scholarly journals High-resolution characterization of TiN diffusion barrier layers

Author(s):  
Marlene Mühlbacher ◽  
1995 ◽  
Vol 91 (1-4) ◽  
pp. 291-294 ◽  
Author(s):  
C. Kaufmann ◽  
J. Baumann ◽  
T. Gessner ◽  
T. Raschke ◽  
M. Rennau ◽  
...  

2001 ◽  
Vol 45 (7) ◽  
pp. 1183-1187
Author(s):  
Wan-rong Zhang ◽  
Zhi-guo Li ◽  
Fu-chen Mu ◽  
Ying-hua Sun ◽  
Yao-hai Cheng ◽  
...  

1995 ◽  
Vol 391 ◽  
Author(s):  
G. B. ALERS ◽  
A. S. OATES ◽  
N.L. BEVERLY

AbstractWe have examined small changes in the resistance of a single aluminum via test structure with a resolution of 10-8 ohms. The via is roughly one cubic micron and contains a well defined TiN diffusion barrier. The high resolution of these resistance measurements allows the observation of atomic drift rates corresponding to roughly 100 atoms/second into and out of the well defined via structure. Resistance changes are observed with moderate current densities in the temperature range of 100°C to 200°C. We observe reversible increases and decreases in the resistance caused by the accumulation of atoms at the diffusion barrier within the via. Comparisons can be made to recent models for the transient electromigration induced vacancy drift. We are able to extract microscopic electromigration parameters as well as differentiate between copper and aluminum as the initial diffusing element.


Vacuum ◽  
1985 ◽  
Vol 35 (12) ◽  
pp. 547-553 ◽  
Author(s):  
H. Norström ◽  
S. Nygren ◽  
P. Wiklund ◽  
M. Östling ◽  
R. Buchta ◽  
...  

Author(s):  
D. F. Blake ◽  
L. F. Allard ◽  
D. R. Peacor

Echinodermata is a phylum of marine invertebrates which has been extant since Cambrian time (c.a. 500 m.y. before the present). Modern examples of echinoderms include sea urchins, sea stars, and sea lilies (crinoids). The endoskeletons of echinoderms are composed of plates or ossicles (Fig. 1) which are with few exceptions, porous, single crystals of high-magnesian calcite. Despite their single crystal nature, fracture surfaces do not exhibit the near-perfect {10.4} cleavage characteristic of inorganic calcite. This paradoxical mix of biogenic and inorganic features has prompted much recent work on echinoderm skeletal crystallography. Furthermore, fossil echinoderm hard parts comprise a volumetrically significant portion of some marine limestones sequences. The ultrastructural and microchemical characterization of modern skeletal material should lend insight into: 1). The nature of the biogenic processes involved, for example, the relationship of Mg heterogeneity to morphological and structural features in modern echinoderm material, and 2). The nature of the diagenetic changes undergone by their ancient, fossilized counterparts. In this study, high resolution TEM (HRTEM), high voltage TEM (HVTEM), and STEM microanalysis are used to characterize tha ultrastructural and microchemical composition of skeletal elements of the modern crinoid Neocrinus blakei.


Sign in / Sign up

Export Citation Format

Share Document