Design and Experimental Investigation of a 2-DOF Planar Micro-Positioning Table
2013 ◽
Vol 3
(2)
◽
pp. 39-54
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Keyword(s):
This paper presents the mechanical design and experimental characterization of a 2-DOF serial flexure-based micropositioning table. The cascade mechanical structure is proposed to implement planar motions of the moving platform. In order to increase the stroke of the moving platform, a lever mechanism is designed to amplify the displacement of the piezoelectric actuator. The finite element method is utilized to analyze the mechanical and thermal characteristics of the proposed 2-DOF micropositioning table. The WEDM (Wire Electro-Discharge Machining) technique is used to manufacture the prototype of the micropositioning table. A number of experimental tests have been conducted to investigate the characteristics of the developed system.
2014 ◽
Vol 615
◽
pp. 57-62
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2021 ◽
1994 ◽
Vol 116
(3)
◽
pp. 657-662
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