scholarly journals Synthesis of Lithium Phosphorus Oxynitride (LiPON) Thin Films by Li3PO4 Anodic Evaporation in Nitrogen Plasma of a Low-Pressure Arc Discharge

Membranes ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 40
Author(s):  
Nikolay Gavrilov ◽  
Alexander Kamenetskikh ◽  
Petr Tretnikov ◽  
Alexey Nikonov ◽  
Leonid Sinelnikov ◽  
...  

Thin amorphous films of LiPON solid electrolyte were prepared by anodic evaporation of lithium orthophosphate Li3PO4 in an arc discharge with a self-heating hollow cathode at a nitrogen pressure of 1 Pa. Distribution of the arc current between two electrodes having an anode potential provided independent control of the evaporation rate of Li3PO4 and the density of nitrogen plasma. Stabilization of the evaporation rate was achieved using a crucible with multi-aperture cover having floating potential. The existence of a threshold value of discharge current (40 A) has been established, which, upon reaching ionic conductivity over 10−8 S/cm, appears in the films. Probe diagnostics of discharge plasma were carried out. It has been shown that heating the films during deposition by plasma radiation to a temperature of 200 °C is not an impediment to achieving high ionic conductivity of the films. Dense uniform films of LiPON thickness 1 mm with ionic conductivity up to 1 × 10−6 S/cm at a deposition rate of 4 nm/min are obtained.

2011 ◽  
Vol 2011 ◽  
pp. 1-5 ◽  
Author(s):  
Longhai Shen ◽  
Nan Wang

The effect of nitrogen pressure on the structure of Ta-N, Cr-N, Mo-N, and W-N nanocrystals formed in arc discharge process was investigated. At the nitrogen pressure of5~20 kPa, the pure cubic-phase TaN and CrN nanocrystals were formed, whereas pure cubic phase of Mo2N and W2N cannot be obtained. A little of metal Mo and a mass of metal W were mixed with the products of Mo2N and W2N, respectively. At the nitrogen pressure of30~50 kPa, subnitride Ta2N and Cr2N and metal Cr were gradually formed in the product; furthermore, the proportion of metal Mo and W increased in the product of Mo2N and W2N, respectively. It indicated that the low nitrogen pressure makes cubic mononitride formation favorable. We explain this experimental observation in terms of the evaporation rate of anode metal and the ionization of nitrogen.


2014 ◽  
Vol 783-786 ◽  
pp. 1426-1431
Author(s):  
Wang Ryeol Kim ◽  
Min Chul Kwon ◽  
Jung Hoon Lee ◽  
Uoo Chang Jung ◽  
Won Sub Chung

TiAlSiN coatings were deposited on WC-Co metal by using a cathodic arc ion deposition method of cylindrical cathode. We used Ti / Al (50 / 50 at.%) arc target and silicon sputter target. The influence of the nitrogen pressure, TiAl cathode arc current, bias voltage, and deposition temperature on the mechanical and the structural properties of the films were investigated. The structural features of the films were investigation in detail using X-ray diffraction. And coatings were characterized by means of FE-SEM, nanoindentation, Scratch tester, Tribology tester, XRD and XPS. The hardness of the film reached 43 GPa at the cathode arc current of 230 A and decreased with a further increase of the arc current. And the adhesion of the film reached 34 N. The results showed that the TiAlSiN coating exhibited an excellent mechanical properties which application for tools and molds.


2018 ◽  
Vol 32 (34n36) ◽  
pp. 1840067 ◽  
Author(s):  
F. Fang ◽  
J. Rogers ◽  
P. P. Murmu ◽  
J. Kennedy

Copper oxide is a semiconducting compound with a narrow band gap and is used for photoconductive and photothermal applications. Most of the synthesis methods for the preparation of copper oxide composite materials either are unsuitable for mass fabrication or inevitably introduce unwanted impurities. In this work, we report on the synthesis of copper oxide composite materials by the arc discharge method with a pure copper rod as the anode and graphite as the cathode. Ion beam analysis techniques, particle-induced X-ray emission and Rutherford backscattering spectrometry were used to probe the impurities in the copper oxide composites. Ion beam analysis results revealed copper and oxygen as constituent elements with no impurities. X-ray diffraction results discovered the presence of CuO, Cu2O and Cu phases in the composite materials. The morphology of the as-synthesized copper oxide was studied by scanning electron microscopy. Results clearly demonstrated that spherical particles were obtained with an average diameter of 14 [Formula: see text]m (range 2–85 [Formula: see text]m), 35 [Formula: see text]m (range 20–100 [Formula: see text]m) and 50 [Formula: see text]m (range 30–120 [Formula: see text]m) for the arc current of 60 A, 80 A and 95 A, respectively. It was found that the morphology can be controlled by the arc discharge parameters, e.g. a lower arc discharge current contributed to a smaller particle size. This is because the electric arc current influences the nucleation and the growth of the spherical structures. Due to its simplicity of synthesis, the proposed arc discharge is a promising technique for the fabrication of copper oxide composite materials for optical and electrical applications.


2015 ◽  
Vol 37 ◽  
pp. 51-57 ◽  
Author(s):  
Anatoliy Stepanovich Vereschaka ◽  
Alexey Anatolevich Vereschaka ◽  
D.V. Sladkov ◽  
A.Yu. Aksenenko ◽  
N.N. Sitnikov

The study considers the challenge of improving the efficiency of dry finishing and semi-finishing turning of (P10-P20) steel with carbide tools with complex composition coatings by directed selection of the composition and properties of the coatings through the control of the parameters of the filtered cathodic vacuum-arc deposition (FCVAD). The conducted tests have confirmed the feasibility and effectiveness of the control of compositions, structures, and properties of complex composite coatings of Ti-TiN-TiAlN type by varying the parameters of the FCVAD process. In particular, it has been found out that the ratio of Ti/Al, which greatly affects the important properties of the coating (grain size, lattice parameter, microhardness, fracture toughness, etc.), can be changed at constant compositions of cathodes by varying such parameters of coating synthesis as titanium cathode arc current, nitrogen pressure, and substrate shear stress. It has been shown that Ti-TiN-TiAlN coating produced at different values of the parameters of synthesis significantly changes the cutting properties of carbide tool and thus allows optimizing the coating composition for a variety of machining conditions.The developed methods are also applicable for multi-component complex composite coatings.


2011 ◽  
Vol 15 ◽  
pp. 57-67 ◽  
Author(s):  
V. Eskizeybek ◽  
E.S. Karabulut ◽  
A. Avci

The synthesis of multi-walled carbon nanotubes MWCNTs, carbon nanoshells, carbon nanoonions (CNOs), different types of carbon nanostructures and CaCO3 nanoparticles were performed using an arc-discharge method in mineral water. The structures of the synthesized nanostructures were visualized by scanning electron microscopy and transmission electron microscopy (TEM). Furthermore, ultraviolet-visible spectroscopy and thermo-gravimetric analysis (TGA) were used to determine the optical and thermal properties of the synthesized nanostructures. The TEM observations revealed that as-synthesized MWCNTs and CNOs have nominal diameters in the range of 10-20 nm and 30-50 nm, respectively. The CaCO3 nanoparticles were directly synthesized using arc discharge due to the presence of Ca minerals in the mineral water. The production rate of synthesized MWCNTs decreased when the arc current increased above 50 A, and the production rate of different nanoparticles increased with increasing arc current. The thermal-oxidative stability of the carbon nanostructures using TGA was explored separately under argon and oxygen atmospheres.


2013 ◽  
Vol 2013 ◽  
pp. 1-13 ◽  
Author(s):  
K. T. Chaudhary ◽  
Z. H. Rizvi ◽  
K. A. Bhatti ◽  
J. Ali ◽  
P. P. Yupapin

Synthesis of multiwalled carbon nanotube (MWCNT) by arc discharge process is investigated with methane (CH4) as background and feedstock gas. The arc discharge is carried out between two graphite electrodes for ambient pressures 100, 300, and 500 torr and arc currents 50, 70, and 90 A. Plasma kinetics such as the density and temperature for arc discharge carbon plasma is determined to find out the contribution of physical parameters as arc current and ambient pressure on the plasma dynamics and growth of MWCNT. With increase in applied arc current and ambient pressure, an increase in plasma temperature and density is observed. The synthesized samples of MWCNT at different experimental conditions are characterized by transmission electron microscopy, scanning electron microscopy, Raman spectroscopy, Fourier transform infrared spectroscopy, and X-ray diffraction. A decrease in the diameter and improvement in structure quality and growth of MWCNT are observed with increase in CH4ambient pressure and arc current. For CH4ambient pressure 500 torr and arc current 90 A, the well-aligned and straight MWCNT along with graphene stakes are detected.


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