Low Temperature Poly-Si Layers Deposited by Hot Wire CVD Yielding a Mobility of 4.0 cm2V−1s−1 in Top Gate Thin Film Transistors
Keyword(s):
Hot Wire
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ABSTRACTDirect deposition of polycrystalline silicon (poly-Si) thin films by the Hot Wire CVD method has been used for the first time for the fabrication of poly-Si top gate Thin Film Transistors (TFTs). The TFTs have a high electron mobility in saturation of up to 4 cm2V−1s−1 as well as a remarkably large ON/OFF ratio of up to 6 × 105.
2010 ◽
Vol 49
(3)
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pp. 03CD03
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2007 ◽
Vol 46
(7A)
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pp. 4021-4027
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2016 ◽
Vol 4
(43)
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pp. 10309-10314
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