scholarly journals Mass sensor using mode localization in two weakly coupled MEMS cantilevers with different lengths: Design and experimental model validation

2019 ◽  
Vol 295 ◽  
pp. 643-652 ◽  
Author(s):  
Toky Rabenimanana ◽  
Vincent Walter ◽  
Najib Kacem ◽  
Patrice Le Moal ◽  
Gilles Bourbon ◽  
...  
Keyword(s):  
Experimental Model ◽  
Model Validation ◽  
Mass Sensor ◽  
Mode Localization ◽  
Weakly Coupled ◽  
Mems Cantilevers

scholarly journals Nonlinear Analytical Model of Two Weakly Coupled MEMS Cantilevers for Mass Sensing Using Electrostatic Actuation

Proceedings ◽  
2018 ◽  
Vol 2 (13) ◽  
pp. 1084
Author(s):  
Toky Rabenimanana ◽  
Vincent Walter ◽  
Najib Kacem ◽  
Patrice Le Moal ◽  
Joseph Lardiès
Keyword(s):  
Analytical Model ◽  
Beam Theory ◽  
Continuous System ◽  
Mode Localization ◽  
Dc Voltage ◽  
Weakly Coupled ◽  
Flexible Supports ◽  
Nonlinear Analytical Model ◽  
Mems Mass Sensor ◽  
Mems Cantilevers

This paper presents a nonlinear analytical model of MEMS mass sensor, which is composed of two cantilevers of 98 µm and 100 µm length, 20 µm width and 1.3 µm thick. They are connected by a coupling beam and only the shortest cantilever is actuated by a combined AC-DC voltage. The DC voltage is used to equilibrate the system and the phenomenon of mode localization is investigated when a mass perturbation is applied. The sensor is modeled as a continuous system with beam theory and non-ideal boundary conditions are considered by using flexible supports. With a low AC voltage of 10 mV, a DC voltage of 5.85 V can counterbalance the length difference. This DC voltage decreases at 5.60 V when we increase the AC voltage, due to the effect of electrostatic nonlinearities. For a relative added mass of 0.1%, the amplitude change in the two cantilevers is more important when the coupling is weaker.

scholarly journals A Low-g MEMS Accelerometer with High Sensitivity, Low Nonlinearity and Large Dynamic Range Based on Mode-Localization of 3-DoF Weakly Coupled Resonators

Micromachines ◽  
2021 ◽  
Vol 12 (3) ◽  
pp. 310
Author(s):  
Muhammad Mubasher Saleem ◽  
Shayaan Saghir ◽  
Syed Ali Raza Bukhari ◽  
Amir Hamza ◽  
Rana Iqtidar Shakoor ◽  
...  
Keyword(s):  
Microelectromechanical Systems ◽  
Dynamic Range ◽  
Proof Mass ◽  
Amplitude Ratio ◽  
Silicon On Insulator ◽  
Coupled Resonators ◽  
Mode Localization ◽  
Mems Accelerometer ◽  
Weakly Coupled ◽  
Input Acceleration

This paper presents a new design of microelectromechanical systems (MEMS) based low-g accelerometer utilizing mode-localization effect in the three degree-of-freedom (3-DoF) weakly coupled MEMS resonators. Two sets of the 3-DoF mechanically coupled resonators are used on either side of the single proof mass and difference in the amplitude ratio of two resonator sets is considered as an output metric for the input acceleration measurement. The proof mass is electrostatically coupled to the perturbation resonators and for the sensitivity and input dynamic range tuning of MEMS accelerometer, electrostatic electrodes are used with each resonator in two sets of 3-DoF coupled resonators. The MEMS accelerometer is designed considering the foundry process constraints of silicon-on-insulator multi-user MEMS processes (SOIMUMPs). The performance of the MEMS accelerometer is analyzed through finite-element-method (FEM) based simulations. The sensitivity of the MEMS accelerometer in terms of amplitude ratio difference is obtained as 10.61/g for an input acceleration range of ±2 g with thermomechanical noise based resolution of 0.22 and nonlinearity less than 0.5%.

Mode Localization in Two Coupled Nearly Identical MEMS Cantilevers for Mass Sensing

2019 ◽  
Author(s):  
Toky Rabenimanana ◽  
Vincent Walter ◽  
Najib Kacem ◽  
Patrice Le Moal ◽  
Gilles Bourbon ◽  
...  
Keyword(s):  
Amplitude Ratio ◽  
Actuation Voltage ◽  
Beam Theory ◽  
Mass Detection ◽  
Mass Sensing ◽  
Experimental Frequency ◽  
Mode Localization ◽  
Dc Voltage ◽  
Geometrical Imperfections ◽  
Mems Cantilevers

Abstract This paper investigates the mass sensing in a mode-localized sensor composed of two weakly coupled MEMS cantilevers with lengths 98μm and 100μm. The two resonators are connected by a coupling beam near the fixed end, and the shortest cantilever is electrostatically actuated with a combined AC-DC voltage. The DC actuation voltage is tuned to compensate the length difference and geometrical imperfections in order to dynamically equilibrate the system. An analytical model of the device using the Euler Bernoulli beam theory is presented and the required DC voltage to reach the balanced state is used. A mass perturbation is then added on the long cantilever and the eigenstate shifts and amplitude ratios in each mode are calculated for different couplings. Results show that the amplitude ratio of the second mode is the best output metric for the mass detection. For the validation of the model, an experimental investigation is carried out by using devices fabricated with the Multi-User MEMS Processes. Three different couplings are considered and the long cantilever is designed with a mass attached at its end. Instead of adding a mass on the device, we remove this part with a probe to introduce the perturbation. When the mass is removed, the experimental frequency responses of the device show localized vibrations, which are in good agreement with the theoretical results.

Experimental Model Validation for a Flexible Robot With a Prismatic Joint

1990 ◽  
Vol 112 (3) ◽  
pp. 315-323 ◽  
Author(s):  
Ye-Chen Pan ◽  
A. Galip Ulsoy ◽  
R. A. Scott
Keyword(s):  
Rigid Body ◽  
Numerical Simulations ◽  
Dynamic Model ◽  
Experimental Model ◽  
Model Validation ◽  
Solution Method ◽  
Flexible Robot ◽  
Spherical Coordinate ◽  
Prismatic Joints ◽  
Rigid Body Motions

In [1] a dynamic model for flexible manipulators with prismatic joints and the solution method were presented. In this paper experiments on a spherical coordinate robot are performed to further validate the proposed dynamic model. Using the validated model, numerical simulations are performed to illustrate the coupling effects between the rigid body motions and the flexible motions, the effects of the flexible motion on a rigid body controller, and the effects of axial shortening.

Theoretical Study of Mode Localization Phenomenon in Bottom-Hole Assemblies in Oil-Well Drilling

1999 ◽  
Vol 121 (3) ◽  
pp. 183-188
Author(s):  
A. S. Yigit ◽  
M. D. Al-Ansary ◽  
M. Khalid
Keyword(s):  
Theoretical Study ◽  
Oil Well ◽  
Well Drilling ◽  
Mode Localization ◽  
Localization Phenomenon ◽  
Bottom Hole ◽  
Weakly Coupled ◽  
Bending Stresses ◽  
First Time ◽  
Strong Mode

The mode localization phenomena in bottom-hole assemblies (BHA) used in oil-well drilling is investigated. A fully gaged stabilizer model is shown to produce weak coupling between segments of drillcollars separated by stabilizers. It is observed that in a weakly coupled BHA, small disorder in span length can cause strong mode localization. For the first time, it is demonstrated that gravity induces a stiffness disorder, which in turn causes strong mode localization in an inclined wellbore, even though no other disorder is present. The effect of localized modes for failure is presented by examining the maximum bending stresses with and without mode localization. The results show that design and operation of drillstrings should consider the possibility of mode localization for an accurate prediction of dynamic behavior.

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