A High Schottky Barrier Contact of Metallic Amorphous Si-P on P-Type Si
Keyword(s):
P Type
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ABSTRACTA high Schottky barrier contact is formed when amorphous Si-P solid solution film and p-type Si are brought into contact. Amorphous Si-P films were deposited by thermal decomposition of a Si2H6-PH3 mixture at 500°C. It was found that conductivity increases rapidly when PH3/Si2H6, is increased from 0.2 to 2. When PH3/i2H6 = 2, conductivity is 0.15 S/cm, and the dominant conduction mechanism is variable-range hopping. Barrier height of amorphous Si-P/p-type Si Schottky contact is estimated to be 0.8 – 0.85 V. This value exceeds the barrier height formed by any normal metal.
Keyword(s):
2012 ◽
Vol 51
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pp. 09MK01
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2014 ◽
Vol 778-780
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pp. 1142-1145
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2012 ◽
Vol 51
(9S2)
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pp. 09MK01
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2008 ◽
Vol 22
(14)
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pp. 2309-2319
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1983 ◽
Vol 22
(Part 2, No. 11)
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pp. L709-L711
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2003 ◽
Vol 18
(7)
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pp. 642-646
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