Экспериментальные исследования модификации характеристик GaAs-структур с контактами Шоттки после воздействия быстрых нейтронов
Keyword(s):
The electrophysical parameters and surface morphology of GaAs n/n- structures with Schottky contacts before and after neuron impact with an average energy of about 1 MeV were studied. Changes in the profiles of the concentration and mobility of electrons in the structures were determined by the C-V method measurements. The method of atomic force microscopy helped to find radiation defect clusters which appearing during impact. A complex approach to the determination of their parameters is proposed.