
Solution Synthesis ◽  
Zirconate Titanate ◽  
Layer Thin Film

AbstractWe have investigated a water-stable sol–gel method based on ethylene glycol as a solvent and bridging ligand for the synthesis of ferroelectric lead zirconate titanate in bulk and thin film forms. This method offers lower toxicity of the solvent, higher stability toward atmospheric moisture and a simplified synthetic procedure compared to traditional sol–gel methods. However, the piezoelectric properties of products produced using this method have yet to be systematically studied. We have measured the ferroelectric and piezoelectric properties and compared them to existing literature using different synthesis techniques. Ceramic pellets of Nb-doped lead zirconate titanate (PNZT) in the tetragonal phase were produced with high density and good piezoelectric properties, comparable to those reported in the literature and those found in commercial piezoelectric elements. In addition, a nine-layer thin film stack was fabricated by spin coating onto platinized silicon substrates. The films were crack-free and showed a perovskite grain structure with a weak (111) orientation. Piezoelectric measurements of the film showed a piezoelectric coefficient comparable to literature values and good stability toward fatigue.

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