Surface and Interface Microstructure of Epitaxial Ferroelectric (Ba, Sr)Tio3 Thin Films
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AbstractSurface and cross-section relief evolution of ferroelectric epitaxial (Ba,Sr)Ti03 films rf-sputtered on (001) MgO crystal cleavage surfaces versus the oxygen worKing gas pressure P and substrate temperature T were studied. Specific features of both three-dimensional and two-dimensional epitaxy mechanisms corresponding to various deposition conditions were revealed. Difference between low and high P-T-value 3D epitaxy was established. the deposition of films with mirror-smooth surfaces and perfect interfaces is shown to be possible.
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1992 ◽
Vol 241
◽
pp. 587-614
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2021 ◽
Vol 5
(4)
◽
pp. 53-60
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Keyword(s):
2019 ◽
Vol 475
(2225)
◽
pp. 20190124
◽
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