scholarly journals Nonlinear Analytical Model of Two Weakly Coupled MEMS Cantilevers for Mass Sensing Using Electrostatic Actuation

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1084
Author(s):  
Toky Rabenimanana ◽  
Vincent Walter ◽  
Najib Kacem ◽  
Patrice Le Moal ◽  
Joseph Lardiès
Keyword(s):  
Analytical Model ◽  
Beam Theory ◽  
Continuous System ◽  
Mode Localization ◽  
Dc Voltage ◽  
Weakly Coupled ◽  
Flexible Supports ◽  
Nonlinear Analytical Model ◽  
Mems Mass Sensor ◽  
Mems Cantilevers

This paper presents a nonlinear analytical model of MEMS mass sensor, which is composed of two cantilevers of 98 µm and 100 µm length, 20 µm width and 1.3 µm thick. They are connected by a coupling beam and only the shortest cantilever is actuated by a combined AC-DC voltage. The DC voltage is used to equilibrate the system and the phenomenon of mode localization is investigated when a mass perturbation is applied. The sensor is modeled as a continuous system with beam theory and non-ideal boundary conditions are considered by using flexible supports. With a low AC voltage of 10 mV, a DC voltage of 5.85 V can counterbalance the length difference. This DC voltage decreases at 5.60 V when we increase the AC voltage, due to the effect of electrostatic nonlinearities. For a relative added mass of 0.1%, the amplitude change in the two cantilevers is more important when the coupling is weaker.

Mode Localization in Two Coupled Nearly Identical MEMS Cantilevers for Mass Sensing

2019 ◽  
Author(s):  
Toky Rabenimanana ◽  
Vincent Walter ◽  
Najib Kacem ◽  
Patrice Le Moal ◽  
Gilles Bourbon ◽  
...  
Keyword(s):  
Amplitude Ratio ◽  
Actuation Voltage ◽  
Beam Theory ◽  
Mass Detection ◽  
Mass Sensing ◽  
Experimental Frequency ◽  
Mode Localization ◽  
Dc Voltage ◽  
Geometrical Imperfections ◽  
Mems Cantilevers

Abstract This paper investigates the mass sensing in a mode-localized sensor composed of two weakly coupled MEMS cantilevers with lengths 98μm and 100μm. The two resonators are connected by a coupling beam near the fixed end, and the shortest cantilever is electrostatically actuated with a combined AC-DC voltage. The DC actuation voltage is tuned to compensate the length difference and geometrical imperfections in order to dynamically equilibrate the system. An analytical model of the device using the Euler Bernoulli beam theory is presented and the required DC voltage to reach the balanced state is used. A mass perturbation is then added on the long cantilever and the eigenstate shifts and amplitude ratios in each mode are calculated for different couplings. Results show that the amplitude ratio of the second mode is the best output metric for the mass detection. For the validation of the model, an experimental investigation is carried out by using devices fabricated with the Multi-User MEMS Processes. Three different couplings are considered and the long cantilever is designed with a mass attached at its end. Instead of adding a mass on the device, we remove this part with a probe to introduce the perturbation. When the mass is removed, the experimental frequency responses of the device show localized vibrations, which are in good agreement with the theoretical results.

On Localization in Coupled, Spinning, Circular Plates

1994 ◽  
Vol 116 (4) ◽  
pp. 555-561 ◽  
Author(s):  
C. O. Orgun ◽  
B. H. Tongue
Keyword(s):  
Analytical Model ◽  
Rotation Speed ◽  
Response Mode ◽  
Circular Plates ◽  
Mode Localization ◽  
Central Spindle ◽  
Vibrational Response ◽  
Modal Response ◽  
Weakly Coupled ◽  
All Speeds

The vibrational response of multiple rotating circular plates, stacked together on a central spindle and coupled through stationary springs, is investigated. An analytical model is derived and a Rayleigh-Ritz approach employed in order to obtain the system’s modal response. Mode localization is shown to occur at all speeds of rotation for weakly coupled subcomponents and the degree to which the system exhibits localized behavior is shown to increase with rotation speed.

scholarly journals Analytical estimation of diametral error in turning process considering flexible supports

2019 ◽  
Vol 272 ◽  
pp. 01054
Author(s):  
Kalidasan Rathinam ◽  
Sandeep Kumar ◽  
Vivek Sharma
Keyword(s):  
Cutting Force ◽  
Analytical Model ◽  
Metal Cutting ◽  
Slenderness Ratio ◽  
Research Work ◽  
Beam Theory ◽  
Work Piece ◽  
Force Component ◽  
Turning Process ◽  
Flexible Supports

Turning is a fundamental metal cutting process. Diametral accuracy plays a vital role while turning long and slender workpieces. Hence the estimation of diametral error becomes more important for work pieces generally with slenderness ratio greater than six. The diametral error during the turning process is caused mainly by radial cutting force component and tangential cutting force component. Apart from this, it is also affected by cutting conditions, rigidity of the machine tool and type of support condition of the work piece. The main aim of the present research work is to construct an analytical model of turning process and to estimate the diametral error of the work piece. The cutting tool edge deflection is determined based on Euler Bernoulli beam theory. The work piece is considered as propped cantilever beam with flexible supports at the ends. These flexible supports are introduced taking the rigidity of head stock and tail stock into consideration. The radial deflection of the work piece is estimated for different slenderness ratio. It was found that the diametral error was lesser near the head stock end when compared to the tail stock end. This is due to the fact that the rigidity of the head stock higher than the tail stock. The maximum diametral error was found almost in the middle of the work piece. This occurs due to the least rigidity at the center along the length of the work piece. The obtained results are also compared with the literature. A good match was found between the results of the analytical model and published literature.

scholarly journals Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation

2019 ◽  
Vol 295 ◽  
pp. 643-652 ◽  
Author(s):  
Toky Rabenimanana ◽  
Vincent Walter ◽  
Najib Kacem ◽  
Patrice Le Moal ◽  
Gilles Bourbon ◽  
...  
Keyword(s):  
Experimental Model ◽  
Model Validation ◽  
Mass Sensor ◽  
Mode Localization ◽  
Weakly Coupled ◽  
Mems Cantilevers

scholarly journals A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 310
Author(s):  
Muhammad Mubasher Saleem ◽  
Shayaan Saghir ◽  
Syed Ali Raza Bukhari ◽  
Amir Hamza ◽  
Rana Iqtidar Shakoor ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Proof Mass ◽  
Amplitude Ratio ◽  
Silicon On Insulator ◽  
Coupled Resonators ◽  
Mode Localization ◽  
Mems Accelerometer ◽  
Weakly Coupled ◽  
Input Acceleration

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 and nonlinearity less than 0.5%.

Flexure-Based Two Degree-of-Freedom Legs for Walking Microrobots

2006 ◽  
Author(s):  
Ankur M. Mehta ◽  
Kristofer S. J. Pister
Keyword(s):  
Analytical Model ◽  
Design Space ◽  
Beam Theory ◽  
Degree Of Freedom ◽  
Bernoulli Beam ◽  
Comb Drive ◽  
Walking Gait ◽  
Euler Bernoulli Beam ◽  
Force Displacement ◽  
Two Degree Of Freedom

This work examines the design of legs for a walking microrobot. The parameterized force-displacement relationships of planar serpentine flexure-based two degree-of-freedom legs are analyzed. An analytical model based on Euler-Bernoulli beam theory is developed to explore the design space, and is subsequently refined to include contact between adjacent beams. This is used to determine a successful leg geometry given dimensional constraints and actuator limitations. Standard comb drive actuators that output 100 μN of force over a 15 μm bi-directional throw are shown able to drive a walking gait with three legs on a 1 cm2 silicon die microrobot. If the comb drive suspensions cannot withstand the generated reaction moments, an alternate pivot-based leg linkage is proposed.

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