Growth Conditions of Erbium-Oxygen-Doped Silicon Grown by MBE
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AbstractWe report on a systematic study of the growth parameters of erbium-oxygen-doped silicon grown by molecular beam epitaxy. The surface quality of the grown layers was measured in situ by RHEED. The samples were characterized by photoluminescence measurements and SIMS. An Er-O-doped Si light emitting diode grown with the optimized parameters is presented.
2015 ◽
Vol 40
(2)
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pp. 149-152
2008 ◽
Vol 5
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pp. 3069-3072
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2007 ◽
Vol 19
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pp. 109-111
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2014 ◽
Vol 2
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pp. 4112-4116
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