The Effect of Annealing Temperatures on Selected Properties of WC/C Coatings, Deposited Using Hexacarbonyl Wolfram in an N2-SiH4 Atmosphere

In this paper, we present the results of an experimental study on WC/C coatings, deposited by using plasma-enhanced chemical vapor deposition in an N2-SiH4 atmosphere, annealed at temperatures of 200, 500 and 800 °C, in which the hexacarbonyl of W was used as a precursor. During the experiments, the topography, chemical composition, morphology, as well as selected mechanical properties, such as hardness, Young’s modulus, and coefficient of friction of the WC/C coatings were analyzed. Annealing without the protective atmosphere in the mentioned temperatures caused a decrease in hardness (up to 15 ± 2.7 GPa). In addition, the coefficient of friction value increased only to 0.37 ± 0.03.

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Microstructure and Mechanical Properties of Annealed WC/C PECVD Coatings Deposited Using Hexacarbonyl of W with Different Gases

Materials ◽

10.3390/ma13163576 ◽

2020 ◽

Vol 13 (16) ◽

pp. 3576 ◽

Cited By ~ 1

Author(s):

Peter Horňák ◽

Daniel Kottfer ◽

Karol Kyzioł ◽

Marianna Trebuňová ◽

Janka Majerníková ◽

...

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Tungsten Carbide ◽

Coefficient Of Friction ◽

Vapor Deposition ◽

Chemical Vapor ◽

Deposition Process ◽

Mechanical And Tribological Properties ◽

Annealing Temperatures ◽

Different Gases

The present work studies the tungsten carbide (WC/C) coatings deposited by using Plasma Enhanced Chemical Vapor Deposition (PECVD), with and without gases of Ar and N2. Volatile hexacarbonyl of W was used as a precursor. Their mechanical and tribological properties were evaluated. The following values were obtained by using deposition process with N2 of HIT = 19.7 ± 4.1 GPa, EIT = 221 ± 2.1 GPa, and coefficient of friction (COF) = 0.35 ± 0.09. Secondly, deposition without the aforementioned gas obtained values of HIT = 20.9 ± 2 GPa, EIT = 292 ± 20 GPa, and COF = 0.69 ± 0.05. WC/C coatings were annealed at temperatures of 200, 500, and 800 °C, respectively. Evaluated factors include the introduced properties, the observed morphology, and the structural composition of WC/C coatings. The process of degradation was carried out by using various velocities, depending on used gases and annealing temperatures.

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Mechanical Properties of the Carbonaceous Films Formed by Focused Ion-beam-assisted Chemical Vapor Deposition

IEEJ Transactions on Fundamentals and Materials ◽

10.1541/ieejfms.130.949 ◽

2010 ◽

Vol 130 (10) ◽

pp. 949-954

Author(s):

Junichi Yanagisawa

Keyword(s):

Mechanical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Focused Ion Beam ◽

Ion Beam ◽

Chemical Vapor

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A reactive molecular dynamics study on the mechanical properties of a recently synthesized amorphous carbon monolayer converted into a nanotube/nanoscroll

Physical Chemistry Chemical Physics ◽

10.1039/d0cp06613c ◽

2021 ◽

Author(s):

Marcelo Lopes Pereira Junior ◽

Wiliam Ferreira da Cunha ◽

Douglas Soares Galvão ◽

Luiz Antonio Ribeiro Junior

Keyword(s):

Mechanical Properties ◽

Molecular Dynamics ◽

Chemical Vapor Deposition ◽

Amorphous Carbon ◽

Vapor Deposition ◽

Chemical Vapor ◽

Free Standing ◽

Reactive Molecular Dynamics

Recently, laser-assisted chemical vapor deposition has been used to synthesize a free-standing, continuous, and stable monolayer amorphous carbon (MAC).

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