Environmental Issues of Perfluorocompounds in the Semiconductor Industry

1996 ◽  
Vol 447 ◽  
Author(s):  
Jeffrey D. Williams
Keyword(s):  
Global Warming ◽  
Emission Reduction ◽  
Semiconductor Manufacturing ◽  
Semiconductor Industry ◽  
Environmental Issues ◽  
Environmentally Benign ◽  
The Family ◽  
Global Warming Potentials ◽  
Potential Impact ◽  
Critical Class

AbstractA critical class of semiconductor manufacturing compounds is the family of perfluorocompounds, or PFCs. Originally thought to be environmentally benign compounds, they are likely long-lived atmospheric compounds with high global warming potentials. This paper reviews the options available to industry to reduce PFC emissions. Process optimization, chemical substitution, abatement, and recovery will be discussed as they relate to specific processes. Each will be reviewed with respect to the particular gas affected and the potential impact realized. Collateral environmental impacts will also be discussed. Finally, the voluntary EPA program, the PFC Emission Reduction Partnership for the Semiconductor Industry, will be presented.

Control of Long-Lived Gas Emissions From Semiconductor Processing Equipment

1994 ◽  
Vol 344 ◽  
Author(s):  
Michael T. Mocella
Keyword(s):  
Thin Film ◽  
Global Warming ◽  
Gas Phase ◽  
Cross Sections ◽  
Semiconductor Industry ◽  
Absorption Cross ◽  
Semiconductor Processing ◽  
Gas Emissions ◽  
Industrial Policies ◽  
Global Warming Potentials

AbstractCertain perfluorocompounds (PFCs) - including CF4, C2F6, SF6, and NF3 - are widely used in gas phase thin film processing applications such as dry etching and CVD chamber cleaning. Through a combination of long atmospheric lifetimes and high infrared absorption cross sections, many PFCs have high global warming potentials (GWPs). Abatement of PFC emissions from semiconductor applications is consistent with existing and developing international, national, and industrial policies for the control of greenhouse gas emissions. For PFC applications in the semiconductor industry, there exist a number of promising options for emissions control. These options include destruction (comprising combustion, plasma, and chemical-thermal routes), recovery, and process replacement.

scholarly journals Canada as a Case Study for Balanced Presentation to Address Controversy on Emission Reduction Policies

2021 ◽  
Vol 13 (14) ◽  
pp. 7909
Author(s):  
Robert V. Parsons
Keyword(s):  
Emission Reduction ◽  
Environmental Issues ◽  
Trade Show ◽  
Quantitative Metrics ◽  
Carbon Taxation ◽  
Canadian Provinces ◽  
Method Analysis ◽  
A Current

Controversy is common on environmental issues, with carbon taxation in Canada a current example. This paper uses Canada as a case study for analysis based around balanced presentation, a technique developed some time ago, yet largely forgotten. Using the method, analysis is shifted away from the point of controversy to a broader quantitative question, with comparative data employed from official government sources. Simple quantitative analysis is applied to evaluate emission trends of individual Canadian provinces, with quantitative metrics to identify and confirm the application of relevant emission reduction policies by individual jurisdictions. From 2005 through 2019, three provinces show consistent downward emission trends, two show consistent upward trends, and the remaining five have no trends, showing relatively “flat” profiles. The results clarify, in terms of diverse emission reduction policies, where successes have occurred, and where deficiencies or ambiguities have existed. Neither carbon taxation nor related cap-and-trade show any association with long-term reductions in overall emissions. One policy does stand out as being associated with long-term reductions, namely grid decarbonization. The results suggest a possible need within Canada to rethink emission reduction policies. The method may be relevant as a model for other countries to consider as well.

scholarly journals Atmospheric Lifetimes, Infrared Absorption Spectra, Radiative Forcings and Global Warming Potentials of NF<sub>3</sub> and CFC-115

2016 ◽  
Author(s):  
Anna Totterdill ◽  
Tamás Kovács ◽  
Wuhu Feng ◽  
Sandip Dhomse ◽  
Christopher J. Smith ◽  
...  
Keyword(s):  
Global Warming ◽  
Cross Sections ◽  
Infrared Absorption ◽  
Radiative Forcing ◽  
Climate Model ◽  
Radiative Forcings ◽  
Atmospheric Window ◽  
Infrared Absorption Spectra ◽  
Global Warming Potentials ◽  
Good Agreement

Abstract. Fluorinated compounds such as NF3 and C2F5Cl (CFC-115) are characterised by very large global warming potentials (GWPs) which result from extremely long atmospheric lifetimes and strong infrared absorptions in the atmospheric window. In this study we have experimentally determined the infrared absorption cross-sections of NF3 and CFC-115, calculated the radiative forcing and efficiency using two radiative transfer models and identified the effect of clouds and stratospheric adjustment. The infrared cross sections are in good agreement with previous measurements, whereas the resulting radiative forcings and efficiencies are, on average, around 10 % larger. A whole atmosphere chemistry-climate model was used to determine the atmospheric lifetimes of NF3 and CFC-115 to be (616 ± 34) years and (492 ± 22) years, respectively. The GWPs for NF3 are estimated to be 14 600, 19 400 and 21 400 over 20, 100 and 500 years, respectively. Similarly, the GWPs for CFC-115 are 6120, 8060 and 8630 over 20, 100 and 500 years, respectively.

CF3CFCH2and (Z)-CF3CFCHF: temperature dependent OH rate coefficients and global warming potentials

2008 ◽  
Vol 10 (6) ◽  
pp. 808-820 ◽  
Author(s):  
Vassileios C. Papadimitriou ◽  
Ranajit K. Talukdar ◽  
R. W. Portmann ◽  
A. R. Ravishankara ◽  
James B. Burkholder
Keyword(s):  
Global Warming ◽  
Rate Coefficients ◽  
Temperature Dependent ◽  
Global Warming Potentials
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