LOW-FREQUENCY INDUCTIVE TRANSFORMER-TYPE DISCHARGE FOR LARGE-SCALE PLASMA PROCESSING
High Temperature Material Processes (An International Quarterly of High-Technology Plasma Processes)
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2014 ◽
Vol 18
(4)
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pp. 299-309
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2018 ◽
Vol 22
(6)
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pp. 3105-3124
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2015 ◽
Vol 567
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pp. 59-65
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