scholarly journals A pilot plant study using ceramic membrane microfiltration, carbon adsorption and reverse osmosis to treat CMP (chemical mechanical polishing) wastewater

2004 ◽  
Vol 4 (1) ◽  
pp. 111-118 ◽  
Author(s):  
R. Lo ◽  
S.-L. Lo
Keyword(s):  
Reverse Osmosis ◽  
Chemical Mechanical Polishing ◽  
Pilot Plant ◽  
Treatment Process ◽  
Ceramic Membrane ◽  
Scale Up ◽  
Mechanical Polishing ◽  
Chemical Coagulation ◽  
Sedimentation Process ◽  
Carbon Adsorption

Currently, most semi-conductor plants adopt the conventional chemical coagulation and sedimentation process to treat chemical mechanical polishing (CMP) wastewater. This treatment process consumes a large quantity of coagulants, and its optimum pH operation range is rather narrow. This treatment process produces huge amounts of sludge and is hard to operate due to the unstable characteristics of the abrasive slurry of CMP wastewater. The purpose of this research is to establish a pilot plant which consists of chemical pretreatment, ceramic membrane microfiltration, carbon filtration and reverse osmosis system, which will allow the reclamation of the CMP wastewater. Actual CMP wastewater was sampled and treated in the pilot plant. The results of the pilot tests demonstrated the viability of the treatment scheme and provided data for scale-up calculations. Cost per ton of CMP wastewater reclaimed was calculated using the operating data established, and compared with the conventional chemical coagulation and sedimentation process.

Treatment of Chemical Mechanical Polishing Wastewater for Water Reuse by Ultrafiltration and Reverse Osmosis Separation

2008 ◽  
Vol 25 (7) ◽  
pp. 1091-1098 ◽  
Author(s):  
Lain-Chuen Juang ◽  
Dyi-Hwa Tseng ◽  
He-Yin Lin ◽  
Chung-Kung Lee ◽  
Teh-Ming Liang
Keyword(s):  
Reverse Osmosis ◽  
Chemical Mechanical Polishing ◽  
Water Reuse ◽  
Mechanical Polishing

Ozone enhanced ceramic membrane filtration for wastewater recycling

2019 ◽  
Vol 14 (2) ◽  
pp. 331-340
Author(s):  
P. Spencer ◽  
S. Domingos ◽  
B. Edwards ◽  
D. Howes ◽  
H. Shorney-Darby ◽  
...  
Keyword(s):  
Reverse Osmosis ◽  
Pilot Plant ◽  
Membrane Filtration ◽  
Ceramic Membrane ◽  
Treatment Plant ◽  
Ceramic Membranes ◽  
Treated Wastewater ◽  
Wastewater Recycling ◽  
Pre Treatment ◽  
Uf Membranes

Abstract The Water Corporation of Western Australia uses polymeric ultrafiltration (UF) membranes across a range of applications including surface waters with high natural organic matter (NOM), recycling of secondary treated wastewater and pre-treatment for seawater reverse osmosis (SWRO). These challenging raw water conditions require expensive chemical dosing and clean-in-place (CIP) regimes, high frequency of membrane replacement and reduced membrane life. The greater durability of ceramic membranes, with optimal ozone and coagulant dosing, offer a potential capital and operating advantage over polymeric UF membranes. The Water Corporation collaborated with PWN Technologies (PWNT) to establish a ceramic membrane pilot plant at the Beenyup Wastewater Treatment Plant (WWTP). Optimised performance of the pilot plant was established and compared with existing UF membranes treating secondary treated wastewater prior to reverse osmosis (RO) in an indirect potable wastewater recycling application. Findings show a sustainable flux rate of 150 L/m2/h is achievable with ceramic MF membranes while filtering secondary treated wastewater. Higher flux rates up to 250 L/m2/h have been tested and are possibly sustainable, however, other bottlenecks in the pilot plant (ozone generator capacity) prevented longer test runs at this flux. Comparable design flux rates for polymeric UF membranes are 50 L/m2/h.

PEMODELAN MATEMATIS ADSORPSI CO2 DENGAN STRONG BASE ANION EXCHANGE RESIN SEBAGAI ADSORBEN UNTUK PURIFIKASI BIOGAS

2015 ◽  
Vol 5 (1) ◽  
pp. 11
Author(s):  
Anies Mutiari ◽  
Wiratni Wiratni ◽  
Aswati Mindaryani
Keyword(s):  
Anion Exchange ◽  
Pilot Plant ◽  
Exchange Resin ◽  
Anion Exchange Resin ◽  
Scale Up ◽  
Sum Of Squares ◽  
Strong Base ◽  
Model Transfer ◽  
Plant Parameter

Pemurnian biogas telah banyak dilakukan untuk menghilangkan kadar CO2  dan meningkatkan kandungan CH4  yang terkandung di dalamnya. Kandungan CH4 yang tinggi akan memberikan unjuk kerja yang lebih baik. Model  matematis proses adsorpsi CO2 disusun berdasarkan teori lapisan film antar fasa, dimana pada proses yang ditinjau terdapat tiga fase yaitu gas, cair dan padat. Model matematis dari data eksperimental   kecepatan dan kesetimbangan proses adsorpsi CO2 melalui mekanisme pertukaran ion di suatu kolom adsorpsi telah dibuat. Model ini dibuat untuk mencari konstanta yang dapat dipergunakan pada proses scale up data laboratorium ke skala pilot plant. Parameter proses kecepatan yang dicari nilainya adalah koefisien transfer massa massa volumetris CO2 pada fase cair (kLa), koefisien transfer massa volumetris CO2 pada fasegas (kGa) dan tetapan laju reaksi (k1 dan k2). Pada hasil penelitian ini ditunjukkan bahwa nilai parameter yang diperoleh sesuai hasil fitting data dengan model matematis yang digunakan, yaitu model transfer massa pada lapisan film antar fase secara seri: adalah kGa, kla, k1 dan k2  dengan nilai Sum of Squares Error (SSE) rata-rata 0,0431. Perbandingan nilai kGa hasil simulasi dan teoritisnya memberikan kesalahan rata-rata 18,79%. Perbandingan nilai kLa hasil simulasi dan teoritis memberikan kesalahan rata-rata 7,92%.Kata kunci: model matematis, adsorpsi CO2, pemurnian biogas

Removal of Residual Nutrients and Chemical Additives From Secondary Sewage by Reverse osmosis

1975 ◽  
Vol 10 (1) ◽  
pp. 101-109
Author(s):  
H. Kirk Johnston ◽  
H.S. Lim
Keyword(s):  
Reverse Osmosis ◽  
Membrane Fouling ◽  
Pilot Plant ◽  
Waste Treatment ◽  
Iron Chloride ◽  
Treatment Technique ◽  
Chemical Additives ◽  
Cellulose Acetate Membranes ◽  
Municipal Wastewaters ◽  
Nutrient Solutions

Abstract The suitability of reverse osmosis as a renovation technique for the treatment of municipal wastewaters has been assessed. Cellulose acetate membranes capable of 70% and 90% NaCl rejections were employed in both laboratory and pilot plant studies to evaluate the efficiency of this technique in removing the residual precipitant chemicals generally employed in phosphorus removal programs (iron chloride, alum, and lime) and the nutrients (phosphates, nitrates and ammonia) characteristic of municipal wastewaters. Secondary sewage and raw sewage as well as prepared nutrient solutions were employed in the course of this program. Both laboratory and pilot plant studies indicated consistently outstanding removal efficiencies for the species examined, almost independent of the nature of the waste solutions being treated. Permeation of the purified effluent was subject to significant reductions due to membrane fouling. This characteristic was most pronounced for the more permeable (less selective) membranes. Routine chemical and physical cleanings enable satisfactory flux levels to be maintained, thereby suggesting that reverse osmosis may become a viable municipal waste treatment technique.

scholarly journals Kinematic Prediction and Experimental Demonstration of Conditioning Process for Controlling the Profile Shape of a Chemical Mechanical Polishing Pad

2021 ◽  
Vol 11 (10) ◽  
pp. 4358
Author(s):  
Hanchul Cho ◽  
Taekyung Lee ◽  
Doyeon Kim ◽  
Hyoungjae Kim
Keyword(s):  
Chemical Mechanical Polishing ◽  
Mechanical Polishing ◽  
Shape Error ◽  
Profile Shape ◽  
Conditioning Process ◽  
Polishing Pad ◽  
Simulation Based ◽  
Diamond Conditioner ◽  
Pad Conditioning ◽  
Good Agreement

The uniformity of the wafer in a chemical mechanical polishing (CMP) process is vital to the ultra-fine and high integration of semiconductor structures. In particular, the uniformity of the polishing pad corresponding to the tool directly affects the polishing uniformity and wafer shape. In this study, the profile shape of a CMP pad was predicted through a kinematic simulation based on the trajectory density of the diamond abrasives of the diamond conditioner disc. The kinematic prediction was found to be in good agreement with the experimentally measured pad profile shape. Based on this, the shape error of the pad could be maintained within 10 μm even after performing the pad conditioning process for more than 2 h, through the overhang of the conditioner.

scholarly journals Non-spherical abrasives with ordered mesoporous structures for chemical mechanical polishing

2021 ◽  
Author(s):  
Peili Gao ◽  
Tingting Liu ◽  
Zhenyu Zhang ◽  
Fanning Meng ◽  
Run-Ping Ye ◽  
...  
Keyword(s):  
Chemical Mechanical Polishing ◽  
Mechanical Polishing ◽  
Ordered Mesoporous ◽  
Mesoporous Structures
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