scholarly journals Multi-Device Piezoelectric Direct Discharge for Large Area Plasma Treatment

Plasma ◽  
2021 ◽  
Vol 4 (2) ◽  
pp. 281-293
Author(s):  
Dariusz Korzec ◽  
Florian Hoppenthaler ◽  
Anatoly Shestakov ◽  
Dominik Burger ◽  
Andrej Shapiro ◽  
...  

The piezoelectric cold plasma generators (PCPG) allow for production of the piezoelectric direct discharge (PDD), which is a kind of cold atmospheric pressure plasma (APP). The subjects of this study are different arrays of PCPGs for large-area treatment of planar substrates. Two limiting factors are crucial for design of such arrays: (i) the parasitic coupling between PCPGs resulting in minimum allowed distance between devices, and (ii) the homogeneity of large area treatment, requiring an overlap of the activation zones resulting from each PCPG. The first limitation is investigated by the use of electric measurements. The minimum distance for operation of 4 cm between two PCPGs is determined by measurement of the energy coupling from an active PCPG to a passive one. The capacitive probe is used to evaluate the interference between signals generated by two neighboring PCPGs. The second limitation is examined by activation image recording (AIR). Two application examples illustrate the compromising these two limiting factors: the treatment of large area planar substrates by PCPG array, and the pretreatment of silicon wafers with an array of PCPG driven dielectric barrier discharges (DBD).

2006 ◽  
Vol 45 ◽  
pp. 1173-1177 ◽  
Author(s):  
Michael L. Hitchman ◽  
Sergei E. Alexandrov

This review gives an overview of the characteristics of various non-thermal, nonequilibrium plasmas and outlines results of AP-PECVD with dielectric barrier discharges.


2020 ◽  
Vol 20 ◽  
pp. 100600
Author(s):  
Vincenza Armenise ◽  
Fiorenza Fanelli ◽  
Antonella Milella ◽  
Lucia D'Accolti ◽  
Antonella Uricchio ◽  
...  

2013 ◽  
Vol 816-817 ◽  
pp. 28-32
Author(s):  
Virginia Dinca ◽  
Rodica Vladoiu ◽  
Mirela Contulov ◽  
Mirko Cernak

Surface Dielectric Barrier Discharges (SDBD) plasma treatment has been performed to produce uniform atmospheric plasmas in He and in open air in order to functionalize the polycarbonate surface. SDBD is used for different application, processing especially of low-cost polymeric materials, combining the advantages of non-equilibrium plasma properties with the ease of atmospheric-pressure operation. Contact angle measurements were used to record the short-and long - term variations in wettability of treated and untreated polycarbonate sheets. The modification process was determined with hydrophilic measurements evaluated by means of the SEE system drop test.


2019 ◽  
Vol 17 (2) ◽  
pp. 1900169 ◽  
Author(s):  
Detlef Loffhagen ◽  
Markus M. Becker ◽  
Dirk Hegemann ◽  
Bernard Nisol ◽  
Sean Watson ◽  
...  

2019 ◽  
Vol 9 (17) ◽  
pp. 3505 ◽  
Author(s):  
Vladislav Gamaleev ◽  
Naoyuki Iwata ◽  
Masaru Hori ◽  
Mineo Hiramatsu ◽  
Masafumi Ito

In this work, we developed a portable device with low production and operation costs for generating an ambient air low-current arc (AALCA) that is transferred to the surface of a treated liquid. It was possible to generate a stable discharge, irrespective of the conductivity of the treated liquid, as a sequence of corona, repeating spark, and low-current arc discharges. The estimated concentration of reactive oxygen and nitrogen species (RONS) in plasma-treated water (PTW) produced using AALCA treatment was two orders of magnitude higher than that of PTW produced using conventional He nonequilibrium atmospheric pressure plasma jets or dielectric barrier discharges. The strong bactericidal effect of the treatment using AALCA and the water treated using AALCA was confirmed by survival tests of Escherichia coli. Further, the possibility of treating a continuous flow of liquid using AALCA was demonstrated.


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