scholarly journals Getting Ready for Beyond-5G, Super-IoT and 6G at Hardware Passive Components Level – A Multi-State RF-MEMS Monolithic Step Attenuator Analyzed up to 60 GHz

2021 ◽  
Author(s):  
Jacopo Iannacci ◽  
Girolamo Tagliapietra
Keyword(s):  
Internet Of Things ◽  
Rf Mems ◽  
Simulated Data ◽  
60 Ghz ◽  
Rf Power ◽  
Passive Components ◽  
Electrostatically Actuated ◽  
Network Concept ◽  
Mems Technology ◽  
Resistive Loads

Abstract Looking at 2030, the landscape of technology will be dominated by paradigms like 6G, Super-IoT (Internet of Things) and Tactile Internet (TI). From the perspective of Hardware (HW) components technologies, the turning into reality of such scenarios will demand for a radical reconceptualization of devices, sub-systems and systems, probably modifying the concept of HW itself. Driven by the target of taking initial steps in the direction of such future applications, this work discusses a 4 bit RF power step attenuator entirely realized in RF-MEMS technology. Physical samples are fabricated in a surface micromachining technology and rely on electrostatically actuated cantilevered MEMS ohmic switches to select or short resistive loads placed along the RF line. Fabricated devices are tested and validated up to 30 GHz, while simulations are discussed up to 60 GHz for the full set of allowed configurations. Despite a few technology non-idealities, the network shows levels of attenuation with a flatness as good as 1 dB over 60 GHz frequency span. The measured and simulated data reported in this work offer important indications on how to improve the network concept, both at technology and design level.

scholarly journals RF-MEMS Monolithic K and Ka Band Multi-State Phase Shifters as Building Blocks for 5G and Internet of Things (IoT) Applications

Sensors ◽  
2020 ◽  
Vol 20 (9) ◽  
pp. 2612 ◽  
Author(s):  
Jacopo Iannacci ◽  
Giuseppe Resta ◽  
Alvise Bagolini ◽  
Flavio Giacomozzi ◽  
Elena Bochkova ◽  
...  
Keyword(s):  
Internet Of Things ◽  
Communication Systems ◽  
High Speed ◽  
Phase Shifter ◽  
Satellite Communication ◽  
Rf Mems ◽  
Building Blocks ◽  
Phase Shifters ◽  
Small Cells ◽  
Mems Technology

RF-MEMS, i.e., Micro-Electro-Mechanical Systems (MEMS) for Radio Frequency (RF) passive components, exhibit interesting characteristics for the upcoming 5G and Internet of Things (IoT) scenarios, in which reconfigurable broadband and frequency-agile devices, like high-order switching units, tunable filters, multi-state attenuators, and phase shifters will be necessary to enable mm-Wave services, small cells, and advanced beamforming. In particular, satellite communication systems providing high-speed Internet connectivity utilize the K and Ka bands, which offer larger bandwidth compared to lower frequencies. This paper focuses on two design concepts of multi-state phase shifter designed and manufactured in RF-MEMS technology. The networks feature 4 switchable stages (16 states) and are developed for the K and Ka bands. The proposed phase shifters are realized in a surface micromachining RF-MEMS technology and the experimentally measured parameters are compared with Finite Element Method (FEM) multi-physical electromechanical and RF simulations. The simulated phase shifts at both the operating bands fit well the measured value, despite the measured losses (S21) are larger than 5–7 dB if compared to simulations. However, such a non-ideality has a technological motivation that is explained in the paper and that will be fixed in the manufacturing of future devices.

scholarly journals A comprehensive overview of recent developments in RF-MEMS technology-based high-performance passive components for applications in the 5G and future telecommunications scenarios

2021 ◽  
Vol 34 (3) ◽  
pp. 333-366
Author(s):  
Girolamo Tagliapietra ◽  
Jacopo Iannacci
Keyword(s):  
High Performance ◽  
Microelectromechanical Systems ◽  
Rf Mems ◽  
Beam Steering ◽  
Multiple Input Multiple Output ◽  
Phase Shifters ◽  
Comprehensive Overview ◽  
Passive Components ◽  
High Data ◽  
Mems Technology

The goal of this work is to provide an overview about the current development of radio-frequency microelectromechanical systems technology, with special attention towards those passive components bearing significant application potential in the currently developing 5G paradigm. Due to the required capabilities of such communication standard in terms of high data rates, extended allocated spectrum, use of massive MIMO (Multiple- Input-Multiple-Output) systems, beam steering and beam forming, the focus will be on devices like switches, phase shifters, attenuators, filters, and their packaging/integration. For each of the previous topics, several valuable contributions appeared in the last decade, underlining the improvements produced in the state of the art and the chance for RFMEMS technology to play a prominent role in the actual implementation of the 5G infrastructure.

RF-MEMS Components and Networks for High-Performance Reconfigurable Telecommunication and Wireless Systems

2012 ◽  
Vol 81 ◽  
pp. 65-74 ◽  
Author(s):  
Jacopo Iannacci ◽  
Giuseppe Resta ◽  
Paola Farinelli ◽  
Roberto Sorrentino
Keyword(s):  
High Performance ◽  
Microelectromechanical Systems ◽  
Rf Mems ◽  
Low Cost ◽  
Impedance Matching ◽  
Phase Shifters ◽  
Rf Systems ◽  
Mems Technology ◽  
And Performance ◽  
Rf Performance

MEMS (MicroElectroMechanical-Systems) technology applied to the field of Radio Frequency systems (i.e. RF-MEMS) has emerged in the last 10-15 years as a valuable and viable solution to manufacture low-cost and very high-performance passive components, like variable capacitors, inductors and micro-relays, as well as complex networks, like tunable filters, reconfigurable impedance matching networks and phase shifters, and so on. The availability of such components and their integration within RF systems (e.g. radio transceivers, radars, satellites, etc.) enables boosting the characteristics and performance of telecommunication systems, addressing for instance a significant increase of their reconfigurability. The benefits resulting from the employment of RF-MEMS technology are paramount, being some of them the reduction of hardware redundancy and power consumption, along with the operability of the same RF system according to multiple standards. After framing more in detail the whole context of RF MEMS technology, this paper will provide a brief introduction on a typical RF-MEMS technology platform. Subsequently, some relevant examples of lumped RF MEMS passive elements and complex reconfigurable networks will be reported along with their measured RF performance and characteristics.

MEMS-Enabled Smart Beam-Steering Antennas

2014 ◽  
pp. 183-203
Author(s):  
Hadi Mirzajani ◽  
Habib Badri Ghavifekr ◽  
Esmaeil Najafi Aghdam
Keyword(s):  
Microelectromechanical Systems ◽  
Rf Mems ◽  
Beam Steering ◽  
Smart Antennas ◽  
Phase Shifters ◽  
Rapid Rate ◽  
Mems Devices ◽  
Batch Fabrication ◽  
Mems Technology ◽  
Smart Beam

In recent years, Microelectromechanical Systems (MEMS) technology has seen a rapid rate of evolution because of its great potential for advancing new products in a broad range of applications. The RF and microwave devices and components fabricated by this technology offer unsurpassed performance such as near-zero power consumption, high linearity, and cost effectiveness by batch fabrication in respect to their conventional counterparts. This chapter aims to give an in-depth overview of the most recently published methods of designing MEMS-based smart antennas. Before embarking into the different techniques of beam steering, the concept of smart antennas is introduced. Then, some fundamental concepts of MEMS technology such as micromachining technologies (bulk and surface micromachining) are briefly discussed. After that, a number of RF MEMS devices such as switches and phase shifters that have applications in beam steering antennas are introduced and their operating principals are completely explained. Finally, various configurations of MEMS-enabled beam steering antennas are discussed in detail.

Scope of RF MEMS Technology for Microwave Circuits and Systems

2021 ◽  
pp. 1-22
Author(s):  
Kanthamani Sundharajan
Keyword(s):  
Rf Mems ◽  
Low Cost ◽  
Microwave Circuits ◽  
Micro Electro Mechanical Systems ◽  
Mems Switches ◽  
Phased Array Antennas ◽  
Array Antennas ◽  
Rf Mems Switches ◽  
Mems Technology ◽  
Key Issues

Micro-electro mechanical systems (MEMS) technology has facilitated the need for innovative approaches in the design and development of miniaturized, effective, low-cost radio frequency (RF) microwave circuits and systems. This technology is expected to have significant role in today's 5G applications for the development of reconfigurable architectures. This chapter presents an overview of the evolution of MEMS-based subsystems and devices, especially switches and phased array antennas. This chapter also discusses the key issues in design and analysis of RF MEMS-based devices, particularly with primary emphasis on RF MEMS switches and antennas.

scholarly journals RF-MEMS switches with AlN dielectric and their applications

2011 ◽  
Vol 3 (5) ◽  
pp. 509-520 ◽  
Author(s):  
Montserrat Fernández-Bolaños Badía ◽  
Pierre Nicole ◽  
Adrian Mihai Ionescu
Keyword(s):  
Transmission Lines ◽  
Rf Mems ◽  
Beam Steering ◽  
Phase Shifters ◽  
Center Frequency ◽  
Mems Switches ◽  
Rf Mems Switches ◽  
Mems Technology ◽  
Bandwidth Tuning ◽  
Rf Performance

This paper reports on the potential of RF-MEMS technology based on aluminum nitride capacitive dielectric and nickel-suspended membranes to provide RF circuit functions in reconfigurable front-end radios. The RF performance of capacitive switches, distributed MEMS transmission lines (DMTLs) phase shifters for beam steering and tunable filters, including center frequency and bandwidth tuning of bandpass and band-stop filters are presented. Detailed characterization based on S-parameter data demonstrates very promising figures of merit of all fabricated demonstrators from 5 to 40 GHz.

Sign in / Sign up

Export Citation Format

Share Document