Microstructure Evolution of Epitaxial (Ba, Sr) TiO3/ (001) HgO Thin Films
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ABSTRACTSurface and cross-section relief evolution of ferroelectric epitaxial (Ba,Sr)TiO3 films rf-sputtered on (001) HgO crystal cle-avage surface versus the oxygen worKing gas pressure P and subst-rate temperature T were studied. Specific features of both three-dimensional and two-dimensional epitaxy mechanisms corresponding to various deposition conditions were revealed. Difference between low and high P-T-value 3D epitaxy was established. The deposition of films with mirror-smooth surfaces and perfect interfaces is shown to be possible.
1992 ◽
Vol 241
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pp. 587-614
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2021 ◽
Vol 5
(4)
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pp. 53-60
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2019 ◽
Vol 475
(2225)
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pp. 20190124
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2014 ◽
Vol 118
(29)
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pp. 15649-15655
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