scholarly journals Effect of the substrate temperature and bias voltage on the properties of ZrO2/Al2O3 coatings produced by pulsed magnetron sputtering and filtered vacuum arc deposition

2016 ◽  
Vol 1 (1) ◽  
Author(s):  
I. Zukerman ◽  
Keyword(s):  
Magnetron Sputtering ◽  
Substrate Temperature ◽  
Bias Voltage ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Arc Deposition ◽  
Pulsed Magnetron

Influence of Bias Voltage on the Structural Properties and Adhesive Performance of ZnO Thin Films Deposited by Cathodic Vacuum Arc Deposition on Polyimide Foil Substrates

2010 ◽  
Vol 160-162 ◽  
pp. 194-199 ◽  
Author(s):  
Chang Ji Hu ◽  
Zhen Hui He
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Interfacial Shear Strength ◽  
Interfacial Shear ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Zno Thin Film ◽  
Vacuum Arc Deposition ◽  
Polyimide Foil ◽  
Arc Deposition

ZnO thin films were deposited on polyimide foil substrates using cathodic vacuum arc deposition technique. X-ray diffraction was used to investigate the influence of bias voltage on the structure of ZnO thin films. The results show that all the samples have (002) preferred orientation. The internal stress of the films is compressive stress which increases with the bias voltage. Fragmentation test shows that the intrinsic interfacial shear strength of ZnO thin film without bias voltage is slightly lower than the shear yield strength of polyimide substrate; the intrinsic interfacial shear strength of ZnO thin film increases with the bias voltage from -50V to -200V, which indicates that bias voltage is beneficial to the enhancement of the adhesion between ZnO films and polyimide substrates. Further increase of the bias voltage to -300V leads to surface damage of the polyimide substrates.

Studying Effects of Bias Voltage on Properties, Wettability and Platelet Adhered Behavior of DLC Films Prepared By DC-MFCVAD

2007 ◽  
Vol 353-358 ◽  
pp. 2203-2206
Author(s):  
Feng Wen ◽  
Nan Huang ◽  
Yong Xiang Leng ◽  
Zhi Li ◽  
Yang Cao
Keyword(s):  
Bias Voltage ◽  
Biomedical Applications ◽  
Vacuum Arc ◽  
X Ray ◽  
Magnetic Filter ◽  
Angle Measurements ◽  
Contact Angle Measurements ◽  
Vacuum Arc Deposition ◽  
Scratch Tests ◽  
Arc Deposition

Diamond-Like carbon (DLC) films were prepared under different bias voltage by direct current magnetic filter cathode vacuum arc deposition (DC-MFCVAD). Bias voltages changed from 0 to -200 V. The study intends to investigate the effect on the properties of DLC films for biomedical applications. X-ray photoelectron spectrum (XPS) was used to investigate composition of the films. Nano-scratch tests were used to characterize effects of bias voltage to adhesion. Furthermore, the wettability of the DLC films was investigated by contact angle measurements using four common liquids. Finally, platelet adhesion experiments were done to evaluate the interaction of blood with DLC films. The results showed that the adhesion, wettability and hemo-compatibility of DLC films were affected by bias voltage.

Influence of bias voltage on morphology and structure of MgO thin films prepared by cathodic vacuum arc deposition

2006 ◽  
Vol 201 (6) ◽  
pp. 2387-2391 ◽  
Author(s):  
Daoyun Zhu ◽  
Changxi Zheng ◽  
Yi Liu ◽  
Dihu Chen ◽  
Zhenhui He ◽  
...  
Keyword(s):  
Thin Films ◽  
Bias Voltage ◽  
Vacuum Arc ◽  
Morphology And Structure ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Preparation of TiC and TiC/DLC Multilayers by Metal Plasma Immersion Ion Implantation and Deposition: Relationship between Composition, Microstructure and Wear Properties

1996 ◽  
Vol 438 ◽  
Author(s):  
M. P. Delplancke-Ogletree ◽  
O. R. Monteiro ◽  
I. G. Brown
Keyword(s):  
Bias Voltage ◽  
Plasma Source ◽  
Vacuum Arc ◽  
Wear Properties ◽  
Plasma Gun ◽  
Vacuum Arc Deposition ◽  
Set Up ◽  
The Individual ◽  
Arc Deposition ◽  
Deposited Films

AbstractWe have used pulsed vacuum arc deposition to prepare TixCy films and multilayer structures of TixCy / diamondlike carbon (DLC) in a dual plasma source set-up. The composition of the monolithic films was controlled by varying the pulse duration of each plasma gun. During the deposition, a repetitively pulsed bias voltage was applied to the substrate in order to improve the adhesion to the substrate and between the individual layers. For the multilayers, the carbon and Ti guns were synchronously pulsed during deposition of the TixCy, and the Ti gun was not operated during the DLC deposition. Multilayers with different periodicities were synthesized. The deposited films were analyzed by various techniques including XPS, AES, TEM, EELS, and XRD to characterize the composition, bonding states, and microstructure. Special attention was given to the interface thickness in relation to the applied bias voltage. Tribological properties such as friction coefficient and wear resistance were measured, and correlated to the composition and microstructure of the films.

Effect of the Bias Voltage on the Structure, Mechanical, Electronic and Optical Properties of the Low Temperature ZnO Thin Films Deposited by Using Cathodic Vacuum Arc Deposition System on Plastic Substrates

2013 ◽  
Vol 773-774 ◽  
pp. 287-292
Author(s):  
Ru Yuan Yang ◽  
Cheng Tang Pan ◽  
Chien Wei Huang
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Bias Voltage ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Substrate Bias ◽  
Substrate Bias Voltage ◽  
Plastic Substrates ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

The un-doped zinc oxide (ZnO) films on the polyethylene terephthalate (PET) substrate at a low temperature (<75°C) by using cathode vacuum arc deposition (CVAD) system with different negative substrate bias voltage applied between 0 and -100 V. The material, mechanical, optical and electrical properties were investigated and discussed. The results show that all ZnO thin films have (002) preferred orientation, an average transmittance was over than 70 % in the visible region. Calculated band gap values are all around 3.2 eV with the different substrate bias voltages. The ZnO thin films with resistivities as low as 10-3Ω*cm have been obtained by adjusting the substrate bias voltage on the plastic substrates.

scholarly journals Filtered cathodic vacuum arc deposition (FCVAD) technology as method for creation of nanostructured multicomponent modifying coatings for wide application range

Procedia CIRP ◽  
2020 ◽  
Vol 95 ◽  
pp. 999-1003
Author(s):  
Alexey Vereschaka ◽  
Marina Volosova ◽  
Nikolay Sitnikov ◽  
Nikolay Andreev ◽  
Filipp Milovich ◽  
...  
Keyword(s):  
Vacuum Arc ◽  
Application Range ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition

Vacuum arc deposition of thin films from an LaB6 cathode

1996 ◽  
Vol 82 (3) ◽  
pp. 247-253 ◽  
Author(s):  
S. Schmidbauer ◽  
H. Klose ◽  
A. Ehrlich ◽  
M. Friedrich ◽  
M. Röder ◽  
...  
Keyword(s):  
Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Arc Deposition

Hemocompatibility of ZnO thin films prepared by filtered cathodic vacuum arc deposition

Vacuum ◽  
2013 ◽  
Vol 89 ◽  
pp. 220-224 ◽  
Author(s):  
Zhanyun Huang ◽  
Ping Luo ◽  
Wanzong Chen ◽  
Shirong Pan ◽  
Dihu Chen
Keyword(s):  
Thin Films ◽  
Zno Thin Films ◽  
Vacuum Arc ◽  
Vacuum Arc Deposition ◽  
Filtered Cathodic Vacuum Arc ◽  
Arc Deposition
Sign in / Sign up

Export Citation Format

Share Document