Fabrication of Perforated Film Nanostructures
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ABSTRACTWe have demonstrated the fabrication of perforated thin films (PTFs), comprised of thin coatings perforated with unusual pore shapes such as helices or chevrons. PTFs are fabricated using a template of nanohelices or nanochevrons produced using the Glancing Angle Deposition (GLAD) technique. PTFs can be produced by filling GLAD films with a variety of substances, etching back the coating to reveal the tips of the helices or chevrons, and etching out the template film. A process for fabricating nickel PTFs has been developed, and a nickel PTF of helical pores with nominal diameters of 100nm has been produced.
2016 ◽
Vol 41
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pp. 450-456
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2008 ◽
Vol 26
(4)
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pp. 881-886
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2008 ◽
Vol 28
(5-6)
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pp. 692-696
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2012 ◽
Vol 12
(12)
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pp. 9125-9130
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