scholarly journals Wafer Pattern Recognition for Detecting Process Abnormalities in NAND Flash Memory Manufacturing

Author(s):  
Jeongin Choe ◽  
Taehyeon Kim ◽  
Saetbyeol Yoon ◽  
Sangyong Yoon ◽  
Ki-Whan Song ◽  
...  

Abstract We have adopted various defect detection systems in the front stage of manufacturing in order to effectively manage the quality of flash memory products. In this paper, we propose an intelligent pattern recognition methodology which enables us to discriminate abnormal wafer automatically in the course of NAND flash memory manufacturing. Our proposed technique consists of the two steps: pre-processing and hybrid clustering. The pre-processing step based on process primitives efficiently eliminates noisy data. Then, the hybrid clustering step dramatically reduces the total amount of computing, which makes our technique practical for the mass production of NAND flash memory.

Author(s):  
Bong Tae Park ◽  
Jai Song ◽  
Eun Suk Cho ◽  
Seung Wan Hong ◽  
Jae Youn Kim ◽  
...  

2012 ◽  
Vol E95.C (5) ◽  
pp. 837-841 ◽  
Author(s):  
Se Hwan PARK ◽  
Yoon KIM ◽  
Wandong KIM ◽  
Joo Yun SEO ◽  
Hyungjin KIM ◽  
...  

Micromachines ◽  
2021 ◽  
Vol 12 (8) ◽  
pp. 879
Author(s):  
Ruiquan He ◽  
Haihua Hu ◽  
Chunru Xiong ◽  
Guojun Han

The multilevel per cell technology and continued scaling down process technology significantly improves the storage density of NAND flash memory but also brings about a challenge in that data reliability degrades due to the serious noise. To ensure the data reliability, many noise mitigation technologies have been proposed. However, they only mitigate one of the noises of the NAND flash memory channel. In this paper, we consider all the main noises and present a novel neural network-assisted error correction (ANNAEC) scheme to increase the reliability of multi-level cell (MLC) NAND flash memory. To avoid using retention time as an input parameter of the neural network, we propose a relative log-likelihood ratio (LLR) to estimate the actual LLR. Then, we transform the bit detection into a clustering problem and propose to employ a neural network to learn the error characteristics of the NAND flash memory channel. Therefore, the trained neural network has optimized performances of bit error detection. Simulation results show that our proposed scheme can significantly improve the performance of the bit error detection and increase the endurance of NAND flash memory.


Author(s):  
Ting Cheng ◽  
Jianquan Jia ◽  
Lei Jin ◽  
Xinlei Jia ◽  
Shiyu Xia ◽  
...  

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