scholarly journals INCREASING THE RANGE OF MEASUREMENTS OF PROFILE HEIGHT IN THE INTERFERENCE PROFILOMETER

2019 ◽  
Vol 8 ◽  
pp. 160-167
Author(s):  
Ignat Vykhristyuk ◽  
Rodion Kulikov ◽  
Evgeny Sysoev
Keyword(s):  
Surface Profile ◽  
Measurement Range ◽  
Light Sources ◽  
Profile Height

Methods for increasing the measurement range of the height of surface profile by the interference profilometer are proposed. The methods are based on using of multiple light sources with different wavelengths. It was shown experimentally that the measurement range increased at least 5 times due to using of two wavelengths, and at least 7 times due to using three wavelengths, while maintaining the resolution of the measurements.

A Two-Dimensional Surface Profile Imaging Technique Based on Heterodyne Interferometer

2005 ◽  
Vol 295-296 ◽  
pp. 477-482
Author(s):  
K.W. Wang ◽  
Z.J. Cai ◽  
Li Jiang Zeng
Keyword(s):  
High Speed ◽  
Imaging Technique ◽  
Surface Profile ◽  
Ccd Camera ◽  
Measurement Range ◽  
Interference Signal ◽  
Two Dimensional ◽  
Step Method ◽  
Heterodyne Interferometer ◽  
Dimensional Surface

A two-dimensional surface profile imaging technique based on heterodyne interferometer is proposed. A piezo translator vibrated grating is used to generate a heterodyne signal. A high speed CCD camera is used to extract the interference signal using a five step method. The uncertainty in the displacement measurement is approximately 0.035 µm within a measurement range of 1.7 µm, confirming the two dimensional heterodyne interferometer is valid for measuring the surface profile. The method is also available for low coherence heterodyne interferometer due to the optical frequency shifts caused by the vibration of grating independent on the wavelength.

Profile Measurement by Using a Femtosecond Laser Chromatic Confocal Probe

2020 ◽  
Author(s):  
Ryo Sato ◽  
Yuki Shimizu ◽  
Hiraku Matsukuma ◽  
Wei Gao
Keyword(s):  
Thermal Stability ◽  
Femtosecond Laser ◽  
Surface Profile ◽  
Sample Surface ◽  
Measurement Range ◽  
Laser Source ◽  
Profile Measurement ◽  
Experimental Setup ◽  
Chromatic Confocal Probe ◽  
Surface Profile Measurement

Abstract Confocal probes are widely employed in many industrial fields due to the depth-sectioning effect. The author’s group has also proposed a chromatic confocal probe employing a mode-locked femtosecond laser source which can realize an axial resolution of 30 nm and a measurement range of 40 μm Efforts have also been made to improve the thermal stability of the developed femtosecond laser chromatic confocal probe so that the probe can be applied for long-term displacement measurement or surface profile measurement. Meanwhile, surface profile measurement has not been carried out by using the developed femtosecond laser chromatic confocal probe. For the verification of the performance of developed probe in profile measurement, in this paper, an experimental setup is built and a basic experiment is carried out. By using the probe with further improved thermal stability, the measurement of a sample surface profile is carried out. In this paper, the development of the experimental setup with the femtosecond laser chromatic confocal probe, as well as the results of the surface profile measurements, is presented.

On the relationships between surface profile height parameters

Wear ◽  
1982 ◽  
Vol 83 (1) ◽  
pp. 91-108 ◽  
Author(s):  
T.G. King ◽  
T.A. Spedding
Keyword(s):  
Surface Profile ◽  
Profile Height

scholarly journals Optimizing Sampling Parameters of CMM Data Acquisition for Machining Error Correction of Freeform Surfaces

2018 ◽  
Vol 12 (4) ◽  
pp. 265-269
Author(s):  
Małgorzata Poniatowska
Keyword(s):  
Error Correction ◽  
Surface Profile ◽  
Optimal Combination ◽  
Freeform Surface ◽  
Geometrical Parameters ◽  
Machining Parameters ◽  
Machining Error ◽  
Surface Mapping ◽  
Control Factors ◽  
Profile Height

Abstract An optimization study using the design of experiment technique is described, in which the surface profile height of a freeform surface, determined in coordinate measurements, is the response variable. The control factors are coordinate sampling parameters, i.e. the sampling grid size and the measuring tip diameter. As a result of the research, an optimal combination of these parameters was found for surface mapping with acceptable measurement uncertainty. The presented study is the first stage of optimization of machining error correction for the freeform surface and was intended to take into account mechanical-geometric filtration of surface irregularities caused by these geometrical parameters. The tests were carried out on a freeform workpiece milled with specific machining parameters, Ra of the surface roughness was 1.62 μm. The search for the optimal combination of parameters was conducted using Statistica software.

scholarly journals Measurement Range Expansion of Chromatic Confocal Probe with Supercontinuum Light Source

2021 ◽  
Vol 15 (4) ◽  
pp. 529-536
Author(s):  
Hiraku Matsukuma ◽  
◽  
Ryo Sato ◽  
Yuki Shimizu ◽  
Wei Gao
Keyword(s):  
Light Source ◽  
Range Expansion ◽  
Wide Spectrum ◽  
Surface Profile ◽  
Measurement Range ◽  
Detection Sensitivity ◽  
Laser Source ◽  
Supercontinuum Light Source ◽  
Chromatic Confocal Probe ◽  
Measurable Range

Confocal probes have been widely adopted in various industries owing to their depth-sectioning effects. A dual-detector differential chromatic confocal probe using a mode-locked femtosecond laser source is proposed herein, and the measurement range expansion of the probe using a supercontinuum light source is discussed. Supercontinuum light has an extremely wide spectrum. A simulation based on wave optics is performed to evaluate the detection sensitivity and measurable range by considering the chromatic aberration of the lens materials. Additionally, an experimental setup is constructed using a supercontinuum light source, and its feasibility is validated. A measurable range of 200 μm is adopted in the experiment, and three-dimensional surface profile measurements are performed. However, the developed confocal probe has not been used for surface topography measurements. Experiments are conducted to verify the performance of the developed probe.

Dual differential confocal method for surface profile measurement with a large sensing measurement range

2020 ◽  
Vol 59 (3) ◽  
pp. 614
Author(s):  
Rongjun Shao ◽  
Weiqian Zhao ◽  
Lirong Qiu ◽  
Yun Wang ◽  
Ruirui Zhang ◽  
...  
Keyword(s):  
Surface Profile ◽  
Measurement Range ◽  
Profile Measurement ◽  
Surface Profile Measurement

Multi-parameter identification of gratings measurement by Experimental Ray Tracing

2021 ◽  
Vol 21 (11) ◽  
pp. 283
Author(s):  
Li-Si Chen ◽  
Zhong-Wen Hu ◽  
Hai-Jiao Jiang ◽  
Hui-Min Kang ◽  
Chen-Zhong Wang
Keyword(s):  
Monte Carlo ◽  
Ray Tracing ◽  
Surface Profile ◽  
Measurement Range ◽  
High Accuracy ◽  
Simple Method ◽  
Error Sources ◽  
Rotary Stage ◽  
The Monte Carlo Method ◽  
Position And Orientation

Abstract A simple method for measuring grating groove density as well as its position and orientation is proposed based on the idea of ERT (Experimental Ray Tracing). Conventional methods only measure grating groove density with accuracy limited by its rotary stage and goniometer. The method proposed in the paper utilizes linear guides which could be calibrated to much higher accuracy. It is applicable to gratings of arbitrary surface profile or mosaic of a group of various gratings. Various measurement error sources are simulated by the Monte Carlo method and the results show high accuracy capability of grating parameters identification. A verification testing is performed. The accuracy dependency on main configuration parameters is evaluated. A method to expand measurement range by double wavelength is also discussed.

scholarly journals Logarithmic Strain Model for Nonlinear Load Cell

Sensors ◽  
2019 ◽  
Vol 19 (16) ◽  
pp. 3486
Author(s):  
Young-Dae Hong ◽  
Bumjoo Lee
Keyword(s):  
Force Measurement ◽  
Contact Point ◽  
Surface Profile ◽  
Strain Curve ◽  
Measurement Range ◽  
Load Cell ◽  
Measurement Unit ◽  
Design Parameters ◽  
Nonlinear Load ◽  
Force Range

General load cells have typically constant sensitivity throughout the measurement range, which is acceptable for common force measurement systems. However, it is not adequate for high-performance control and high-stroke applications such as robotic systems. It is required to have a higher sensitivity in a small force range than that in a large force range. In contrast, for large loading force, it is more important to increase the measurement range than the sensitivity. To cope with these characteristics, the strain curve versus the force measurement should be derived as a logarithmic graph. To implement this nonlinear nature, the proposed load cell is composed of two mechanical components: an activator, which has a curved surface profile to translocate the contact point, and a linear torque measurement unit with a moment lever to measure the loading force. To approximate the logarithmic deformation, the curvature of the activator was designed by an exponential function. Subsequent design parameters were optimized by an evolutionary computation.

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