Stress Hysteresis and Thermal-Mechanical Behavior of PECVD Silicon Nitride and Ebeam Aluminum Films for Microbolometer Applications

2004 ◽  
Vol 854 ◽  
Author(s):  
Shusen Huang ◽  
Xin Zhang
Keyword(s):  
Silicon Nitride ◽  
Mechanical Behavior ◽  
Measurement System ◽  
Low Cost ◽  
High Sensitivity ◽  
Central Idea ◽  
Aluminum Films ◽  
Uncooled Microbolometer ◽  
Curvature Measurement ◽  
Stress Hysteresis

ABSTRACTUncooled cantilever-based microbolometer arrays received more attention recently due to high sensitivity and low cost. The central idea is built on the deflection of a bilayer SiNx/Al material upon the temperature change. The thermal-mechanical behavior of the bilayer is significant for the performance of the microbolometers. In this paper, we perform thermal cyclings to aluminum and SiNx films. The CTEs and the stress evolutions were measured using a curvature measurement system. The curvature profile of a SiNx/Al/Si component was predicted using an extension of Stoney's formula, well agreeing with the experimental results. This work demonstrates fundamental mechanics issues in bilayer SiNx/Al components, which have a great potential for the use in uncooled microbolometer applications.

Study on Velocity Measurement of Gas/Solid Flow Based on Electrostatic Sensor

2014 ◽  
Vol 614 ◽  
pp. 275-278
Author(s):  
Yu Tang ◽  
Xiang Deng ◽  
Shuo Tian
Keyword(s):  
Measurement System ◽  
Velocity Measurement ◽  
Flow Measurement ◽  
Cross Correlation ◽  
Low Cost ◽  
High Sensitivity ◽  
Two Phase ◽  
Solid Flow ◽  
Correlation Algorithm ◽  
Electrostatic Induction

Electrostatic sensor is based on the principle of electrostatic induction. It is widely used for gas/solid two-phase flow measurement because it has the advantages of simple structure, high sensitivity, low cost, etc. In this paper, a velocity measurement system of gas/solid flow based on electrostatic sensor and cross-correlation algorithm is discussed. Electrostatic sensor with circular electrode is adopted. By COMSOL optimum simulation, the axial length of the electrode is designed. The signal conditioning circuits are discussed and cross-correlation algorithm is analyzed. The initial experimental results demonstrate that the velocity measurement system of gas/solid flow designed in this paper is feasible.

Mechanical Properties Evolution of Polydimethylsiloxane During Crosslinking Process

2006 ◽  
Vol 975 ◽  
Author(s):  
Yi Zhao ◽  
Xin Zhang
Keyword(s):  
Mechanical Properties ◽  
Mechanical Behavior ◽  
Measurement System ◽  
Curing Agent ◽  
Operational Parameters ◽  
Crosslinking Process ◽  
Sensing Applications ◽  
Curvature Measurement ◽  
The Relationship ◽  
Mechanical Sensing

ABSTRACTThis paper reports mechanical properties evolution of polydimethylsiloxane (PDMS) during the crosslinking process. In this work, PDMS crosslinking was induced by mixing base prepolymer and curing agent at certain ratios. The liquid prepolymer was spun coated on a silicon wafer, and the curvature change of the wafer was measured continuously using a curvature measurement system. The relationship between the curvature change and typical mechanical properties was investigated using a bilayer model; and the evolution of the properties was derived, as a function of operational parameters. This work is expected to help better understanding of the crosslinking process and provide practical strategies for controlling the mechanical behavior of the resulting polymer structures, especially those for mechanical sensing applications.

scholarly journals Integrating high-performing electrochemical transducers in lateral flow assay

2021 ◽  
Author(s):  
Antonia Perju ◽  
Nongnoot Wongkaew
Keyword(s):  
High Performance ◽  
Point Of Care ◽  
Low Cost ◽  
High Sensitivity ◽  
Lateral Flow ◽  
Analytical Performance ◽  
Label Free ◽  
High Performing ◽  
Lateral Flow Assays ◽  
Electrochemical Transducers

AbstractLateral flow assays (LFAs) are the best-performing and best-known point-of-care tests worldwide. Over the last decade, they have experienced an increasing interest by researchers towards improving their analytical performance while maintaining their robust assay platform. Commercially, visual and optical detection strategies dominate, but it is especially the research on integrating electrochemical (EC) approaches that may have a chance to significantly improve an LFA’s performance that is needed in order to detect analytes reliably at lower concentrations than currently possible. In fact, EC-LFAs offer advantages in terms of quantitative determination, low-cost, high sensitivity, and even simple, label-free strategies. Here, the various configurations of EC-LFAs published are summarized and critically evaluated. In short, most of them rely on applying conventional transducers, e.g., screen-printed electrode, to ensure reliability of the assay, and additional advances are afforded by the beneficial features of nanomaterials. It is predicted that these will be further implemented in EC-LFAs as high-performance transducers. Considering the low cost of point-of-care devices, it becomes even more important to also identify strategies that efficiently integrate nanomaterials into EC-LFAs in a high-throughput manner while maintaining their favorable analytical performance.

scholarly journals 60–700 K CTAT and PTAT Temperature Sensors with 4H-SiC Schottky Diodes

Sensors ◽  
2021 ◽  
Vol 21 (3) ◽  
pp. 942
Author(s):  
Razvan Pascu ◽  
Gheorghe Pristavu ◽  
Gheorghe Brezeanu ◽  
Florin Draghici ◽  
Philippe Godignon ◽  
...  
Keyword(s):  
Low Cost ◽  
Schottky Diodes ◽  
Schottky Contact ◽  
High Sensitivity ◽  
Xrd Analysis ◽  
Absolute Temperature ◽  
Lower Sensitivity ◽  
Readout Circuit ◽  
Sensing Element ◽  
High Performing

A SiC Schottky dual-diode temperature-sensing element, suitable for both complementary variation of VF with absolute temperature (CTAT) and differential proportional to absolute temperature (PTAT) sensors, is demonstrated over 60–700 K, currently the widest range reported. The structure’s layout places the two identical diodes in close, symmetrical proximity. A stable and high-barrier Schottky contact based on Ni, annealed at 750 °C, is used. XRD analysis evinced the even distribution of Ni2Si over the entire Schottky contact area. Forward measurements in the 60–700 K range indicate nearly identical characteristics for the dual-diodes, with only minor inhomogeneity. Our parallel diode (p-diode) model is used to parameterize experimental curves and evaluate sensing performances over this far-reaching domain. High sensitivity, upwards of 2.32 mV/K, is obtained, with satisfactory linearity (R2 reaching 99.80%) for the CTAT sensor, even down to 60 K. The PTAT differential version boasts increased linearity, up to 99.95%. The lower sensitivity is, in this case, compensated by using a high-performing, low-cost readout circuit, leading to a peak 14.91 mV/K, without influencing linearity.

Low-Cost $K$ -Band Patch Array Antenna for High-Sensitivity EM Sensor

2010 ◽  
Vol 9 ◽  
pp. 982-985 ◽  
Author(s):  
Young-Bae Jung ◽  
Jung Han Choi ◽  
Chang Won Jung
Keyword(s):  
Low Cost ◽  
High Sensitivity ◽  
Array Antenna

Highly sensitive detection of Cr(vi) in groundwater by bimetallic NiFe nanoparticles

2017 ◽  
Vol 9 (6) ◽  
pp. 1031-1037 ◽  
Author(s):  
Jingtao Liu ◽  
Yu Ding ◽  
Lifei Ji ◽  
Xin Zhang ◽  
Fengchun Yang ◽  
...  
Keyword(s):  
Heavy Metal ◽  
Hexavalent Chromium ◽  
Low Cost ◽  
High Sensitivity ◽  
Sensitive Detection ◽  
Toxic Heavy Metal ◽  
Metal Pollutants ◽  
Highly Sensitive ◽  
Highly Sensitive Detection ◽  
Heavy Metal Pollutants

Hexavalent chromium (Cr(vi)) is one of the most toxic heavy metal pollutants in groundwater, and thus the detection of Cr(vi) with high sensitivity, accuracy, and simplicity and low cost is of great importance.

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