scholarly journals Fabrication of Functional Microdevices in SU-8 by Multi-Photon Lithography

Micromachines ◽  
2021 ◽  
Vol 12 (5) ◽  
pp. 472
Author(s):  
Pooria Golvari ◽  
Stephen M. Kuebler
Keyword(s):  
Material System ◽  
Electromechanical Systems ◽  
Micro Fluidics ◽  
Novel Methods

This review surveys advances in the fabrication of functional microdevices by multi-photon lithography (MPL) using the SU-8 material system. Microdevices created by MPL in SU-8 have been key to progress in the fields of micro-fluidics, micro-electromechanical systems (MEMS), micro-robotics, and photonics. The review discusses components, properties, and processing of SU-8 within the context of MPL. Emphasis is focused on advances within the last five years, but the discussion also includes relevant developments outside this period in MPL and the processing of SU-8. Novel methods for improving resolution of MPL using SU-8 and discussed, along with methods for functionalizing structures after fabrication.

Ion thinning of integrated circuit transverse specimens for transmission electron microscopy

1992 ◽  
Vol 50 (2) ◽  
pp. 1426-1427
Author(s):  
F. Shaapur
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Integrated Circuit ◽  
Substrate Surface ◽  
Homogeneous Material ◽  
Material System ◽  
Ion Milling ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Motion Profile

Non-uniform ion-thinning of heterogenous material structures has constituted a fundamental difficulty in preparation of specimens for transmission electron microscopy (TEM). A variety of corrective procedures have been developed and reported for reducing or eliminating the effect. Some of these techniques are applicable to any non-homogeneous material system and others only to unidirectionalfy heterogeneous samples. Recently, a procedure of the latter type has been developed which is mainly based on a new motion profile for the specimen rotation during ion-milling. This motion profile consists of reversing partial revolutions (RPR) within a fixed sector which is centered around a direction perpendicular to the specimen heterogeneity axis. The ion-milling results obtained through this technique, as studied on a number of thin film cross-sectional TEM (XTEM) specimens, have proved to be superior to those produced via other procedures.XTEM specimens from integrated circuit (IC) devices essentially form a complex unidirectional nonhomogeneous structure. The presence of a variety of mostly lateral features at different levels along the substrate surface (consisting of conductors, semiconductors, and insulators) generally cause non-uniform results if ion-thinned conventionally.

Cross-sectional TEM specimen preparation from magneto-optical disk by ultramicrotomy

1993 ◽  
Vol 51 ◽  
pp. 236-237
Author(s):  
F. Shaapur ◽  
M.J. Kim ◽  
Seh Kwang Lee ◽  
Soon Gwang Kim
Keyword(s):  
System Development ◽  
Thin Foil ◽  
Specimen Preparation ◽  
Material System ◽  
Cross Sectional ◽  
Protective Layers ◽  
New Material ◽  
Diamond Saw ◽  
Original Production ◽  
Thick Medium

TEM characterization and microanalysis of the recording media is crucial and complementary to new material system development as well as quality control applications. Due to the type of material generally used for supporting the medium, i.e., a polymer, conventional macro- and microthinning procedures for thin foil preparation are not applicable. Ultramicrotorny (UM) is a viable option and has been employed in previous similar studies. In this work UM has been used for preparation of XTEM samples from a magneto-optical (MO) recording medium in its original production format.The as-received material system consisted of a 4-layer, 2100 Å thick medium including a 300 Å TbFeCo layer enveloped by silicon nitride protective layers supported on a 1.2 mm thick × 135 mm (5.25 in.) diameter polycarbonate disk. Recording tracks had an approximate pitch of 1.6 μm separated by 800 Å deep peripheral grooves. Using a Buehler Isomet low-speed diamond saw, 1 mm wide and 20 mm long strips were cut out of the disk along the recording tracks.

CBED study of low-temperature InP grown by gas source MBE

1993 ◽  
Vol 51 ◽  
pp. 810-811
Author(s):  
R. Rajesh ◽  
M.J. Kim ◽  
J.S. Bow ◽  
R.W. Carpenter ◽  
G.N. Maracas
Keyword(s):  
Low Temperature ◽  
Second Phase ◽  
Material System ◽  
Ion Milling ◽  
Electrical Measurements ◽  
Gas Source ◽  
Structural And Electrical Properties ◽  
The One ◽  
Lt Inp ◽  
Gas Source Mbe

In our previous work on MBE grown low temperature (LT) InP, attempts had been made to understand the relationships between the structural and electrical properties of this material system. Electrical measurements had established an enhancement of the resistivity of the phosphorus-rich LT InP layers with annealing under a P2 flux, which was directly correlated with the presence of second-phase particles. Further investigations, however, have revealed the presence of two fundamentally different types of precipitates. The first type are the surface particles, essentially an artefact of argon ion milling and containing mostly pure indium. The second type and the one more important to the study are the dense precipitates in the bulk of the annealed layers. These are phosphorus-rich and are believed to contribute to the improvement in the resistivity of the material.The observation of metallic indium islands solely in the annealed LT layers warranted further study in order to better understand the exact reasons for their formation.

STAGES OF HIGHER MATHEMATICS TEACHING FOR FUTURE CIVIL PROTECTION SPECIALISTS

2018 ◽  
pp. 168-172
Author(s):  
M. Kusiy
Keyword(s):  
Information Search ◽  
Cognitive Activity ◽  
Civil Defense ◽  
Educational Material ◽  
Material System ◽  
Civil Protection ◽  
Intellectual Activity ◽  
Innovative Teaching ◽  
The Future ◽  
Selection Of

Introduction.  During the training of emergency specialists, the development of a clear, structured thinking is important.  And the mathematical disciplines themselves are aimed at activating the intellectual activity of cadets and students, the ability to think logically, consistently, and reasonably.  However, cadets and students consider mathematics to be a complex, inaccessible and not very necessary science.  Therefore, there is a need for continuous, continuous development of methods, technologies of forms of training that would increase interest, accessibility to mathematical disciplines and at the same time, were aimed at improving the quality of training of future rescuers. Purpose.  Identify the main stages of teaching higher mathematics for future civil defense specialists and substantiate their peculiarities. Methods.  The article used methods of scientific knowledge (general), methods used in the empirical and theoretical levels of research (transition from abstract to specific).  Results.  The basic stages of teaching higher mathematics for future specialists of civil defense are determined: motivation, research, assimilation, application.  The proposed stages are analyzed in detail.  The regularities that contribute to the increase of motivation (selection of educational material, system approach, creative approach, a variety of forms and methods of teaching, taking into account the specifics of the future profession, the use of innovative teaching technologies) are highlighted.  There are three phases of knowledge (curiosity, curiosity, theoretical knowledge).  It is determined that for the acquisition of knowledge it is possible to use the information - search type of classes with its microstructure.  Planning the microstructure of occupations in the first place should put the level of cognitive activity, awareness and independence in the performance of educational tasks.  It is noted that the process of assimilation is the process of internalization of knowledge, putting it into the inner plan of man, and the application is to extraorise knowledge, make it to the outline of human activity.  It was investigated that the stage of application of knowledge is divided into two parts (the first is the application of knowledge, skills in standard terms, the second - the transfer of knowledge, skills, skills in new, changed conditions).  Examples of applied tasks that can be solved in higher mathematics classes are given.  It is substantiated that only in combination of all stages is formed the need for knowledge acquisition and their application. Conclusion.  Stages of teaching higher mathematics - a cyclical process that requires constant improvement, hard work of the teacher.  Stages of motivation and application combine the same laws (selection of educational material, creative approach, taking into account the specifics of the future profession, the use of innovative teaching technologies).  And only in a logical, thought-out combination of these stages can one form the future need for civil protection specialists to expand the knowledge and apply it to practical application.

Effect of High Salt Concentration on Ion Clustering and Transport in Polymer Solid Electrolytes: a Molecular Dynamics Study of PEO-LiTFSI

2018 ◽  
Author(s):  
Nicola Molinari ◽  
Jonathan P. Mailoa ◽  
Boris Kozinsky
Keyword(s):  
Polymer Electrolyte ◽  
Salt Concentration ◽  
Rational Design ◽  
Material System ◽  
Ion Dynamics ◽  
High Concentration ◽  
Anion Clusters ◽  
Poly Ethylene Oxide ◽  
Poly Ethylene

<div> <div> <div> <p>The model and analysis methods developed in this work are generally applicable to any polymer electrolyte/cation-anion combination, but we focus on the currently most prominent polymer electrolyte material system: poly(ethylene) oxide/Li- bis(trifluoromethane) sulfonamide (PEO + LiTFSI). The obtained results are surprising and challenge the conventional understanding of ionic transport in polymer electrolytes: the investigation of a technologically relevant salt concentration range (1 - 4 M) revealed the central role of the anion in coordinating and hindering Li ion movement. Our results provide insights into correlated ion dynamics, at the same time enabling rational design of better PEO-based electrolytes. In particular, we report the following novel observations. 1. Strong binding of the Li cation with the polymer competes with significant correlation of the cation with the salt anion. 2. The appearance of cation-anion clusters, especially at high concentration. 3. The asymmetry in the composition (and therefore charge) of such clusters; specifically, we find the tendency for clusters to have a higher number of anions than cations.</p> </div> </div> </div>

Effect of High Salt Concentration on Ion Clustering and Transport in Polymer Solid Electrolytes: a Molecular Dynamics Study of PEO-LiTFSI

2018 ◽  
Author(s):  
Nicola Molinari ◽  
Jonathan P. Mailoa ◽  
Boris Kozinsky
Keyword(s):  
Polymer Electrolyte ◽  
Salt Concentration ◽  
Rational Design ◽  
Material System ◽  
Ion Dynamics ◽  
High Concentration ◽  
Anion Clusters ◽  
Poly Ethylene Oxide ◽  
Poly Ethylene

<div> <div> <div> <p>The model and analysis methods developed in this work are generally applicable to any polymer electrolyte/cation-anion combination, but we focus on the currently most prominent polymer electrolyte material system: poly(ethylene) oxide/Li- bis(trifluoromethane) sulfonamide (PEO + LiTFSI). The obtained results are surprising and challenge the conventional understanding of ionic transport in polymer electrolytes: the investigation of a technologically relevant salt concentration range (1 - 4 M) revealed the central role of the anion in coordinating and hindering Li ion movement. Our results provide insights into correlated ion dynamics, at the same time enabling rational design of better PEO-based electrolytes. In particular, we report the following novel observations. 1. Strong binding of the Li cation with the polymer competes with significant correlation of the cation with the salt anion. 2. The appearance of cation-anion clusters, especially at high concentration. 3. The asymmetry in the composition (and therefore charge) of such clusters; specifically, we find the tendency for clusters to have a higher number of anions than cations.</p> </div> </div> </div>

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