A Comparative Study of Spark Plasma and Conventional Sintering of Undoped SnO2 Sputtering Targets
Abstract SnO2 ceramics were fabricated by spark plasma sintering (SPS) and conventional (pressureless) sintering techniques by using undoped submicron SnO2 powders. The effect of sintering temperature and dwell time on the densification behavior, phase evolution and microstructural development of sintered ceramics were investigated. The relative density of SPSed ceramics increased when dwell time was raised from 1 to 10 min at 950ºC. However, full densification was prevented by the decomposition of SnO2 to Sn and O2(g). The decomposition starts after ~ 10 min at 950ºC. In parallel to this observations, as sintering temperature increases, amount of the elemental Sn in agglomerated form increases. On the other hand, the relative densities of conventionally sintered ceramics (at 1200ºC-1400ºC) were relatively low (i.e., 63 % relative density), and abnormal grain growth was observed due to the shift in sintering mechanisms to evaporation-condensation as a dominant mechanism. Since the undoped SnO2 ceramics, SPSed at 950°C for 5 min under 30 MPa exhibit 93 % relative density, high chemical purity, homogeneous grain size distribution and smaller average grain size, they demonstrate great potential as sputtering targets for production of high-quality thin film gas sensors.