Rapid, semi-quantitative depth profiling of ultra-thin films using plasma profiling time-of-flight mass spectrometry

Author(s):  
Yann Mazel ◽  
Jean-Paul Barnes ◽  
Emmanuel Nolot ◽  
Agnes Tempez ◽  
Sebastien Legendre
2020 ◽  
Vol 35 (8) ◽  
pp. 1587-1596
Author(s):  
Anna Gubal ◽  
Victoria Chuchina ◽  
Yegor Lyalkin ◽  
Vladimir Mikhailovskii ◽  
Viktor Yakobson ◽  
...  

A combined hollow cathode microsecond direct current pulsed glow discharge time-of-flight mass spectrometry system has proved its efficiency for quantification; however, it has not been properly tested for the purpose of depth analysis.


2015 ◽  
Vol 17 (14) ◽  
pp. 9173-9185 ◽  
Author(s):  
E. T. Jensen

Photochemical processes for CH3X (X = Cl, Br, I) adsorbed on top of thin films of D2O or CH3OH on a Cu(110) substrate is studied by time-of-flight mass spectrometry for a range of UV wavelengths (351–193 nm).


2019 ◽  
Vol 9 (1) ◽  
Author(s):  
Ravi Mawale ◽  
Govinda Mandal ◽  
Marek Bouška ◽  
Jan Gutwirth ◽  
Pankaj Lochan Bora ◽  
...  

AbstractThe Ge-Bi-Se thin films of varied compositions (Ge content 0–32.1 at. %, Bi content 0–45.7 at. %, Se content 54.3–67.9 at. %) have been prepared by rf magnetron (co)-sputtering technique. The present study was undertaken in order to investigate the clusters generated during the interaction of laser pulses with Ge-Bi-Se thin films using laser ablation time-of-flight mass spectrometry. The stoichiometry of the clusters was determined in order to understand the individual species present in the plasma plume. Laser ablation of Ge-Bi-Se thin films accompanied by ionization produces about 20 positively and/or negatively charged unary, binary and ternary (Gex+, Biy+, Sez+/−, GexSez+/−, BiySez+/− and GexBiySez−) clusters. Furthermore, we performed the laser ablation experiments of Ge:Bi:Se elemental mixtures and the results were compared with laser ablation time-of-flight mass spectrometry analysis of thin films. Moreover, to understand the geometry of the generated clusters, we calculated structures of some selected binary and ternary clusters using density functional theory. The generated clusters and their calculated possible geometries can give important structural information, as well as help to understand the processes present in the plasma processes exploited for thin films deposition.


2017 ◽  
Vol 32 (10) ◽  
pp. 1878-1884 ◽  
Author(s):  
Zhibin Yin ◽  
Xiaoling Cheng ◽  
Rong Liu ◽  
Wei Hang ◽  
Benli Huang

A laser desorption and laser postionization time-of-flight mass spectrometer was employed for the depth profiling of nanometer thin-layers.


2017 ◽  
Vol 49 (10) ◽  
pp. 1049-1052
Author(s):  
Yu Kudriavtsev ◽  
A.G. Hernández ◽  
R. Asomoza ◽  
V.M. Korol

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