Impact of total and partial dipole switching on the switching slope of gate-last negative capacitance FETs with ferroelectric hafnium zirconium oxide gate stack

Author(s):  
P. Sharma ◽  
K. Tapily ◽  
A. K. Saha ◽  
J. Zhang ◽  
A. Shaughnessy ◽  
...  
2020 ◽  
Vol 41 (1) ◽  
pp. 179-182 ◽  
Author(s):  
Daewoong Kwon ◽  
Suraj Cheema ◽  
Yen-Kai Lin ◽  
Yu-Hung Liao ◽  
Korok Chatterjee ◽  
...  

2019 ◽  
Vol 7 ◽  
pp. 645-649
Author(s):  
Yuh-Chen Lin ◽  
Felicia McGuire ◽  
Steven Noyce ◽  
Nicholas Williams ◽  
Zhihui Cheng ◽  
...  

2021 ◽  
Vol 42 (3) ◽  
pp. 355-358
Author(s):  
Fangzhou Yu ◽  
Wen-Chiang Hong ◽  
Guangyuan Li ◽  
Yuxuan Li ◽  
Ming Lu ◽  
...  

2021 ◽  
Author(s):  
Shih-En Huang ◽  
Pin Su ◽  
Chenming Hu

<div>In this work, we report that the AFE/FE gate-stack can be utilized to engineer the S-curve for boosting the I<sub>ON</sub> of NC-FinFET. By using a short-channel BSIM-CMG compatible AFE/FE stack NC-FinFET model, the capacitance matching and ON-state performance for AFE/FE stack NC-FinFETs are investigated. Our study indicates that, the AFE/FE gate-stack can be used to improve the capacitance matching in strong inversion at higher gate-bias. Therefore, impressively higher ON-state current (compared to single-layer) can be achieved. In reality, source-drain series resistance will make such high IDS impractical. The more likely strategy is to use lower V<sub>DD</sub> to achieve much lower power consumption (and reduced vertical fields). While the transient NC effect also needs to be carefully investigated, this study suggests significant long term benefits to V<sub>DD</sub> scaling if materials with certain AFE and FE properties are developed and introduced in IC manufacturing in the future.</div>


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