Influence of electrodeposition parameters on structure and micromechanical properties of thin Ni–Fe films
The correlation between the synthesis modes, chemical composition, crystal structure, surface microstructure, and also the mechanical properties of thin nanostructured Ni – Fe films has been studied. Thin Ni–Fe films on the Si with Au sublayer were obtained using electrolyte deposition with different current modes: direct current and three pulsed modes with pulse duration of 1 s, 10–3 and 10–5 s. It is shown that a decrease in the pulse duration to 10–5 s leads to an increase in the film elastic modulus and the hardness due to the small grain size and a large number of grain boundaries with increased resistance to plastic deformation. The effect of heat treatment at 100, 200, 300, and 400 °C on the surface microstructure and micromechanical properties of the films was investigated. An increase in grain size from 6 to 200 nm was found after heat treatment at 400 °C which, in combination with interfusion processes of the half-layer material, led to a significant decrease in hardness and elastic modulus. Ni–Fe films with improved mechanical properties can be used as coatings for microelectronic body for their electromagnetic protection.